Molded cavity fanout package without using a carrier and method of manufacturing the same
Disclosed is a method of manufacturing a semiconductor device that includes molding and curing a framing member having an upper side that defines an array of indentations. Semiconductor dies are then adhered to the framing member within respective indentations. The upper side of the framing member and the dies are covered with an RDL. Formation of the RDL includes deposition of a dielectric material that also fills gaps between the dies and the framing member within the indentations. The framing member can be molded to have a thickness that can provide mechanical strength to resist damage to the dies during the formation of the RDL or other manufacturing processes, for example due to warping of the dies. After the RDL is completed, this excess framing member material can then be removed from lower side of the framing member and the structure can be diced to separate the dies into respective semiconductor devices.
1. A method of manufacturing a semiconductor device, comprising:
providing first and second molding plates configured to form a molded structure having a plurality of indentations;
dispensing a molding compound between the first and second molding plates;
bringing the first and second molding plates together so as to mold the molding compound between the first and second molding plates, wherein a corresponding plurality of protrusions on one of the first and second molding plates physically causes the plurality of indentations to form in the molding compound during this bringing step;
solidifying the molding compound, thereby forming a framing member comprising a plurality of framing structures that define the plurality of indentations in the framing member;
adhering a plurality of dies to the framing member within respective indentations of the framing member such that each of the plurality of dies is at least partially surrounded by at least one of the plurality of framing structures, wherein each die has a respective active surface and at least one respective integrated circuit region;
forming a redistribution layer (RDL) on the dies and framing structures of the framing member, thereby resulting in a multi-die panel, wherein the forming of the RDL includes forming dielectric structures in the plurality of indentations between each of the dies and respective adjacent framing structures; and
dicing the multi-layer panel along the plurality of framing structures to obtain separate semiconductor devices.
2. The method of claim 1 , wherein the molding compound comprises an epoxy resin.
3. The method of claim 2 , wherein the solidifying of the molding compound includes curing the epoxy resin.
4. The method of claim 1 , further comprising providing a release film between the first and second molding plates such that the release film is between the molding compound and at least one of the first and second molding plates prior to the bringing of the first and second molding plates together.
5. The method of claim 1 , wherein the plurality of indentations of the framing member are arranged on a first side of the framing member, and wherein the method further comprises removing material of the framing member from a second side of the framing member, the second side being opposite the first side of the framing member.
6. The method of claim 1 , wherein each of the plurality of dies comprises silicon.
7. The method of claim 1 , wherein the RDL layer includes conductive structures that are electrically connected to respective dies.
8. A method of manufacturing a semiconductor device, comprising:
providing a plurality of molding plates configured to form a molded structure having first and second indentations;
shaping a molding compound using the plurality of molding plates, wherein corresponding first and second protrusions on one of the plurality of molding plates physically causes the first and second indentations to form in the molding compound during this shaping step;
solidifying the molding compound, thereby forming a framing member comprising a plurality of framing structures that define the first and second indentations in the framing member;
adhering first and second dies to the framing member within the first and second indentations, respectively, of the framing member such that each of the first and second dies is at least partially surrounded by at least one of the plurality of framing structures, wherein each of the first and second dies has a respective active surface and at least one respective integrated circuit region;
forming a redistribution layer (RDL) on the first and second dies and framing structures of the framing member, thereby resulting in a multi-die panel, wherein the forming of the RDL includes forming dielectric structures in the first and second indentations between each of the first and second dies and respective adjacent framing structures; and
dicing the multi-layer panel along the plurality of framing structures to obtain separate semiconductor devices.
9. The method of claim 8 , wherein the molding compound comprises an epoxy resin.
10. The method of claim 9 , wherein the solidifying of the molding compound includes curing the epoxy resin.
11. The method of claim 8 , further comprising providing a release film adjacent to at least one of the plurality of molding plates such that the release film is between the molding compound and the at least one of the plurality of molding plates prior to the shaping of the molding compound.
12. The method of claim 8 , wherein the first and second indentations of the framing member are arranged on a first side of the framing member, and wherein the method further comprises removing material of the framing member from a second side of the framing member, the second side being opposite the first side of the framing member.
13. The method of claim 8 , wherein each of the first and second dies comprises silicon.
14. The method of claim 8 , wherein the RDL layer includes conductive structures that are electrically connected to at least of the first and second dies.