IP Library Granted Patent US 11,756,811
Granted Patent B2
US 11,756,811 · App. 16/460,929 · Granted Sep 12, 2023

Pick and place machine cleaning system and method

Inventors: Alan E. Humphrey (Reno, NV); Bret A. Humphrey (Reno, NV); Jerry J. Broz (Longmont, CO); Wayne C. Smith (Reno, NV)
Assignee: International Test Solutions, LLC
H01L21/67144B08B1/02B08B7/0028B65G47/91H01L21/6838
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Quick Facts
Patent No.
US 11,756,811
App. No.
16/460,929
Filed
Jul 2, 2019
Granted
Sep 12, 2023
Kind
B2
Art Unit
1759
USPC
134/6
Abstract

A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.

Claims (16)

1. An apparatus, comprising:

a semiconductor device handling machine having a pick and place apparatus, the pick and place apparatus having a contact element with an inner surface and an outer surface and the contact element contacts and picks one of a device and a component using suction;

a cleaning material attached to a substrate that is positioned adjacent to the pick and place apparatus, the cleaning material having a top layer that is contacted by the contact element of the pick and place apparatus during a cleaning process wherein the top layer has a plurality of microfeatures having a spacing between the microfeatures, a moment of inertia of each microfeature and a total length of each microfeature determined based on at least a diameter of the contact element of the pick and place apparatus that cleans an inside and outside surface of the contact element and a textured surface that cleans the inside and outside surface of the contact element; and

wherein the contact element is cleaned while the contact element is attached to the pick and place apparatus by inserting an end of the contact element into the cleaning material; and

wherein the pick and place apparatus performs the pick and place operation once the contact element is cleaned.

2. The apparatus of claim 1 , wherein the cleaning material further comprises a surface tackiness that causes a piece of debris on the contact surface to transfer to the cleaning material.

3. The apparatus of claim 2 , wherein the surface tackiness is in a range between 20 grams and 800 grams.

4. The apparatus of claim 1 , wherein the one or more microfeatures are one of microcolumns and micropyramids.

5. The apparatus of claim 1 , wherein the cleaning material further comprises one or more intermediate layers underneath the cleaning pad layer that support the cleaning pad layer.

6. The apparatus of claim 5 , wherein the one or more intermediate layers are one of rigid layers, compliant layers and rigid and compliant layers.

7. The apparatus of claim 5 , wherein the cleaning material further comprises a release layer on top of a top surface of the cleaning pad layer that protects the cleaning pad layer.

8. The apparatus of claim 1 , wherein the cleaning material further comprises a substrate on top of which a cleaning pad layer is supported.

9. The apparatus of claim 1 , wherein the pick and place apparatus further comprises one of a pick and place apparatus for a packaged device being tested and a pick and place apparatus for a component used in a surface mount process.

10. The apparatus of claim 1 , wherein the pick and place apparatus further comprises one of a pick and place apparatus for a die attach machine and a pick and place apparatus for a flip-chip bonder machine.

11. The apparatus of claim 1 , wherein the contact element further comprises one of a vacuum aperture, a nozzle, a suction cup, a suction inlet, a vacuum collet of the pick and place apparatus.

12. The apparatus of claim 1 , wherein the cleaning layer has a set of microfeatures and an array of streets, avenues or diagonals that decouple each microfeature from each other microfeature and a width of each street, avenue or diagonal is based on a dimension of the contact element of the pick and place apparatus.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 5, 2023
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: ENTEGRIS, INC.
Reel/Frame 065764/0493 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060615/0001 →
RELEASE OF SECURITY INTEREST Recorded Jul 6, 2022
From: JPMORGAN CHASE BANK, N.A.
To: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.; KMG-BERNUTH, INC.; MPOWER SPECIALTY CHEMICALS LLC; SEALWELD (USA), INC.; INTERNATIONAL TEST SOLUTIONS, LLC; CMC MATERIALS, INC.
Reel/Frame 060592/0260 →
CHANGE OF NAME Recorded May 3, 2021
From: INTERNATIONAL TEST SOLUTIONS, INC.
To: INTERNATIONAL TEST SOLUTIONS, LLC
Reel/Frame 056121/0757 →
SECURITY AGREEMENT Recorded Apr 30, 2021
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 056104/0979 →