IP Library Granted Patent US 9,985,183
Granted Patent B2
US 9,985,183 · App. 15/262,956 · Granted May 29, 2018

Solid state lighting devices with accessible electrodes and methods of manufacturing

Inventors: Martin F. Schubert (Sunnyvale, CA); Vladimir Odnoblyudov (Danville, CA)
Assignee: Micron Technology, Inc.
H01L33/382H01L33/0075H01L33/06H01L33/36H01L33/387H01L33/405H01L33/42H01L33/62H01L2933/0016
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Quick Facts
Patent No.
US 9,985,183
App. No.
15/262,956
Granted
May 29, 2018
Kind
B2
Abstract

Various embodiments of light emitting dies and solid state lighting (“SSL”) devices with light emitting dies, assemblies, and methods of manufacturing are described herein. In one embodiment, a light emitting die includes an SSL structure configured to emit light in response to an applied electrical voltage, a first electrode carried by the SSL structure, and a second electrode spaced apart from the first electrode of the SSL structure. The first and second electrode are configured to receive the applied electrical voltage. Both the first and second electrodes are accessible from the same side of the SSL structure via wirebonding.

Claims (77)

1. A method of manufacturing a light emitting die having a first semiconductor material, a second semiconductor material and an active region between the first and second semiconductor materials, the first semiconductor material having a first surface, the second semiconductor material having a second surface facing away from the first surface, the method comprising:

forming a first electrode in contact with the first surface of the first semiconductor material;

forming a second electrode in contact with the second surface of the second semiconductor material, wherein the first semiconductor material, the active region, and the second semiconductor material together have a stack thickness equal to a distance between the first and second surfaces, and wherein the second electrode is spaced apart from the first electrode by at least the stack thickness; and

exposing a portion of the second electrode through the first semiconductor material, the active region, and the second semiconductor material.

2. The method of claim 1 wherein exposing the portion of the second electrode includes enabling both the first electrode and the second electrode to be accessible from the same side of the light emitting die.

3. The method of claim 1 wherein:

the second electrode includes a first portion and a second portion extending from the first portion;

the first portion of the second electrode is covered by the first semiconductor material, the active region, and the second semiconductor material; and

the second portion of the second electrode is exposed through the first semiconductor material, the active region, and the second semiconductor material.

4. The method of claim 1 wherein:

the second electrode includes a first portion and a second portion extending from the first portion;

the first portion of the second electrode is covered by the first semiconductor material, the active region, and the second semiconductor material; and

the second portion of the second electrode laterally extends beyond the second semiconductor material, the active region, and the first semiconductor material.

5. The method of claim 1 wherein:

the second electrode includes a first portion and a second portion extending from the first portion;

the first portion of the second electrode is covered by the first semiconductor material, the active region, and the second semiconductor material;

the second portion of the second electrode includes a plurality of individual sections spaced apart from one another; and

the individual sections of the second portion laterally extend beyond the first semiconductor material, the active region, and the second semiconductor material.

6. A method of manufacturing a light emitting die having a first semiconductor material, a second semiconductor material spaced apart from the first semiconductor material and an active region between the first and second semiconductor materials, the method comprising:

forming an opening extending completely through the second semiconductor material and the active region and only a portion of the first semiconductor material;

forming a passivation material having a first passivation portion lining a sidewall of the opening and a second passivation portion extending laterally relative to the first passivation portion external to the opening;

forming a first electrode in the opening and adjacent the first passivation portion; and

forming a second electrode external to the opening between the second semiconductor material and the second passivation portion of the passivation material, a portion of the second electrode being exposed through the first semiconductor material, the active region, and the second semiconductor material, wherein the second electrode is spaced apart from the first electrode by at least the stack thickness.

7. The method of claim 6 , further comprising:

forming a conductive substrate proximate the second semiconductor material; and

directly contact the first electrode with the conductive substrate.

8. The method of claim 6 , further comprising:

forming a conductive substrate proximate the second semiconductor material;

directly contact the first electrode with the conductive substrate; and

electrically isolating the second electrode from the conductive substrate by the second passivation portion.

