IP Library Granted Patent US 9,634,180
Granted Patent B2
US 9,634,180 · App. 14/578,483 · Granted Apr 25, 2017

Method for forming semiconductor device package with slanting structures

Inventor: Wen Kun Yang (Hsin-Chu, TW)
Assignee: KING DRAGON INTERNATIONAL INC.
H01L33/005H01L23/3677H01L23/49827H01L24/24H01L24/25H01L24/32H01L24/82H01L24/92H01L33/60H01L33/62H01L2224/24225H01L2224/24998H01L2224/2518H01L2224/32225H01L2224/32245H01L2224/73267H01L2224/83855H01L2224/92244H01L2924/12042H01L2924/15151H01L2924/15747H01L2933/0033H01L2933/0058H01L2933/0066
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,634,180
App. No.
14/578,483
Granted
Apr 25, 2017
Kind
B2
Abstract

A method for forming semiconductor device package comprises providing a substrate with via contact pads and via through holes through said substrate, terminal pads on a bottom surface of said substrate and an exposed type through hole through said substrate. A die is provided with bonding pads thereon and an exposed type pad on a bottom surface of said die. A reflective layer is formed on an upper surface of the substrate. The die is adhered on the substrate. A dry film is formed on a top of the die as a slanting structure. A re-distribution layer conductive trace is formed by sputtering and E-plating on an upper surface of the slanting structure.

Claims (21)

1. A method for forming semiconductor device package, comprising

providing a substrate with via contact pads and via through holes through said substrate, terminal pads on a bottom surface of said substrate and an exposed type through hole through said substrate,

wherein said exposed type through hole was filled with a second refilling material for forming a contact structure;

providing a die having bonding pads thereon and a thermal contact pad on a bottom surface of said die, wherein said thermal contact pad is aligned with said exposed type through hole, wherein said die is formed on a top surface of said substrate, and said thermal contact pad is formed between a backside surface of said die and a top surface of said contact structure, said second refilling material conducts heat generated by said die for reducing a thermal resistance;

wherein forming said die on the top surface of said substrate comprises:

forming a reflective layer on an upper surface of said substrate;

adhering said die directly on a top surface of said reflective layer and the top surface of said contact structure:

forming a film on a top of said die under a vacuum in a range of 1 E-1 to 1 E-2 Torr and a temperature in a range of 70 to 110 degree centigrade, said film flowing to an edge of said die to fill out a slope area adjacent to said die to form a slanting structure; and

forming a re-distribution layer conductive trace by sputtering and Electrolyte-plating on an upper surface of said slanting structure to offer path between said bonding pads of said die and said via contact pads of said substrate,

wherein said slanting structure is in direct contact with sidewalls of said die, said thermal contact pad, the top surface of said reflective layer, and said via contact pads of said substrate.

2. The method of claim 1 , further comprising filling a first refilling material within said via through holes to form conductive through holes, wherein said conductive through holes are electrically coupled to said via contact pads and said terminal pads on said substrate.

3. The method of claim 1 , wherein said second refilling material comprises aluminum, titanium, copper, nickel, silver or the combination thereof.

4. The method of claim 1 , further comprising forming a second contact pad on a backside surface of said contact structure.

5. The method of claim 1 , further comprising forming a dielectric layer on an upper surface of said die.

6. The method of claim 5 , further comprising forming a cover layer on said dielectric layer, said conductive trace, said via contact pads and said substrate.

7. The method of claim 5 , further comprising forming a lens with phosphor structure on said dielectric layer, said conductive trace, said via contact pads and said substrate.

8. The method of claim 1 , wherein material of said substrate comprises metal, glass, ceramic, silicon, plastic, bismaleimide triazine, FR4, FR5 or polyimide.

9. The method of claim 1 , wherein said reflective layer includes organic film, metal or alloy.

10. The method of claim 1 , wherein said reflective layer comprises Ag, Al or Au.

11. The method of claim 1 , wherein said forming a reflective layer on an upper surface of said substrate is performed by a sputtering process or coating an organic film.

12. The method of claim 1 , wherein a material of said re-distribution layer conductive trace comprises Cu/Ni/Au.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 1, 2024
From: YANG, WEN-KUN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Reel/Frame 069442/0676 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 20, 2024
From: KING DRAGON INTERNATIONAL INC.
To: YANG, WEN-KUN
Reel/Frame 068342/0719 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 21, 2014
From: YANG, WEN KUN
To: KING DRAGON INTERNATIONAL INC.
Reel/Frame 034562/0885 →
Continuity (3)
Continuation 13848602 · Mar 21, 2013
Continuation In Part 13348787 · Jan 12, 2012
Related Publication 20150111327A1 · Apr 23, 2015