Semiconductor package and manufacturing method thereof
View Patent ↗A semiconductor package and a method of manufacturing a semiconductor package. As a non-limiting example, various aspects of this disclosure provide a semiconductor package, and method of manufacturing thereof, that comprises a substrate having a first surface and a second surface opposite to the first surface, and comprising at least one first recess portion formed in a direction ranging from the first surface toward the second surface, a plurality of first recess conductive patterns formed in the first recess portion, and a first passive element inserted into the first recess portion of the substrate and having a first electrode and a second electrode electrically connected to the plurality of first recess conductive patterns.
1. A semiconductor package comprising:
a substrate comprising:
a first substrate surface;
a second substrate surface opposite the first substrate surface;
a recess portion in the first substrate surface and extending toward the second substrate surface;
a plurality of recess conductive patterns in the recess portion;
a dielectric layer having a first dielectric surface and a second dielectric surface, wherein the recess portion extends from the first dielectric surface to the second dielectric surface;
a first conductive pattern at the first dielectric surface;
a second conductive pattern at the second dielectric surface; and
a conductive via that passes through the dielectric layer and electrically connects the first conductive pattern and the second conductive pattern;
a passive element positioned in the recess portion of the substrate and comprising a first electrode and a second electrode, each electrically connected to a respective pattern of the plurality of recess conductive patterns;
a semiconductor die mounted on the first dielectric surface and connected to the first conductive pattern; and
a layer of a single continuous encapsulating material that covers at least a first side and lateral sides of the passive element, and covers at least lateral sides of the semiconductor die and a first side of the semiconductor die facing away from the dielectric layer.
2. The semiconductor package of claim 1 , wherein the substrate comprises a seed layer between the conductive via and the first conductive pattern and on a side surface of the conductive via.
3. The semiconductor package of claim 1 , wherein the first dielectric surface and a surface of the first conductive pattern are coplanar.
4. The semiconductor package of claim 3 , wherein the second conductive pattern extends outward from the second dielectric surface.
5. The semiconductor package of claim 1 , wherein the first side of the passive element faces away from the substrate, and the first side of the passive element is lower than the first side of the semiconductor die.
6. The semiconductor package of claim 1 , wherein the encapsulating material underfills the passive element.
7. The semiconductor package of claim 1 , wherein no portion of the semiconductor die covers the recess portion or any other recess portion of the substrate.
8. The semiconductor package of claim 1 , wherein a top surface of the first conductive pattern is coplanar with the first dielectric layer surface.
9. The semiconductor package of claim 1 , comprising a conductive bump electrically coupled to the second conductive pattern, wherein at least a portion of the conductive bump is exposed to an outside of the semiconductor package.
10. The semiconductor package of claim 1 , wherein a first end of the conductive via at the first conductive pattern is narrower than a second end of the conductive via at the second conductive pattern.
11. The semiconductor package of claim 1 , comprising a seed layer, wherein the second conductive pattern is separated from the second dielectric surface by at least the seed layer, and the first conductive pattern directly contacts the first dielectric layer surface.
12. A semiconductor package comprising:
a substrate comprising:
a top substrate side;
a bottom substrate side;
a first dielectric layer (DM) having a top DL 1 side, a bottom DL 1 side, and a DL 1 aperture that extends from the top DL 1 side to the bottom DL 1 side;
a second dielectric layer (DL 2 ) having a top DL 2 side facing the bottom DL 1 side, and a bottom DL 2 side, wherein a covered portion of the top DL 2 side is covered by the first dielectric layer and an exposed portion of the top DL 2 side is exposed from the first dielectric layer through the DL 1 aperture;
a first conductive pattern at the top DL 1 side;
a second conductive pattern at the top DL 2 side;
a recess conductive pattern at the exposed portion of the top DL 2 side; and
a recess portion bounded by lateral sides of the DL 1 aperture and by the exposed portion of the top DL 2 side;
a passive electronic component positioned in the recess portion of the substrate and comprising an electrode that is connected to the recess conductive pattern;
a semiconductor die mounted on the top DL 1 side and positioned such that no portion of the semiconductor die covers the recess portion of the substrate; and
a layer of a single continuous encapsulating material that covers at least a first side and lateral sides of the passive electronic component, and covers at least lateral sides of the semiconductor die and a first side of the semiconductor die that faces away from the first dielectric layer.
13. A semiconductor package comprising:
a substrate comprising:
a top substrate side;
a bottom substrate side;
a first dielectric layer (DL 1 ) having a top DL 1 side, a bottom DL 1 side, and a DL 1 aperture that extends from the top DL 1 side to the bottom DL 1 side;
a second dielectric layer (DL 2 ) having a top DL 2 side facing the bottom DL 1 side, and a bottom DL 2 side, wherein a covered portion of the top DL 2 side is covered by the first dielectric layer and an exposed portion of the top DL 2 side is exposed from the first dielectric layer through the DL 1 aperture;
a first conductive pattern at the top DL 1 side;
a second conductive pattern at the top DL 2 side;
a recess conductive pattern at the exposed portion of the top DL 2 side; and
a recess portion bounded by lateral sides of the DL 1 aperture and by the exposed portion of the top DL 2 side;
a passive electronic component positioned in the recess portion of the substrate and comprising an electrode that is connected to the recess conductive pattern;
a semiconductor die mounted on the top DL 1 side and positioned such that no portion of the semiconductor die covers the recess portion of the substrate; and
a layer of a single continuous encapsulating material that covers at least a first side and lateral sides of the passive electronic component, and covers at least lateral sides of the semiconductor die,
wherein a top side of the passive electronic component, facing away from the substrate, is lower than a top side, facing away from the substrate, of the semiconductor die, and a top side of the layer of the single continuous encapsulating material is entirely planar.
14. The semiconductor package of claim 13 , wherein only a portion of the passive electronic component is positioned in the recess portion of the substrate.
15. The semiconductor package of claim 12 , wherein:
at least a portion of the first conductive pattern is embedded in the top DL 1 side;
at least a portion of the second conductive pattern is embedded in the covered portion of the top DL 2 side; and
at least a portion of the recess conductive pattern is embedded in the exposed portion of the top DL 2 side.
16. The semiconductor package of claim 12 , wherein the first and second dielectric layers are formed of at least one of: a pre-preg material, a build-up film, a silicon oxide layer, and a silicon nitride layer.
17. The semiconductor package of claim 12 , wherein the layer of the single continuous encapsulating material underfills the passive electronic component.
18. The semiconductor package of claim 13 , wherein the first side of the passive electronic component is the top side of the passive electronic component.