IP Library Granted Patent US 10,361,365
Granted Patent B2
US 10,361,365 · App. 15/876,632 · Granted Jul 23, 2019

Implementing deposition growth method for magnetic memory

Inventors: Luiz M. Franca-Neto (Sunnyvale, CA); Ricardo Ruiz (Santa Clara, CA)
Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
H01L43/12G11C11/161G11C11/1659G11C11/1675G11C11/18H01L27/222H01L27/228H01L43/02H01L43/08H01L43/10
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Quick Facts
Patent No.
US 10,361,365
App. No.
15/876,632
Granted
Jul 23, 2019
Kind
B2
Abstract

A magnetic memory array and a method for implementing the magnetic memory array for use in Solid-State Drives (SSDs) are provided. A plurality of magnetic pillar memory cells is formed using a deposition and/or growth process to produce a magnetic memory array substantially avoiding milling of magnetic materials.

Claims (34)

1. A method for implementing a magnetic memory array comprising:

forming a plurality of magnetic pillar memory cells that include a first magnetic conductor M 1 and a second conductor M 2 and wherein said first magnetic conductor M 1 and said second conductor M 2 are formed of a magnetic material, and said second conductor M 2 being more electrically conductive than said first magnetic conductor M 1 including:

growing said second conductor M 2 , wherein growing said second conductor M 2 includes forming said second conductor M 2 of a magnetic material;

coating said second conductor M 2 with a non-magnetic spacer layer;

growing said first magnetic conductor M 1 over said coated second conductor M 2 , wherein the first magnetic conductor M 1 has a metallic granularity;

depositing an oxide barrier over said grown first magnetic conductor M 1 forming magnetic pillar memory cells, wherein each magnetic pillar memory cell is configured to be independently programmed; and

depositing an interlayer dielectric (IDL) stack of word planes separated by a respective IDL.

2. The method as recited in claim 1 wherein forming said magnetic pillar memory cells includes providing a complementary metal oxide semiconductor (CMOS) wafer having a CMOS defined pad pattern, and growing said magnetic pillar memory cells on said CMOS defined pad pattern.

3. The method as recited in claim 2 includes treating said CMOS defined pad pattern for providing a source of growth for said plurality of magnetic pillar memory cells.

4. The method as recited in claim 1 including forming vias in said IDL stack, and forming other conductive electrical connections.

5. The method as recited in claim 1 wherein growing said second conductor M 2 and growing said first conductor M 1 includes each said first conductor M 1 and said second conductor M 2 not being patterned.

6. A method for implementing a magnetic memory array comprising:

forming a plurality of magnetic pillar memory cells that include a first magnetic conductor M 1 and a second magnetic conductor M 2 being formed of a magnetic material, and said second magnetic conductor M 2 being more electrically conductive than said first magnetic conductor M 1 including:

growing said second conductor M 2 , wherein growing said second conductor M 2 includes forming said second conductor M 2 of a non-magnetic material;

coating said second conductor M 2 with a non-magnetic spacer layer;

growing said first magnetic conductor M 1 over said coated second conductor M 2 ;

depositing an oxide barrier over said grown first magnetic conductor M 1 forming magnetic pillar memory cells, wherein the first magnetic conductor M 1 of said magnetic material has a metallic granularity enabling independent programming of each magnetic pillar memory cell; and

depositing an interlayer dielectric (IDL) stack of word planes separated by a respective IDL.

7. The method as recited in claim 6 wherein forming said magnetic pillar memory cells includes providing a complementary metal oxide semiconductor (CMOS) wafer having a CMOS defined pad pattern, and growing said magnetic pillar memory cells on said CMOS defined pad pattern.

8. The method as recited in claim 7 includes treating said CMOS defined pad pattern for providing a source of growth for said plurality of magnetic pillar memory cells.

9. The method as recited in claim 6 including forming vias in said IDL stack, and forming other conductive electrical connections.

10. The method as recited in claim 6 wherein growing said second conductor M 2 and growing said first conductor M 1 includes each said first conductor M 1 and said second conductor M 2 not being patterned.

11. A method for implementing a magnetic memory array comprising:

forming a plurality of magnetic pillar memory cells that include a first magnetic conductor M 1 being formed of a magnetic material, and a second conductor M 2 being more electrically conductive than said first magnetic conductor M 1 including:

growing said second conductor M 2 ;

coating said second conductor M 2 with a non-magnetic spacer layer;

growing said first magnetic conductor M 1 over said coated second conductor M 2 ;

depositing an oxide barrier over said grown first magnetic conductor M 1 forming magnetic pillar memory cells, wherein the first conductor M 1 of said magnetic material has a metallic granularity enabling independent programming of each magnetic pillar memory cell;

depositing an interlayer dielectric (IDL) stack of word planes separated by a respective IDL; and

sharing a bit line only by said magnetic pillar memory cells inside pillar holes.

12. The method as recited in claim 11 wherein forming said magnetic pillar memory cells includes providing a complementary metal oxide semiconductor (CMOS) wafer having a CMOS defined pad pattern, and growing said magnetic pillar memory cells on said CMOS defined pad pattern.

13. The method as recited in claim 12 includes treating said CMOS defined pad pattern for providing a source of growth for said plurality of magnetic pillar memory cells.

14. The method as recited in claim 11 including forming vias in said IDL stack, and forming other conductive electrical connections.

15. The method as recited in claim 11 wherein growing said second conductor M 2 and growing said first conductor M 1 includes each said first conductor M 1 and said second conductor M 2 not being patterned.

Assignments (11)
SECURITY AGREEMENT (SUPPLEMENTAL) Recorded Nov 14, 2024
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 069411/0208 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2024
From: SANDISK TECHNOLOGIES, INC.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 069168/0273 →
PATENT COLLATERAL AGREEMENT Recorded Aug 23, 2024
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS THE AGENT
Reel/Frame 068762/0494 →
CHANGE OF NAME Recorded Jun 27, 2024
From: SANDISK TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067982/0032 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2024
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067567/0682 →
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
RELEASE OF SECURITY INTEREST AT REEL 052915 FRAME 0566 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 059127/0001 →
SECURITY INTEREST Recorded Feb 6, 2020
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 052915/0566 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2018
From: HGST NETHERLANDS B.V.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 045312/0205 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2018
From: FRANCA-NETO, LUIZ M.; RUIZ, RICARDO
To: HGST NETHERLANDS B.V.
Reel/Frame 044902/0528 →
Continuity (3)
Division 15197847 · Jun 30, 2016
Division 14835271 · Aug 25, 2015
Related Publication 20180145249A1 · May 24, 2018