IP Library Granted Patent US 9,953,710
Granted Patent B2
US 9,953,710 · App. 15/583,411 · Granted Apr 24, 2018

Memory devices with a connecting region having a band gap lower than a band gap of a body region

Inventors: Haitao Liu (Boise, ID); Jian Li (Boise, ID); Chandra Mouli (Boise, ID)
Assignee: Micron Technology, Inc.
G11C16/14G11C16/0483G11C16/10H01L27/1157H01L27/1158H01L27/11524H01L27/11556H01L27/11582H01L29/0847H01L29/16H01L29/161H01L29/20H01L29/2003H01L29/22H01L29/7926
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Quick Facts
Patent No.
US 9,953,710
App. No.
15/583,411
Granted
Apr 24, 2018
Kind
B2
Abstract

Memory devices are shown that include a body region and a connecting region that is formed from a semiconductor with a lower band gap than the body region. Connecting region configurations can provide increased gate induced drain leakage during an erase operation. Configurations shown can provide a reliable bias to a body region for memory operations such as erasing, and containment of charge in the body region during a boost operation.

Claims (26)

1. A method, comprising:

selecting a body region of a memory cell string, the body region comprising a semiconductor having a first band gap, with a plurality of gates along a length of the body region, each of the plurality of gates being separated from the body region by at least a respective charge storage structure; and

biasing the body region, by applying a bias voltage through a connecting region having a second band gap, the second band gap being lower than the first band gap, the connecting region coupled between a source region and the body region.

2. The method of claim 1 , wherein selecting a body region of a memory cell string includes selecting a vertical body region.

3. The method of claim 1 , wherein selecting a body region of a memory cell string includes selecting a horizontal body region.

4. The method of claim 1 , wherein selecting a body region of a memory cell string includes selecting a “U” shaped body region.

5. The method of claim 1 , wherein biasing the body region, by applying the bias voltage through the connecting region having the second band gap includes biasing the body region, by applying a bias voltage through a connecting region comprised of a semiconductor chosen from group consisting of germanium, gallium antimonide, indium nitride, indium arsenide, lead sulfide, lead selenide, lead telluirde, and silicon germanium.

6. A method, comprising:

selecting a body region of a first memory cell string, the body region comprising a semiconductor having a first band gap, with a plurality of gates along a length of the body region, each of the plurality of gates being separated from the body region by at least a respective charge storage structure;

biasing the body region, by applying a bias voltage through a connecting region having a second band gap, the second band gap being lower than the first band gap, the connecting region coupled between a source region and the body region; and

boosting a body region of a non-selected second memory cell string adjacent to the first memory cell string.

7. The method of claim 6 , wherein boosting the body region of the non-selected second memory cell string includes applying a bias voltage to gates along the non-selected second memory cell string.

8. The method of claim 6 , wherein boosting the body region of the non-selected second memory cell string includes applying approximately 10 volts to gates along the non-selected second memory cell string.

9. The method of claim 6 , further including erasing charge storage structures associated with the first memory cell string while biasing the body region.

10. The method of claim 6 , wherein biasing the body region includes biasing a doped p type body region.

11. The method of claim 6 , wherein biasing the body region, by applying the bias voltage through the connecting region having the second band gap includes biasing the body region, by applying the bias voltage through a silicon germanium connecting region.

12. The method of claim 11 , wherein applying the bias voltage through a silicon germanium connecting region includes applying the bias voltage through an epitaxial silicon germanium connecting region.

13. A method, comprising:

selecting a body region of a first memory cell string, the body region comprising a semiconductor having a first band gap, with a plurality of gates along a length of the body region, each of the plurality of gates being separated from the body region by at least a respective charge storage structure;

biasing the body region, by applying a bias voltage through a connecting region having a second band gap, the second band gap being lower than the first band gap, the connecting region coupled between a source region and the body region;

boosting a body region of a non-selected second memory cell string adjacent to the first memory cell string; and

erasing charge storage structures associated with the first memory cell string, while inhibiting charge storage structures associated with the second memory cell string from being erased.

14. The method of claim 13 , wherein boosting the body region of the non-selected second memory cell string includes applying a bias voltage to gates along the non-selected second memory cell string.

15. The method of claim 13 , wherein boosting the body region of the non-selected second memory cell string includes applying approximately 10 volts to gates along the non-selected second memory cell string.

16. The method of claim 13 , wherein biasing the body region, by applying the bias voltage through the connecting region having the second band gap includes biasing the body region, by applying the bias voltage through an epitaxial Si x Ge 1-x connecting region.

17. The method of claim 16 , wherein biasing the body region, by applying the bias voltage through the connecting region having the second band gap includes biasing the body region, by applying the bias voltage through an epitaxial Si x Ge 1-x connecting region, wherein x is approximately 0.5.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050700/0535 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0393 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 043482/0776 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION
Reel/Frame 043483/0686 →
Continuity (4)
Continuation 14320174 · Jun 30, 2014
Continuation 13872762 · Apr 29, 2013
Continuation 13020337 · Feb 3, 2011
Related Publication 20170236589A1 · Aug 17, 2017