Hermetic flat top integrated heat spreader (IHS)/electromagnetic interference (EMI) shield package and method of manufacturing thereof for reducing warpage
Disclosed is a semiconductor device and method of manufacturing a semiconductor device that includes planarizing surfaces of a semiconductor substrate and a carrier substrate and then placing the semiconductor substrate on the carrier substrate such that the planarized surfaces of each are adjoining and allowing the semiconductor substrate to bond to the carrier substrate using a Van der Waals force. The method also includes forming a metal filled trench around the semiconductor substrate and in contact with the carrier substrate, which can also be formed of metal. The metal filled trench and carrier substrate together form a metal cage-like structure around the semiconductor substrate that can serve as a heat sink, integrated heat spreader, and Electro-Magnetic Interference shield for the semiconductor substrate.
1. A method of manufacturing a semiconductor device, comprising:
forming a semiconductor bonding surface on a semiconductor substrate, wherein the first semiconductor substrate includes at least one integrated circuit region formed on an active surface opposite the semiconductor bonding surface;
bonding the semiconductor bonding surface of the semiconductor substrate to a carrier bonding surface of a carrier substrate such that the semiconductor bonding surface is adjacent to, and in direct contact with, the carrier bonding surface of the carrier substrate;
encapsulating at least a portion of the semiconductor substrate and at least a portion of the carrier bonding surface with an insulating encapsulation structure;
forming a metal-filled trench structure in the insulating encapsulation structure between the carrier bonding surface and an upper surface of the insulating encapsulation structure, the upper surface of the encapsulation structure being distal from the carrier substrate, wherein the forming of the metal-filled trench structure comprises forming a trench in the upper surface of the insulating encapsulation structure circumscribing the semiconductor substrate, and depositing a metal material in the trench to form a wall structure that circumscribe the semiconductor substrate; and
forming a redistribution layer (RDL) structure on the upper surface of the encapsulation structure, the RDL structure including an interconnect structure that is electrically connected to the at least one integrated circuit region.
2. The method of claim 1 , wherein forming the semiconductor bonding surface on the semiconductor substrate comprises planarizing at least a portion of a surface of the semiconductor substrate opposite the active surface.
3. The method of claim 1 , wherein forming the semiconductor bonding surface on the semiconductor substrate comprises forming a dielectric film on at least a portion of a surface of the semiconductor substrate opposite the active surface and planarizing at least a portion of the dielectric film.
4. The method of claim 3 , wherein the dielectric film comprises silicon dioxide.
5. The method of claim 1 , further comprising:
forming a plurality of conductive pillars on the active surface of the semiconductor substrate; and
grinding the insulating encapsulation structure until at least a portion of the plurality of conductive pillars are exposed.
6. The method of claim 1 , wherein forming the trench in the upper surface of the insulating encapsulation structure comprises using laser ablation to form the trench.
7. The method of claim 1 , wherein depositing the metal material in the trench includes depositing at least a portion of the metal material using at least one of chemical vapor deposition (CVD), physical vapor deposition (PVD), plasma-enhanced chemical vapor deposition (PECVD), and atomic layer deposition (ALD).
8. The method of claim 1 , further comprising planarizing a surface of the carrier substrate to form the carrier bonding surface before bonding the semiconductor bonding surface of the semiconductor substrate to the carrier bonding surface of the carrier substrate.
9. A method of manufacturing a semiconductor device, comprising:
planarizing a surface of a semiconductor substrate to form a semiconductor bonding surface, wherein the semiconductor substrate includes an integrated circuit region formed on an active surface opposite the semiconductor bonding surface;
planarizing a surface of a carrier substrate to form a carrier bonding surface;
bonding the semiconductor bonding surface to the carrier bonding surface, including positioning the semiconductor bonding surface directly adjacent to the carrier bonding surface;
forming an encapsulation structure over at least a portion of the semiconductor substrate and at least a portion of the carrier bonding surface;
forming a metal-filled trench structure in the encapsulation structure circumscribing the semiconductor substrate, wherein the forming of the metal-filled trench structure comprises forming a trench in an upper surface of the encapsulation structure circumscribing the semiconductor substrate, and depositing a metal material in the trench to form a wall structure that circumscribes the semiconductor substrate; and
forming a redistribution layer (RDL) structure over the encapsulation structure, the RDL structure including an interconnect structure that is electrically connected to the integrated circuit region.
10. The method of claim 9 , further comprising:
forming a plurality of conductive pillars on the active surface of the semiconductor substrate; and
grinding the encapsulation structure until at least a portion of the plurality of conductive pillars are exposed.
11. The method of claim 9 , wherein forming the trench comprises using laser ablation to form the trench, and
wherein depositing the metal material in the trench includes depositing at least a portion of the metal material using at least one of chemical vapor deposition (CVD), physical vapor deposition (PVD), plasma-enhanced chemical vapor deposition (PECVD), and atomic layer deposition (ALD).
12. The method of claim 9 , wherein the carrier substrate comprises a metal material type.
13. A semiconductor device, comprising:
a carrier substrate having a carrier bonding surface;
a semiconductor substrate having a semiconductor bonding surface, an active surface opposite the semiconductor bonding surface, and at least one integrated circuit region formed on the active surface, wherein the semiconductor substrate is disposed on the carrier substrate with the semiconductor bonding surface being in contact with the carrier bonding surface without an adhesive therebetween;
an encapsulant structure at least partially encapsulating at least a portion of the semiconductor substrate and at least a portion of the carrier bonding surface;
a metal-filled trench structure extending between an upper surface of the encapsulant structure and the carrier substrate, the upper surface of the encapsulant structure being distal from the carrier substrate, wherein the metal-filled trench structure comprises a trench in the upper surface of the encapsulant structure circumscribing the semiconductor substrate, and a metal material in the trench to form a wall structure that circumscribes the semiconductor substrate; and
a redistribution layer (RDL) structure over the upper surface of the encapsulant structure, the RDL structure including an interconnect structure that is electrically connected to the at least one integrated circuit region of the semiconductor substrate.
14. The semiconductor device of claim 13 , wherein the semiconductor bonding surface is planarized and includes a dielectric material.
15. The semiconductor device of claim 13 , wherein the semiconductor bonding surface is planarized and lacks a dielectric material.
16. The semiconductor device of claim 13 , further comprising a plurality of conductive pillars extending from the active surface of the semiconductor substrate, wherein each of the plurality of conductive pillars is electrically connected to the at least one integrated circuit region and the interconnect structure of the RDL structure.
17. The semiconductor device of claim 13 , further comprising at least one conductive bump on the RDL structure, the at least one conductive bump being electrically connected to the interconnect structure of the RDL structure.