Memory device and fabricating method thereof
View Patent ↗A memory device and a method for fabricating the same are provided. The memory device includes a substrate and an isolation structure. The substrate has at least two memory cells, and each of the memory cells includes a first active region, a second active region, and a gate structure. The first active region and the second active region are alternately disposed in the substrate. The gate structure is disposed in the substrate and between the first active region and the second active region. The isolation structure is disposed between and protruding from the second active regions of two adjacent memory cells.
1. A method for fabricating a memory device, the method comprising:
receiving a substrate having at least two memory cells, each of the memory cells comprising:
a first source/drain region and a second source/drain region alternately disposed in the substrate; and
a gate structure disposed in the substrate and laterally between the first source/drain region and the second source/drain region;
forming an isolation structure in the substrate and between the second source/drain regions of two adjacent memory cells;
removing an upper portion of each of the second source/drain regions of the two adjacent memory cells to expose sidewalls of an upper portion of the isolation structure; and
forming a contact structure over the second source/drain region after removing the upper portion of each of the second source/drain regions of the two adjacent memory cells, wherein an interface between the contact structure and the second source/drain region is below the isolation structure.
2. The method of claim 1 , wherein forming the gate structure comprises:
forming a trench in the substrate;
forming a first layer in the trench; and
forming a second layer over the first layer and in the trench.
3. The method of claim 1 , wherein the upper portion of the isolation structure has a height in a range from about 5 nm to about 50 nm.
4. The method of claim 1 , wherein each of the memory cells comprises one of the first source/drain region, two of the gate structures, and two of the second source/drain regions, and the first source/drain region is disposed between the gate structures, and each of the gate structures is disposed between the first source/drain region and one of the second source/drain regions.
5. The method of claim 1 , further comprising forming a conductive line over the first source/drain region.
6. The method of claim 1 , further comprising forming an oxide cap surrounding the upper portion of the isolation structure.
7. The method of claim 6 , wherein forming the oxide cap comprises:
depositing an oxide layer over the upper portion of the isolation structure; and
removing a portion of the oxide layer to expose a top surface of the isolation structure and to form the oxide cap.
8. The method of claim 1 , wherein forming the contact structure comprises:
depositing a contact material layer over the upper portion of the isolation structure and the second source/drain region; and
removing a portion of the contact material layer to expose a top surface of the isolation structure and to form the contact structure.