Thin film transistor, method for manufacturing the same, and semiconductor device
In a thin film transistor, an increase in off current or negative shift of the threshold voltage is prevented. In the thin film transistor, a buffer layer is provided between an oxide semiconductor layer and each of a source electrode layer and a drain electrode layer. The buffer layer includes a metal oxide layer which is an insulator or a semiconductor over a middle portion of the oxide semiconductor layer. The metal oxide layer functions as a protective layer for suppressing incorporation of impurities into the oxide semiconductor layer. Therefore, in the thin film transistor, an increase in off current or negative shift of the threshold voltage can be prevented.
1. A semiconductor device comprising:
a gate electrode;
a gate insulating layer over the gate electrode;
an oxide semiconductor layer over the gate insulating layer, the oxide semiconductor layer overlapping with the gate electrode;
a source electrode over the oxide semiconductor layer;
a drain electrode over the oxide semiconductor layer;
a first layer between the oxide semiconductor layer and the source electrode;
a second layer between the oxide semiconductor layer and the drain electrode; and
a third layer over a channel formation region of the oxide semiconductor layer,
wherein each of the first layer, the second layer, and the third layer is configured to be a buffer layer,
wherein each of the first layer, the second layer, and the third layer is in contact with the oxide semiconductor layer,
wherein the third layer comprises a material which is different from a material of the first layer and a material of the second layer, and
wherein the buffer layer comprises titanium.
2. A semiconductor device comprising:
a gate electrode;
a gate insulating layer over the gate electrode;
an oxide semiconductor layer over the gate insulating layer, the oxide semiconductor layer overlapping with the gate electrode;
a source electrode over the oxide semiconductor layer;
a drain electrode over the oxide semiconductor layer;
a first layer between the oxide semiconductor layer and the source electrode;
a second layer between the oxide semiconductor layer and the drain electrode; and
a third layer over a channel formation region of the oxide semiconductor layer,
wherein each of the first layer, the second layer, and the third layer is configured to be a buffer layer,
wherein each of the first layer, the second layer, and the third layer is in contact with the oxide semiconductor layer,
wherein the third layer comprises a material which is different from a material of the first layer and a material of the second layer,
wherein the buffer layer comprises titanium,
wherein electrical resistivity of the first layer is less than 10 −3 (Ω·m),
wherein electrical resistivity of the second layer is less than 10 −3 (Ω·m), and
wherein electrical resistivity of the third layer is greater than or equal to 10 6 (Ω·m).
3. The semiconductor device according to claim 1 ,
wherein a thickness of the third layer is larger than a thickness of the first layer, and
wherein the thickness of the third layer is larger than a thickness of the second layer.
4. The semiconductor device according to claim 1 ,
wherein a thickness of the third layer is smaller than a thickness of the first layer, and
wherein the thickness of the third layer is smaller than a thickness of the second layer.
5. The semiconductor device according to claim 1 , further comprising a pixel electrode electrically connected to the source electrode or the drain electrode,
wherein the pixel electrode comprises a region overlapping with a capacitor wiring.
6. The semiconductor device according to claim 1 , further comprising a pixel electrode electrically connected to the source electrode or the drain electrode,
wherein the pixel electrode comprises a region overlapping with a capacitor element, and
wherein the capacitor element comprises a region where a capacitor wiring, the gate insulating layer and the source electrode or the drain electrode are overlapped.
7. The semiconductor device according to claim 5 ,
wherein the capacitor wiring is on a same surface as the gate electrode, and
wherein the capacitor wiring comprises a same material as the gate electrode.
8. The semiconductor device according to claim 2 ,
wherein a thickness of the third layer is larger than a thickness of the first layer, and
wherein the thickness of the third layer is larger than a thickness of the second layer.
9. The semiconductor device according to claim 2 ,
wherein a thickness of the third layer is smaller than a thickness of the first layer, and
wherein the thickness of the third layer is smaller than a thickness of the second layer.
10. The semiconductor device according to claim 2 , further comprising a pixel electrode electrically connected to the source electrode or the drain electrode,
wherein the pixel electrode comprises a region overlapping with a capacitor wiring.
11. The semiconductor device according to claim 2 , further comprising a pixel electrode electrically connected to the source electrode or the drain electrode,
wherein the pixel electrode comprises a region overlapping with a capacitor element, and
wherein the capacitor element comprises a region where a capacitor wiring, the gate insulating layer and the source electrode or the drain electrode are overlapped.
12. The semiconductor device according to claim 10 ,
wherein the capacitor wiring is on a same surface as the gate electrode, and
wherein the capacitor wiring comprises a same material as the gate electrode.