Semiconductor device including a porous dielectric layer, and method of forming the semiconductor device
View Patent ↗A semiconductor device includes a porous dielectric layer formed on an interconnect layer and including a recessed portion, a conductive layer formed in the recessed portion, and a conformal cap layer formed on the porous dielectric layer and on the conductive layer in the recessed portion, an upper surface of the porous dielectric layer being exposed through a gap in the conformal cap layer. Porous dielectric material is protected by back-filled pore fillers or leave-in porogens from process integration such as chemical mechanical polishing (CMP). The pore fillers or porogens are removed after CMP and Cap process to achieve low capacitance. A self-aligned cap protects the conductor metal from exposing the severe conditions during the pore filler or porogen removal process.
1. A semiconductor device comprising:
a porous dielectric layer formed on an interconnect layer and including a recessed portion;
a conductive layer formed in the recessed portion;
a conformal cap layer formed on the porous dielectric layer and on the conductive layer in the recessed portion, an upper surface of the porous dielectric layer being exposed through a gap in the conformal cap layer, and an upper surface of the conformal cap layer including a concave portion; and
an interlayer dielectric formed in the concave portion of the conformal cap layer, an upper surface of the interlayer dielectric being co-planar with an upper surface of the conformal cap layer and an upper surface of the porous dielectric layer.
2. The semiconductor device of claim 1 , wherein the gap in the conformal cap layer comprises a length which is greater than an average pore diameter of pores the porous dielectric layer.
3. The semiconductor device of claim 1 , wherein an average pore diameter of pores the porous dielectric layer is greater than 0.5 nm.
4. The semiconductor device of claim 1 , wherein a porosity of the porous dielectric layer is in a range from 0.1 vol. % and about 50 vol. %.
5. The semiconductor device of claim 1 , wherein the porous dielectric layer comprises at least one of methyl silsesquioxane, hydrogen silsesquioxane, benzocyclobutene, silica and an aromatic thermoset polymer.
6. The semiconductor device of claim 1 , wherein the conformal cap layer comprises at least one of silicon carbide, silicon nitride and silicon carbonitride.
7. The semiconductor device of claim 1 , wherein the porous dielectric layer comprises one of a low-k dielectric material and an ultralow-k dielectric material.
8. The semiconductor device of claim 1 , wherein the conductive material comprises one of copper, a copper alloy, aluminum and an aluminum alloy.
9. The semiconductor device of claim 1 , further comprising:
a barrier layer formed on a wall of the recessed portion, the conductive layer being formed on the barrier layer.
10. The semiconductor device of claim 1 , wherein the barrier layer comprises at least one of TaN, TiN, Ti and Ta.
11. A semiconductor device comprising:
a porous dielectric layer formed on an interconnect layer and including a recessed portion, an average pore diameter of pores the porous dielectric layer being greater than 0.5 nm, and a porosity of the porous dielectric layer being in a range from 0.1 vol. % to 50 vol. %;
a conductive layer formed in the recessed portion;
a cap layer formed on the porous dielectric layer and on the conductive layer in the recessed portion, an upper surface of the porous dielectric layer being exposed through a gap in the cap layer, the gap in the cap layer including a length which is greater than an average pore diameter of pores the porous dielectric layer, and an upper surface of the cap layer including a concave portion; and
an interlayer dielectric formed in the concave portion of the cap layer in the recessed portion, an upper surface of the interlayer dielectric being co-planar with an upper surface of the cap layer and an upper surface of the porous dielectric layer.
12. The semiconductor device of claim 11 , wherein the porous dielectric layer comprises at least one of methyl silsesquioxane, hydrogen silsesquioxane, benzocyclobutene, silica and an aromatic thermoset polymer.
13. The semiconductor device of claim 11 , wherein the cap layer comprises at least one of silicon carbide, silicon nitride and silicon carbonitride.
14. The semiconductor device of claim 11 , wherein the porous dielectric layer comprises one of a low-k dielectric material and an ultralow-k dielectric material.
15. The semiconductor device of claim 11 , wherein the conductive material comprises one of copper, a copper alloy, aluminum and an aluminum alloy.
16. The semiconductor device of claim 11 , further comprising:
a barrier layer formed on a wall of the recessed portion, the conductive layer being formed on the barrier layer, the barrier layer comprising at least one of TaN, TiN, Ti and Ta.