Semiconductor device
A semiconductor device includes a first conductivity type first semiconductor region, a second semiconductor region on the first semiconductor region, a third semiconductor region on the second semiconductor region, a first insulating portion extending inwardly of, and surrounded by, the first semiconductor region, a gate electrode extending inwardly of the first insulating portion and spaced from the second semiconductor region in a second direction that intersects a first direction extending from the first semiconductor region to the second semiconductor region, by the first insulating portion, and a first electrode including a portion spaced from the first semiconductor region in the second direction by the first insulating portion, and surrounded by the first insulating portion and the gate electrode.
1. A semiconductor device, comprising:
a first semiconductor region of a first conductivity type;
a second semiconductor region of a second conductivity type on the first semiconductor region;
a third semiconductor region of the first conductivity type on the second semiconductor region;
a first insulating portion extending inwardly of, and surrounded by, the first semiconductor region, the second semiconductor region, and the third semiconductor region;
a gate electrode extending inwardly of the first insulating portion;
a first electrode extending inwardly of the first insulating portion and surrounded by the first insulating portion and the gate electrode;
a first metal layer on the third semiconductor region and the first insulating portion, and electrically connected to the third semiconductor region;
a first insulating layer on the first metal layer;
a second metal layer on the first insulating layer;
a second insulating layer on the second metal layer;
a third metal layer on the second insulating layer; and
a first connection portion extending through the first insulating layer and the second insulating layer to connect the first metal layer and the third metal layer.
2. The semiconductor device of claim 1 , wherein the first electrode extends further inwardly of the first insulating portion than the gate electrode.
3. The semiconductor device of claim 1 , further comprising:
a second connection portion provided in the first insulating layer,
wherein the first metal layer includes a first opening, and
the second connection portion extends through the first opening to connect the second metal layer and the gate electrode.
4. The semiconductor device of claim 3 ,
wherein the second metal layer includes a second opening, and
the first connection portion extends through the second opening.
5. The semiconductor device of claim 4 ,
wherein the second metal layer includes a first portion extending in the second direction, and
the second connection portion connects the first portion and the gate electrode through the first opening.
6. The semiconductor device of claim 1 ,
wherein a plurality of the first insulating portions, a plurality of the gate electrodes, and a plurality of the first electrodes are provided in a second direction and in a third direction, which intersects the first and second directions,
the plurality of gate electrodes are surrounded by the plurality of first insulating portions, respectively, and
each of the plurality of the first electrodes is surrounded by a respective one of the first insulating portions and a respective one of the gate electrodes.