9. The method of claim 6 , further comprising forming a conductive substrate proximate the second semiconductor material, wherein;

the first electrode has a first end proximate the first semiconductor material and a second end proximate the second semiconductor material;

the second passivation portion has a first surface and a second surface opposite the first surface, the first surface being in contact with the second electrode; and

the second surface of the second passivation portion is generally co-planar with the second end of the first electrode.

10. The method of claim 6 , further comprising forming a conductive substrate proximate the second semiconductor material, wherein:

the first electrode has a first end proximate the first semiconductor material and a second end proximate the second semiconductor material;

the second passivation portion of the passivation material has a first surface and a second surface opposite the first surface, the first surface being in contact with the second electrode;

the second surface of the second passivation portion is generally co-planar with the second end of the first electrode; and

both the second surface of the second passivation portion and the second end of the first electrode are in contact with the conductive substrate.

11. The method of claim 6 wherein:

the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening; and

the second conductive portion extends laterally beyond the second electrode.

12. The method of claim 6 further comprising electrically isolating the first conductive portion from the active region and the second semiconductor material by the first passivation portion of the passivation material, and wherein:

the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening; and

the second conductive portion extends laterally beyond the second electrode.

13. The light emitting device of claim 6 further comprising electrically isolating the first conductive portion from the active region and the second semiconductor material by the first passivation portion of the passivation material, wherein:

the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening;

the second conductive portion is in contact with the second passivation portion; and

the second conductive portion extends laterally beyond the second passivation portion and the second electrode.

14. The method of claim 6 , further comprising:

forming a substrate of the light emitting device;

forming an insulating material on the substrate;

electrically isolating the first conductive portion from the active region and the second semiconductor material by the first passivation portion of the passivation material; and

positing the second conductive portion between the insulating material and the second passivation portion,

wherein the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening; and

wherein the second conductive portion extends laterally beyond the second passivation portion and the second electrode.

15. A method of manufacturing a light emitting die having a first semiconductor material, a second semiconductor material and an active region between the first and second semiconductor materials, the method comprises:

forming a first electrode extending through the second semiconductor material, the active region and a portion of the first semiconductor material;

electrically coupling the first electrode to the first semiconductor material;

electrically isolating the first electrode from the second semiconductor material and the active region; and

forming a second electrode in contact with the second semiconductor material and surrounding at least a portion of the first electrode;

electrically isolating the second electrode from the first electrode; and

exposing a portion of the second electrode through the first semiconductor material, the active region, and the second semiconductor material,

wherein the second electrode is spaced apart from the first electrode by at least the stack thickness.

16. The method of claim 15 wherein:

the second electrode includes a first portion and a second portion extending from the first portion;

the first portion of the second electrode is covered by the first semiconductor material, the active region, and the second semiconductor material; and

the second portion of the second electrode is exposed through the first semiconductor material, the active region, and the second semiconductor material.

17. The method of claim 16 further comprising forming an opening extending through the first portion of the second electrode, wherein:

the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening; and

the second conductive portion extends laterally beyond the second portion of the second electrode.

18. The method of claim 16 wherein the second conductive portion and the second portion of the second electrode are accessible from the same side of the light emitting die.

19. The method of claim 15 , further comprising:

forming an opening extending through a first portion of the second electrode, the second electrode including a second portion extending from the first portion, wherein the first electrode has a first conductive portion in the opening and a second conductive portion external to the opening, and wherein the second conductive portion extends laterally beyond the second portion of the second electrode;

covering the first portion of the second electrode by the first semiconductor material, the active region, and the second semiconductor material;

exposing the second portion of the second electrode through the first semiconductor material, the active region, and the second semiconductor material; and

forming a passivation material between the second conductive portion of the conductive material and the second electrode.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050695/0825 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Feb 10, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041675/0105 →
Continuity (4)
Continuation 14614247 · Feb 4, 2015
Continuation 13926799 · Jun 25, 2013
Continuation 12970726 · Dec 16, 2010
Related Publication 20160380156A1 · Dec 29, 2016