IP Library Granted Patent US 10,453,704
Granted Patent B2
US 10,453,704 · App. 15/339,290 · Granted Oct 22, 2019

Method for packaging circuits

Inventors: Chia Y. Poo (Singapore, SG); Low Siu Waf (Singpore, SG); Boon Suan Jeung (Singapore, SG); Eng M. Koon (Singapore, SG); Chua Swee Kwang (Singapore, SG)
Assignee: Micron Technology, Inc.
H01L21/561H01L21/56H01L21/568H01L21/6835H01L22/00H01L23/3114H01L24/05H01L24/97H01L25/0657H01L25/50H01L2221/68345H01L2224/97H01L2225/06524H01L2225/06541H01L2225/06548H01L2225/06551H01L2225/06558H01L2225/06575H01L2924/12042H01L2924/14Y10T29/4913Y10T29/49128Y10T29/49144Y10T29/49146Y10T29/49155Y10T29/49165Y10T29/49167Y10T29/49169Y10T29/49794
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,453,704
App. No.
15/339,290
Granted
Oct 22, 2019
Kind
B2
Abstract

A method for packaging integrated circuit chips (die) is described that includes providing a base substrate with package level contacts, coating a base substrate with adhesive, placing dies on the adhesive, electrically connecting the die to the package level contacts, and removing the backside of the base substrate to expose the backside of the package level contacts. Accordingly, an essentially true chip scale package is formed. Multi-chip modules are formed by filling gaps between the chips with an encapsulant. In an embodiment, chips are interconnected by electrical connections between package level contacts in the base substrate. In an embodiment, substrates each having chips are adhered back-to-back with through vias formed in aligned saw streets to interconnect the back-to-back chip assembly.

Claims (22)

1. A method, comprising:

providing a plurality of integrated circuit dice;

providing a substrate having electrical signal terminals thereon with at least two of the electrical signal terminals being interconnected;

fixing a first die on the substrate over a first group of the electrical signal terminals;

fixing a second die on the substrate over a second group of the electrical signal terminals;

forming electrical connections from first die to first group of electrical signal terminals;

forming electrical connections from second die to second group of electrical signal terminals;

removing a backside of the substrate to expose the terminals; and

separating the first and second dice from a remainder of the substrate with the first and second dice being adapted to electrically communicate through at least the interconnected electric signal terminals.

2. The method of claim 1 , wherein separating the first and second dice includes filling the gap between the first die and the second die with an insulative material.

3. The method of claim 2 , wherein filling the gap includes filling the gap with an encapsulant.

4. The method of claim 2 , wherein filling the gap includes filling the gap with a benzocyclobutene material.

5. The method of claim 2 , wherein separating the first and second die includes forming a memory module.

6. The method of claim 1 , wherein the electrical connections from the first die includes forming metal traces from the first die.

7. The method of claim 1 , wherein forming the electrical connections from the second die includes forming metal traces from the second die.

8. The method of claim 1 , wherein providing the substrate includes providing a substrate having an integrated circuit memory device.

9. The method of claim 1 , wherein providing the substrate includes providing a substrate having I/O pads on a top surface of the substrate.

10. The method of claim 1 , wherein removing the backside of the substrate to expose the terminals includes backgrinding the backside of the substrate.

11. The method of claim 1 , wherein removing the backside of the substrate to expose the terminals includes etching the backside of the substrate.

12. The method of claim 1 , wherein removing the backside of the substrate to expose the terminals includes singulating the first and second die from a remainder of the substrate.

13. The method of claim 1 , wherein forming the electrical connections from the first die to the first group of electrical signal terminals includes forming a metal trace from I/O pads on a top surface of the first die down the side of the first die to the first group of electrical signal terminals.

14. The method of claim 1 , wherein forming the electrical connections from second die to the second group of electrical signal terminals includes forming a metal trace from I/O pads on a top surface of the second die down the side of the second die to the second group of electrical signal terminals.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050695/0825 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Feb 10, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041675/0105 →
Priority Claims (1)
SG 200302511-1 · May 6, 2003 · national
Continuity (5)
Division 14053233 · Oct 14, 2013
Division 13299120 · Nov 17, 2011
Division 12705923 · Feb 15, 2010
Division 10744632 · Dec 23, 2003
Related Publication 20170047231A1 · Feb 16, 2017