Double-exposure mask structure and photolithography method thereof
Double-exposure mask structure and photolithography method for performing a photolithography process on a substrate are provided. The substrate has a central region and a margin region. A double-exposure mask structure includes a plurality of parallel and spaced first masks corresponding to the central region, a plurality of parallel and spaced second masks corresponding to the central region, and a plurality of auxiliary masks. The second masks intersect with the first masks to form a plurality of overlapping regions. The auxiliary masks are not in contact with one another, and correspond to the Second masks to assist the overlapping regions neighboring to the auxiliary masks to have sufficient depth of focus for photolithography. With the auxiliary masks, the overlapping regions in the central region and neighboring to the margin region can have preferred photolithography and etching effect.
1. A double-exposure mask structure, comprising:
a first section configured and positioned to pattern a central region of a substrate and comprising parallel mask structures and additional parallel mask structures perpendicularly intersecting the parallel mask structures;
a second section configured and positioned to pattern a margin region of the substrate adjacent the central region of the substrate and comprising parallel marginal auxiliary mask structures oriented parallel to the parallel mask structures of the first section;
a third section between the first section and the second section and configured and positioned to pattern an intersection between the central region of the substrate and the marginal region of the substrate; and
a fourth section between the first section and the third section and comprising discrete auxiliary mask structures arranged in a line oriented parallel to the parallel mask structures of the first section, each of the discrete auxiliary mask structures independently overlying one or two of the additional parallel mask structures of the first section.
2. The double-exposure mask structure of claim 1 , wherein a length of each of the discrete auxiliary mask structures extending in a direction of the parallel mask structures is greater than a width of one of the additional parallel mask structures thereunder.
3. The double-exposure mask structure of claim 1 , wherein a quantity of the discrete auxiliary mask structures is half a quantity of the additional parallel mask structures, each of the discrete auxiliary mask structures independently overlying two of the additional parallel mask structures.
4. A double-exposure photolithography method, comprising:
forming parallel mask structures and a marginal mask structure connected to ends of the parallel mask structures over a substrate exhibiting a central region and a margin region adjacent the central region, the parallel mask structures positioned over the central region and the marginal mask structure positioned over the margin region;
exposing the substrate to radiation using the parallel mask structures and the marginal mask structure to form parallel photoresist structures in the central region of the substrate and a marginal photoresist structure in the margin region of the substrate;
forming additional parallel mask structures and discrete auxiliary mask structures over the central region of the substrate, each of the additional parallel mask structures and the discrete auxiliary mask structures oriented perpendicular to the parallel mask structures, and the discrete auxiliary mask structures arranged in a line between the marginal mask structure and one of the additional parallel mask structures most proximate the marginal mask structure;
forming parallel marginal auxiliary mask structures over the margin region of the substrate, the parallel marginal auxiliary mask structures oriented parallel to the additional parallel mask structures and positioned adjacent the marginal mask structure; and
exposing the substrate to additional radiation using the additional parallel mask structures, the discrete auxiliary mask structures, and the parallel marginal auxiliary mask structures to form additional parallel photoresist structures in the central region of the substrate and parallel marginal auxiliary photoresist structures in the margin region of the substrate, the additional parallel photoresist structures perpendicularly intersecting the parallel photoresist structures.
5. The double-exposure photolithography method of claim 4 , wherein a length of each of the discrete auxiliary mask structures extending in a direction of the additional parallel mask structures is greater than a width of one of the parallel mask structures thereunder.
6. The double-exposure photolithography method of claim 4 , wherein a quantity of the discrete auxiliary mask structures is half a quantity of the parallel mask structures, each of the discrete auxiliary mask structures independently overlying two of the parallel mask structures.
7. A double-exposure photolithography method, comprising:
forming parallel mask structures and discrete auxiliary mask structures over a substrate exhibiting a central region and a margin region adjacent the central region, the discrete auxiliary mask structures arranged in a line oriented parallel to the parallel mask structures and positioned adjacent the parallel mask structures;
forming parallel marginal auxiliary mask structures over the margin region of the substrate, the parallel marginal auxiliary mask structures oriented parallel to the parallel mask structures;
exposing the substrate to radiation using the parallel mask structures and the parallel marginal auxiliary mask structures to form parallel photoresist structures in the central region of the and parallel marginal photoresist structures in the margin region of the substrate, the discrete auxiliary mask structures disposed between a first of the parallel photoresist structures and a first of the parallel marginal photoresist structures most proximate the first of the parallel photoresist structures;
forming additional parallel mask structures and a marginal mask structure connected to ends of the additional parallel mask structures over a substrate after exposing the substrate to the radiation the additional parallel mask structures oriented perpendicular to the parallel mask structures and positioned over the central region of substrate, and the marginal mask structure oriented parallel to the parallel mask structures and positioned over the margin region of substrate; and
exposing the substrate to additional radiation using the additional parallel mask structures and the marginal mask structure to form additional parallel photoresist structures in the central region of the substrate and a marginal photoresist structure in the margin region of the substrate, the additional parallel photoresist structures perpendicularly intersecting the parallel photoresist structures.
8. The double-exposure photolithography method of claim 7 , wherein a length of each of the discrete auxiliary mask structures extending in a direction of the parallel mask structures is greater than a width of the additional parallel mask structures thereunder.
9. The double-exposure photolithography method of claim 7 , wherein a quantity of the discrete auxiliary mask structure is half a quantity of the additional parallel mask structures, each of the discrete auxiliary structures independently overlying two of the additional parallel mask structures.