Memory device containing ovonic threshold switch material thermal isolation and method of making the same
A memory device includes a plurality of memory cells, and an isolation material portion located between the memory cells. The isolation material portion includes at least one ovonic threshold switch material portion.
1. A memory device, comprising:
a plurality of memory cells;
an isolation material portion located between the plurality of memory cells, wherein the isolation material portion comprises at least one ovonic threshold switch material portion;
first electrically conductive lines laterally extending along a first horizontal direction and located over a substrate;
a two-dimensional array of memory pillar structures located on the first electrically conductive lines, wherein each memory pillar structure of the two-dimensional array of memory pillar structures comprises a memory cell of the plurality of memory cells; and
second electrically conductive lines laterally extending along a second horizontal direction and contacting top surfaces of a respective subset of the two-dimensional array of memory pillar structures;
wherein:
the isolation material portion further comprises a dielectric material layer in addition to the least one ovonic threshold switch material portion;
the isolation material portion surrounds the two-dimensional array of memory pillar structures;
a segment of the dielectric material layer and a segment of the at least one ovonic threshold switch material portion are located between each laterally-neighboring pair of memory pillar structures;
the at least one ovonic threshold switch material portion comprises a compound of at least one Group 14 elements and at least one Group 16 element; and
the at least one ovonic threshold switch material portion comprises an ovonic threshold switch material layer that contacts sidewalls of each memory pillar structure of the two-dimensional array of memory structures.
2. The memory device of claim 1 , wherein the at least one ovonic threshold switch material portion comprises a material selected from a GeSeAs alloy, a GeTeAs alloy, a GeSeTe alloy, a GeSe alloy, a SeAs alloy, a AsTe alloy, a GeTe alloy, a SiTe alloy, a SiAsTe alloy, or SiAsSe alloy, and wherein the at least one ovonic threshold switch material portion is undoped or doped with at least one of N, 0 , C, P, Ge, As, Te, Se, In, or Si.
3. The memory device of claim 1 , wherein the dielectric material layer comprises silicon nitride, undoped silicate glass, a doped silicate glass, an organosilicate glass, spin-on glass, silicon carbide, SiON, SiCN, SiOC, SiOCH, SiOCN, aluminum oxide, tantalum oxide, a dielectric metal nitride, or a dielectric metal carbide, or multilayers thereof.
4. The memory device of claim 1 , wherein the ovonic threshold switch material layer contacts an entirety of sidewalls of each memory pillar structure of the two-dimensional array of memory structures.
5. The memory device of claim 1 , wherein:
the ovonic threshold switch material layer contacts a lower region of each sidewall of each memory pillar structure of the two-dimensional array of memory structures; and
the dielectric material layer contacts an upper region of each sidewall of each memory pillar structure of the two-dimensional array of memory structures.
6. The memory device of claim 1 , wherein the dielectric material layer contacts an entirety of each sidewall of each memory pillar structure.
7. The memory device of claim 6 , wherein the at least one ovonic threshold switch material portion comprises a top surface located within a horizontal plane including top surfaces of the two-dimensional array of memory pillar structures.
8. The memory device of claim 6 , wherein the at least one ovonic threshold switch material portion is encapsulated within the dielectric material layer.
9. The memory device of claim 1 , wherein each memory pillar structure of the two-dimensional array of memory structures comprises:
the memory cell of the plurality of memory cells comprising a memory material configured to provide at least two different resistivity states; and
a selector element.
10. The memory device of claim 9 , wherein:
the memory cell of the plurality of memory cells comprises a phase change material; and
the selector element comprises an additional ovonic threshold voltage material that is provided in addition to the at least one ovonic threshold switch material portion of the isolation material portion.
11. The memory device of claim 9 , wherein the memory cell of the plurality of memory cells comprises a magnetoresistive random access memory element comprising a tunneling dielectric located between a ferromagnetic free layer and a ferromagnetic reference layer.
12. The memory device of claim 9 , wherein the memory cell of the plurality of memory cells comprises a resistive random access memory element comprising a metal oxide layer.