IP Library Granted Patent US 10,792,713
Granted Patent B1
US 10,792,713 · App. 16/460,935 · Granted Oct 6, 2020

Pick and place machine cleaning system and method

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,792,713
App. No.
16/460,935
Granted
Oct 6, 2020
Kind
B1
Abstract

A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.

Claims (22)

1. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having a set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the vacuum pickup tool and the vacuum inlet/outlet of the vacuum pickup tool of the pick and place machine to transfer to the cleaning material and a textured surface that cleans an inside surface and an outside surface of the vacuum pickup tool.

2. The cleaning device of claim 1 , wherein the surface tackiness is in a range between 20 grams and 800 grams.

3. The cleaning device of claim 2 , wherein the set of microfeatures are one of microcolumns and micropyramids.

4. The cleaning device of claim 1 , wherein the cleaning material further comprises a cleaning pad layer and one or more intermediate layers underneath the cleaning pad layer that support the cleaning pad layer.

5. The cleaning device of claim 4 , wherein the intermediate layers are one of rigid layers, compliant layers and rigid and compliant layers.

6. The cleaning device of claim 4 , wherein the cleaning pad layer further comprises a plurality of abrasive particles having a Mohs Hardness of 7 or greater.

7. The cleaning device of claim 6 , wherein the cleaning material has the specific gravity in a range of 0.75 to 2.27, the modulus of elasticity in a range of 40-MPa to 600-MPa, the tackiness in a range of 20 to 800 grams, the thickness in a range between 25-μm and 500-μm, each layer has a hardness between 30 Shore A and 90 Shore A, and the porosity in a range of 10 to 150 micropores per inch.

8. The cleaning device of claim 1 , wherein the cleaning material further comprises a release layer on top of the top surface of the cleaning material that protects the cleaning material.

9. The cleaning device of claim 1 , wherein the cleaning material has a specific gravity, an elasticity, a tackiness, a thickness and a porosity.

10. The cleaning device of claim 9 , wherein the cleaning material is one of a rubber, a natural polymer and a synthetic polymer.

11. The cleaning device of claim 10 , wherein the cleaning material has the specific gravity in a range of 0.75 to 2.27, the modulus of elasticity in a range of 40-MPa to 600-MPa, the tackiness in a range of 20 to 800 grams, the thickness in a range between 25-μm and 500-μm, each layer has a hardness between 30 Shore A and 90 Shore A, and the porosity in a range of 10 to 150 micropores per inch.

12. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having a set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine, the set of microfeatures having a spacing, a moment of inertia and a total length of each microfeature determined based on at least a diameter of the vacuum inlet/outlet; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the contact element surface to transfer to the cleaning material.

13. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine and an array of streets, avenues or diagonals that decouple each microfeature from each other microfeature and a width of each street, avenue or diagonal is based on the vacuum inlet/outlet; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the contact element surface to transfer to the cleaning material.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 5, 2023
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: ENTEGRIS, INC.
Reel/Frame 065764/0493 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060615/0001 →
RELEASE OF SECURITY INTEREST Recorded Jul 6, 2022
From: JPMORGAN CHASE BANK, N.A.
To: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.; KMG-BERNUTH, INC.; MPOWER SPECIALTY CHEMICALS LLC; SEALWELD (USA), INC.; INTERNATIONAL TEST SOLUTIONS, LLC; CMC MATERIALS, INC.
Reel/Frame 060592/0260 →
CHANGE OF NAME Recorded May 3, 2021
From: INTERNATIONAL TEST SOLUTIONS, INC.
To: INTERNATIONAL TEST SOLUTIONS, LLC
Reel/Frame 056121/0757 →
SECURITY AGREEMENT Recorded Apr 30, 2021
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 056104/0979 →