Integrated circuit package system with removable backing element having plated terminal leads and method of manufacture thereof
View Patent ↗A method of manufacture of an integrated circuit package system includes: attaching a first die to a first die pad; connecting electrically a second die to the first die through a die interconnect positioned between the first die and the second die; connecting a first lead adjacent the first die pad to the first die; connecting a second lead to the second die, the second lead opposing the first lead and adjacent the second die; and providing a molding material around the first die, the second die, the die interconnect, the first lead and the second lead, with a portion of the first lead exposed.
1. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
forming a first interconnect structure over a first surface of the first semiconductor die and extending beyond a footprint of the first semiconductor die;
forming a plurality of bumps over an active surface of the first semiconductor die opposite the first surface of the first semiconductor die;
providing a second semiconductor die;
forming a second interconnect structure over a first surface of the second semiconductor die and extending beyond a footprint of the second semiconductor die;
disposing the first semiconductor die, bumps, and first interconnect structure over an active surface of the second semiconductor die opposite the first surface of the second semiconductor die and second interconnect structure with the active surface of the first semiconductor die oriented toward the active surface of the second semiconductor die; and
depositing an encapsulant around the second semiconductor die with the encapsulant contacting a sidewall of the second semiconductor die and a surface of the second interconnect structure.
2. The method of claim 1 , further including depositing the encapsulant around the first semiconductor die.
3. The method of claim 1 , further including depositing the encapsulant between the first and second semiconductor die.
4. The method of claim 1 , further including forming a plurality of third interconnect structures over the second interconnect structure opposite the second semiconductor die.
5. The method of claim 1 , further including disposing the first semiconductor die over a substrate.
6. The method of claim 5 , further including
removing the substrate after disposing the first semiconductor die, bumps, and first interconnect structure over the second semiconductor die.
7. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
forming a first interconnect structure extending beyond a footprint of the first semiconductor die;
forming a plurality of first bumps over the first semiconductor die;
providing a second semiconductor die;
forming a second interconnect structure over a first surface of the second semiconductor die and extending beyond a footprint of the second semiconductor die;
disposing the first semiconductor die, first bumps, and first interconnect structure over an active surface of the second semiconductor die opposite the first surface of the second semiconductor die and second interconnect structure, wherein an active surface of the first semiconductor die is oriented toward the active surface of the second semiconductor die; and
depositing an encapsulant around the second semiconductor die and extending to the second interconnect structure.
8. The method of claim 7 , further including forming a plurality of second bumps over the second semiconductor die opposite the first semiconductor die.
9. The method of claim 7 , further including forming the second interconnect structure extending beyond a footprint of the second semiconductor die.
10. The method of claim 7 , further including disposing the first semiconductor die over a substrate.
11. The method of claim 7 , wherein the encapsulant extends over the footprint of the first semiconductor die.
12. The method of claim 10 , further including removing the substrate after depositing the encapsulant.
13. A semiconductor device, comprising:
a first semiconductor die;
a second semiconductor die disposed over the first semiconductor die with an active surface of the second semiconductor die oriented toward an active surface of the first semiconductor die;
a first interconnect structure formed over a surface of the second semiconductor die;
a plurality of first bumps formed between the first and second semiconductor die;
an encapsulant deposited around first semiconductor die; and
a second interconnect structure formed over the first semiconductor die and a surface of the encapsulant opposite the second semiconductor die.
14. The semiconductor device of claim 13 , wherein the first interconnect structure is electrically connected to the second interconnect structure.
15. The semiconductor device of claim 13 , wherein the first interconnect structure extends beyond a footprint of the second semiconductor die.
16. The semiconductor device of claim 13 , wherein the second interconnect structure includes a second bump.
17. A semiconductor device, comprising:
a first semiconductor die;
a first interconnect structure formed over the first semiconductor die;
a plurality of bumps formed over an active surface of the first semiconductor die;
a second semiconductor die disposed over the bumps, wherein an active surface of the second semiconductor die is oriented toward the active surface of the first semiconductor die;
an encapsulant deposited around the first semiconductor die; and
a second interconnect structure formed over the encapsulant opposite the first semiconductor die.
18. The semiconductor device of claim 17 , wherein the encapsulant is formed around the bumps and extends between the first and second semiconductor die.
19. The semiconductor device of claim 18 , wherein the second interconnect structure extends beyond a footprint of the second semiconductor die.
20. The semiconductor device of claim 19 , wherein the first interconnect structure extends beyond a footprint of the first semiconductor die.
21. The semiconductor device of claim 17 , further including a substrate disposed over the second semiconductor die.