Solid-state imaging device and method of manufacturing the same, and imaging apparatus
A solid-state imaging device includes: a semiconductor substrate provided with an effective pixel region including a light receiving section that photoelectrically converts incident light; an interconnection layer that is provided at a plane side opposite to the light receiving plane of the semiconductor substrate; a first groove portion that is provided between adjacent light receiving sections and is formed at a predetermined depth from the light receiving plane side of the semiconductor substrate; and an insulating material that is embedded in at least a part of the first groove portion.
1. An imaging device, comprising:
a semiconductor substrate;
a plurality of photoelectric conversion elements disposed in the semiconductor substrate;
a first groove portion disposed between adjacent photoelectric conversion elements in a cross-sectional view of the semiconductor substrate;
a second groove portion disposed adjacent to the first groove portion in the cross-sectional view of the semiconductor substrate;
an insulating material disposed, at least a part, in the first groove portion; and
a metallic oxide disposed between the first groove portion and the insulating material, wherein the metallic oxide extends from the first groove portion to the second groove portion along a light receiving surface of the semiconductor substrate.
2. The imaging device of claim 1 , wherein the insulating material comprises silicon oxide.
3. The imaging device of claim 1 , wherein the insulating material is disposed adjacent to the metallic oxide in the first groove portion.
4. The imaging device of claim 1 , wherein the first groove portion is included in a lattice-shaped grooving portion that surrounds at least one of the plurality of photoelectric conversion elements in a plan view.
5. The imaging device of claim 4 , wherein the lattice-shaped grooving portion surrounds each of the plurality of photoelectric conversion elements in the plan view.
6. The imaging device of claim 1 , wherein:
the insulating material is disposed, at least in part, in the second groove portion; and
the metallic oxide is disposed, at least in part, in the second groove portion.
7. The imaging device of claim 6 , wherein the insulating material disposed, at least in part, in the second groove portion is a same insulating material as the insulating material disposed, at least in part, in the first groove portion.
8. The imaging device of claim 6 , wherein the metallic oxide disposed, at least in part, in the second groove portion is a same metallic oxide as the metallic oxide disposed, at least in part, in the first groove portion.
9. The imaging device of claim 1 , wherein a part of the insulating material is disposed outside the first groove portion.
10. The imaging device of claim 1 , wherein the metallic oxide comprises hafnium oxide.
11. The imaging device of claim 1 , wherein the metallic oxide is selected from the group consisting of hafnium oxide, tantalum pentoxide, and zirconium dioxide.
12. The imaging device of claim 1 , wherein a depth dimension of the first groove portion is larger than a width dimension of the first groove portion.
13. The imaging device of claim 1 , further comprising a light-shielding component disposed adjacent to at least part of the semiconductor substrate.
14. The imaging device of claim 13 , wherein the light-shielding component comprises tungsten.
15. The imaging device of claim 1 , wherein the imaging device is a rear-surface irradiation type.
16. The imaging device of claim 1 , further comprising an interconnection layer, wherein the semiconductor substrate is disposed between the interconnection layer and a plurality of color filters configured to receive light.
17. The imaging device of claim 16 , wherein the plurality of color filters are arranged in an RGB color filter layer.
18. The imaging device of claim 16 , further comprising a plurality of microlenses formed adjacent to the plurality of color filters.
19. The imaging device of claim 18 , wherein the plurality of microlenses comprise an organic material.