Light-emitting device and method for manufacturing the same
A highly reliable light-emitting device and a manufacturing method thereof are provided. A light-emitting element and a terminal electrode are formed over an element formation substrate; a first substrate having an opening is formed over the light-emitting element and the terminal electrode with a bonding layer provided therebetween; an embedded layer is formed in the opening; a transfer substrate is formed over the first substrate and the embedded layer; the element formation substrate is separated; a second substrate is formed under the light-emitting element and the terminal electrode; and the transfer substrate and the embedded layer are removed. In addition, an anisotropic conductive connection layer is formed in the opening, and an electrode is formed over the anisotropic conductive connection layer. The terminal electrode and the electrode are electrically connected to each other through the anisotropic conductive connection layer.
1. A method for manufacturing a light-emitting device, comprising the steps of:
forming a light-emitting element and a terminal electrode over an element formation substrate with a separation layer interposed therebetween;
forming a first substrate over the light-emitting element and the terminal electrode with a first bonding layer interposed therebetween;
separating the element formation substrate from the light-emitting element and the terminal electrode so as to expose a part of the terminal electrode;
forming a second substrate having an opening under the light-emitting element and the terminal electrode with a second bonding layer interposed therebetween;
forming an anisotropic conductive connection layer in the opening; and
forming an external electrode electrically connected to the terminal electrode through the anisotropic conductive connection layer.
2. The method for manufacturing a light-emitting device, according to claim 1 , wherein each of the first substrate and the second substrate is a flexible substrate.
3. The method for manufacturing a light-emitting device, according to claim 1 , wherein the opening and the terminal electrode overlap each other.
4. The method for manufacturing a light-emitting device, according to claim 1 , wherein the external electrode is a flexible printed circuit.
5. A method for manufacturing a light-emitting device, comprising:
a first step of forming a separation layer over an element formation substrate;
a second step of forming an insulating layer over the separation layer;
a third step of forming a first opening by selective removal of a part of the insulating layer to expose a part of the separation layer in the first opening;
a fourth step of oxidizing a surface of the exposed separation layer;
a fifth step of forming a terminal electrode overlapping the first opening;
a sixth step of forming a light-emitting element;
a seventh step of forming a first substrate over the light-emitting element and the terminal electrode with a first bonding layer interposed therebetween;
an eighth step of separating the element formation substrate;
a ninth step of forming a second substrate having a second opening under the light-emitting element and the terminal electrode with a second bonding layer interposed therebetween, and
a tenth step of forming an external electrode electrically connected to the terminal electrode in the second opening.
6. The method for manufacturing a light-emitting device, according to claim 5 , wherein the fourth step is performed using oxygen plasma.
7. The method for manufacturing a light-emitting device, according to claim 5 , wherein the first opening and the second opening overlap each other.
8. The method for manufacturing a light-emitting device, according to claim 5 , wherein the terminal electrode and the external electrode are electrically connected to each other through an anisotropic conductive connection layer.
9. The method for manufacturing a light-emitting device, according to claim 5 , wherein the external electrode is a flexible printed circuit.