External gettering method and device
Disclosed embodiments include external gettering provided by electronic packaging. An external gettering element for a semiconductor substrate, which may be incorporated as part of an electronic packaging for the structure, is disclosed. Semiconductor structures and stacked semiconductor structures including an external gettering element are also disclosed. An encapsulation mold compound providing external gettering is also disclosed. Methods of fabricating such devices are also disclosed.
1. An integrated circuit comprising:
a semiconductor substrate;
at least one semiconductor device formed on a first section of said semiconductor substrate; and
electronic packaging external to said semiconductor substrate,
wherein at least a portion of said electronic packaging adjacent to a second section of said semiconductor substrate comprises a gettering material and an adhesive material applied at a backside of said semiconductor substrate,
wherein said gettering material is configured to attract contaminants within said semiconductor substrate away from said first section,
wherein said gettering material is separate from said adhesive material,
wherein said electronic packaging comprises an encapsulation mold compound surrounding at least a portion of said semiconductor substrate, and
wherein at least a portion of said encapsulation mold compound is embedded with additives in order to attract ions or contaminants within said semiconductor substrate toward said second section.
2. The integrated circuit of claim 1 , wherein said gettering material is imbued with particular polarities or quantities of ions in order to attract the ions or contaminants within said semiconductor substrate toward said second section.
3. The integrated circuit of claim 1 , wherein all of said encapsulation mold compound is embedded with said additives.
4. The integrated circuit of claim 1 , wherein said electronic packaging comprises a plurality of solder bumps formed on said at least one semiconductor device.
5. The integrated circuit of claim 1 , wherein said gettering material is arranged adjacent a majority of said second section of said semiconductor substrate.
6. The integrated circuit of claim 1 , further comprising an internal gettering section between said first section and said gettering material.
7. The integrated circuit of claim 1 , wherein said adhesive material is configured to adhere said gettering material to said section of said semiconductor substrate.