Methods for surface attachment of flipped active components
View Patent ↗An active substrate includes a plurality of active components distributed over a surface of a destination substrate, each active component including a component substrate different from the destination substrate, and each active component having a circuit and connection posts on a process side of the component substrate. The connection posts may have a height that is greater than a base width thereof, and may be in electrical contact with the circuit and destination substrate contacts. The connection posts may extend through the surface of the destination substrate contacts into the destination substrate connection pads to electrically connect the connection posts to the destination substrate contacts.
1. An active component comprising: a plurality of electrical connections on a first surface of the active component, wherein each electrical connection comprises a conductive connection post protruding from the first surface, wherein the conductive connection posts each have a height that is greater than its base width, and wherein the height is less than that of a pillar feature of a stamp that is configured for adhesion with the first surface; and a broken tether.
2. The active component of claim 1 , wherein the connection posts each have a base width that is greater than its peak width.
3. The active component of claim 1 , wherein the connection posts each have a base area that is greater than its peak area.
4. The active component of claim 1 , wherein the electrical connections comprise a conductive metal.
5. The active component of claim 4 , wherein the conductive metal is aluminum, titanium, tungsten, copper, silver, or gold.
6. The active component of claim 1 , wherein the connection posts each have a peak that is a sharp point, and wherein the connection posts comprise a high elastic modulus metal.
7. The active component of claim 1 , wherein the active component is an integrated circuit.
8. The active component of claim 1 , wherein the active component is a transistor.
9. The active component of claim 1 , wherein the active component is a capacitor.
10. The active component of claim 1 , wherein the first surface of the active component has a dimension from 5 microns to 5000 microns.
11. A printed structure comprising:
a destination substrate; and
one or more active components on the destination substrate, the one or more active components comprising a plurality of electrical connections on a first surface thereof, wherein each electrical connection comprises a conductive connection post protruding from the first surface and each active component comprises a broken tether,
wherein the destination substrate has two or more electrical contacts and each connection post extends into or through an electrical contact of the destination substrate to electrically connect the electrical contacts to the connection posts.
12. The printed structure of claim 11 , wherein the two or more electrical contacts have a composition softer than that of the connection posts.
13. The printed structure of claim 11 , wherein the connection posts adhere to the electrical contacts.
14. The printed structure of claim 11 , comprising an adhesive layer over the destination electrical contacts to adhere the active components to the destination substrate.
15. The printed structure of claim 11 , wherein a surface area of each of the electrical contacts is greater than a peak area of each of the connection posts.
16. The printed structure of claim 11 , wherein a surface area of each of the electrical contacts is greater than a base area of each of the connection posts.
17. The printed structure of claim 11 , wherein the connection posts of a given active component are separated by a distance that is greater than a distance separating their corresponding electrical contacts.
18. The printed structure of claim 11 , wherein the connection posts are separated by a distance that is greater than a dimension of the electrical contacts.
19. An active component comprising: a plurality of electrical connections on a first surface of the active component, wherein each electrical connection comprises a conductive connection post protruding from the first surface, wherein the conductive connection posts each have a height that is greater than its base width, wherein the height is less than that of a pillar feature of a stamp that is configured for adhesion with the first surface, and wherein the conductive connection posts are separated by a distance that is sized to accept the pillar feature of the stamp for adhesion therewith.
20. A wafer comprising a plurality of the active components of claim 19 , wherein the active components are releasably attached to the wafer by one or more breakable tethers.