IP Library › Granted Patent US 10,879,444
Granted Patent B2
US 10,879,444 · App. 16/669,785 · Granted Dec 29, 2020

Vertical solid-state transducers and high voltage solid-state transducers having buried contacts and associated systems and methods

Inventors: Vladimir Odnoblyudov (Eagle, ID); Martin F. Schubert (Boise, ID)
Assignee: Micron Technology, Inc.
H01L33/62H01L21/78H01L25/0753H01L27/04H01L27/156H01L33/005H01L33/0025H01L33/06H01L33/32H01L33/382H01L33/405H01L33/64H01L33/647H01L33/0095H01L33/58H01L33/642H01L33/644H01L2224/73265H01L2933/0016H01L2933/0033H01L2933/0066H01L2933/0075
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Quick Facts
Patent No.
US 10,879,444
App. No.
16/669,785
Granted
Dec 29, 2020
Kind
B2
Abstract

Solid-state transducers (“SSTs”) and vertical high voltage SSTs having buried contacts are disclosed herein. An SST die in accordance with a particular embodiment can include a transducer structure having a first semiconductor material at a first side of the transducer structure, and a second semiconductor material at a second side of the transducer structure. The SST can further include a plurality of first contacts at the first side and electrically coupled to the first semiconductor material, and a plurality of second contacts extending from the first side to the second semiconductor material and electrically coupled to the second semiconductor material. An interconnect can be formed between at least one first contact and one second contact. The interconnects can be covered with a plurality of package materials.

Claims (35)

1. A solid-state transducer (SST) die, comprising:

a first terminal;

a second terminal;

a plurality of SST junctions, each of the plurality of SST junctions comprising a first contact and a second contact;

a plurality of interconnects coupling the plurality of SST junctions in series between the first terminal and the second terminal;

a dielectric material covering at least the plurality of interconnects and the first contact and the second contact of each of the plurality of SST junctions; and

a conductive material over the dielectric material and electrically isolated from each of the first terminal and the second terminal,

wherein at least one of the first terminal and the second terminal is co-planar with the conductive material.

2. The SST die of claim 1 , further comprising an insulating material disposed between adjacent ones of the plurality of SST junctions.

3. The SST die of claim 1 , wherein both the first terminal and the second terminal are co-planar with the conductive material.

4. The SST die of claim 1 , wherein for each of the plurality of SST junctions, the second contact is a buried contact.

5. The SST die of claim 1 , wherein each of the plurality of interconnects extends between a first contact of one of the plurality of SST junctions and a second contact of an adjacent one of the plurality of SST junctions.

6. The SST die of claim 1 , wherein each of the plurality of SST junctions comprises a first semiconductor material, a second semiconductor material, and a light-emitting active region between the first semiconductor material and the second semiconductor material.

7. The SST die of claim 1 , further comprising a passivation material disposed between the plurality of interconnects and the plurality of SST junctions.

8. The SST die of claim 7 , wherein the passivation material comprises openings aligned with the first contact and the second contact of each of the plurality of SST junctions.

9. The SST die of claim 1 , further comprising a seed material between the dielectric material and the conductive material.

10. The SST die of claim 9 , wherein the seed material comprises copper (Cu), titanium (Ti) or an alloy thereof.

11. The SST die of claim 1 , wherein the conductive material, the first terminal, and the second terminal are all comprised by a metal substrate, and wherein the conductive material is electrically isolated from each of the first terminal and the second terminal by openings in the metal substrate exposing the dielectric material.

12. The SST die of claim 11 , wherein the metal substrate comprises copper (Cu), aluminum (Al), or a nickel iron (NiFe) alloy.

13. The SST die of claim 11 , wherein the metal substrate has a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

14. A solid-state transducer (SST) die, comprising:

a plurality of SST junctions;

a plurality of interconnects coupling the plurality of SST junctions in series;

a dielectric material covering the plurality of interconnects and the plurality of SST junctions; and

a metal substrate over the dielectric material, the metal substrate comprising a thermal pad, a first terminal and a second terminal.

15. The SST die of claim 14 , wherein the first terminal and the second terminal are electrically isolated from the thermal pad.

16. The SST die of claim 15 , wherein the plurality of SST junctions are coupled in series between the first terminal and the second terminal.

17. The SST die of claim 15 , wherein the thermal pad, the first terminal, and the second terminal are electrically isolated from each other by openings in the metal substrate exposing the dielectric material.

18. The SST die of claim 14 , wherein the metal substrate has a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

19. The SST die of claim 14 , wherein the metal substrate comprises copper (Cu), aluminum (Al), or a nickel iron (NiFe) alloy.

20. A solid-state transducer (SST) die, comprising:

a plurality of SST junctions;

a plurality of interconnects coupling the plurality of SST junctions in series;

a dielectric material covering the plurality of interconnects and the plurality of SST junctions; and

a metal substrate over the dielectric material, the metal substrate having a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 31, 2019
From: ODNOBLYUDOV, VLADIMIR; SCHUBERT, MARTIN F.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050878/0359 →
Continuity (7)
Continuation 16167280 · Oct 22, 2018
Continuation 15658202 · Jul 24, 2017
Continuation 15019748 · Feb 9, 2016
Continuation 14850715 · Sep 10, 2015
Division 14607839 · Jan 28, 2015
Division 13708526 · Dec 7, 2012
Related Publication 20200066956A1 · Feb 27, 2020
Cited By (2)
US 12,206,046 US 12,279,468