Stacked semiconductor dies with selective capillary under fill
View Patent ↗Stacked semiconductor dies are provided with selective capillary under fill to avoid wafer warpage during curing. In one embodiment, a method of manufacturing a semiconductor device includes forming at least three stacks of semiconductor dies over a substrate, the stacks spaced apart from one another by gaps. A first sealing material such as a capillary under fill material is deposited into a first subset of the gaps. A second sealing material such as a mold resin is deposited into a second subset of the gaps. The first and second sealing materials are cured, and the die stacks are then singulated.
1. A method of manufacturing a semiconductor device, the method comprising:
forming at least three stacks of semiconductor dies over a substrate, the stacks spaced apart from one another by gaps;
depositing a first sealing material into a first subset of the gaps without depositing the first sealing material into a second subset of the gaps, the first subset and the second subset being exclusive;
depositing a second sealing material into the second subset of the gaps, wherein the second sealing material is different from the first sealing material;
curing the first and second sealing materials; and
singulating the stacks of semiconductor dies.
2. The method of claim 1 wherein the first sealing material has a lower filler containing ratio than the second sealing material.
3. The method of claim 1 wherein first sealing material has higher thermal shrinkage coefficient than the second sealing material.
4. The method of claim 1 wherein depositing the second sealing material comprises depositing the second material over the plurality of stacks of semiconductor dies including over the first and second subsets of gaps.
5. The method of claim 1 further comprising, after curing the first and second sealing materials, removing a portion of the second sealing material until it is substantially coplanar with upper surfaces of the plurality of stacks of semiconductor dies.
6. The method of claim 1 wherein singulating the stacks comprises dicing the wafer along the gaps.
7. The method of claim 1 wherein the first sealing material comprises a capillary under fill (CUF) material and wherein the second sealing material comprises a mold resin material.
8. The method of claim 1 wherein the first sealing material fills a space between adjacent dies within each of the stacks of semiconductor dies.
9. The method of claim 1 , further comprising, after depositing the first sealing material into the first subset of gaps, removing a portion of the first sealing material from the gaps.
10. The method of claim 9 wherein removing a portion of the first sealing material from the gaps comprises trimming the first sealing material with a dicing blade.
11. The method of claim 9 , further comprising, after removing the portion of the first sealing material from the gaps, depositing the second sealing material into the first subset of gaps over the remaining portion of the first sealing material.
12. The method of claim 1 , further comprising attaching one of the singulated stacks of semiconductor dies onto a mounting surface.
13. The method of claim 12 , further comprising covering the attached singulated stack with a third sealing material, the third sealing material different from the first sealing material and the second sealing material.