Method of forming anneal-resistant embedded resistor for non-volatile memory application
View Patent ↗Embodiments of the invention include a nonvolatile memory device that contains nonvolatile resistive random access memory device with improved device performance and lifetime. In some embodiments, nonvolatile resistive random access memory device includes a diode, a metal silicon nitride embedded resistor, and a resistive switching layer disposed between a first electrode layer and a second electrode layer. In some embodiments, the method of forming a resistive random access memory device includes forming a diode, forming a metal silicon nitride embedded resistor, forming a first electrode layer, forming a second electrode layer, and forming a resistive switching layer disposed between the first electrode layer and the second electrode layer.
1. A method comprising:
forming a resistive switching layer;
forming an embedded resistor over the resistive switching layer,
the embedded resistor comprising a metal, silicon, and nitrogen,
wherein the metal of the embedded resistor is hafnium;
forming an electrode over the embedded resistor; and
annealing a stack comprising the resistive switching layer, the embedded resistor, and the electrode at a temperature greater than 700° C.
2. The method of claim 1 , wherein the stack is annealed at the temperature of 750° C. for 60 seconds.
3. The method of claim 1 , wherein the stack is annealed at the temperature of greater than 900° C.
4. The method of claim 1 , wherein the embedded resistor comprises one or more elements from columns 4 through 7 of the periodic table.
5. The method of claim 1 , wherein the metal, silicon, and nitrogen of the embedded resistor form a silicon rich metal nitride material.
6. The method of claim 1 , wherein a concentration of silicon in the embedded resistor is between about 5% atomic and 40% atomic.
7. The method of claim 1 , wherein a material of the embedded resistor is amorphous after the annealing.
8. The method of claim 1 , wherein the embedded resistor further comprises aluminum.
9. The method of claim 1 , wherein the resistive switching layer comprises one of HfxOy, TaxOy, AlxOy, LaxOy, YxOy, DyxOy, YbxOy, or ZrxOy.
10. The method of claim 1 , wherein the resistive switching layer is formed using atomic layer deposition, wherein the atomic layer deposition comprises supplying tetrakis(dimethylamino)hafnium and an oxygen containing precursor into a deposition chamber.
11. The method of claim 10 , wherein the atomic layer deposition is performed at a temperature of about 250° C., and wherein the oxygen containing precursor is water vapor.
12. The method of claim 1 , wherein the embedded resistor has a thickness of between about 50 Angstroms and 500 Angstroms.
13. The method of claim 1 , wherein the embedded resistor is formed using physical vapor deposition.
14. The method of claim 13 , wherein the physical vapor deposition sputtering comprises a target, wherein the target comprises the metal and silicon, and wherein the target is sputtered in a nitrogen containing atmosphere.
15. The method of claim 14 , wherein the nitrogen containing atmosphere comprises between about 20% and 50% by volume of nitrogen.
16. The method of claim 1 , wherein the electrode comprises titanium nitride, and wherein the electrode directly interfaces the embedded resistor.