Sample stack structure and method for preparing the same
View Patent ↗The present invention provides a sample stack structure with multiple layers. The sample stack structure has at least a substrate, an adhesive layer and a target layer. The target layer is directly sandwiched between the substrate and the adhesive layer.
1. A method for preparing a sample stack structure, comprising:
providing a chip set comprising at least two dices and each chip comprising a substrate and a target layer;
cutting said chip set at least four times to form a sample dice and a dummy dice and each said sample dice and said dummy dice has a shoulder portion and a bottom portion, wherein said shoulder portion has said substrate and said target layer;
attaching said target layer of said sample dice to said substrate of said dummy dice by an adhesive layer; and
removing said bottom portion of said sample dice so that said target layer and some of said substrate of said sample dice are attached to said dummy dice by said adhesive layer to obtain a sample stack structure.
2. The method for preparing a sample stack structure of claim 1 , wherein said chip set comprises a first dice and a second dice so that said first dice is said sample dice and said second dice is said dummy dice.
3. The method for preparing a sample stack structure of claim 1 , wherein said adhesive layer comprises an epoxy resin.
4. The method for preparing a sample stack structure of claim 1 , wherein said target layer comprises a composite material comprising a semiconductive material.
5. The method for preparing a sample stack structure of claim 1 , wherein said shoulder portion of said sample dice is attached to said bottom portion of said dummy dice by said adhesive layer.
6. The method for preparing a sample stack structure of claim 1 , further comprising:
forming a metal pad on said substrate of said sample dice after removing said bottom portion of said sample dice.
7. The method for preparing a sample stack structure of claim 1 , further comprising:
forming a first trench occupying said target layer.
8. The method for preparing a sample stack structure of claim 7 , further comprising:
forming a first via connecting said first trench and occupying said target layer.
9. The method for preparing a sample stack structure of claim 7 , further comprising:
forming a second trench occupying said target layer, wherein said second trench and said first trench are disposed on two opposite sides of said sample dice.
10. The method for preparing a sample stack structure of claim 9 , further comprising:
forming a second via connecting said second trench and occupying said target layer.