Acoustic wave device with transverse spurious mode suppression
An acoustic wave device with a bent section is disclosed. The acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer. The bent section is arranged to create a curvature in a waveguide of the acoustic wave device to suppress a transverse spurious mode of the acoustic wave device.
1. An acoustic wave device comprising:
a piezoelectric layer; and
an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a bus bar having an arcuate section and fingers extending from at least the arcuate section of the bus bar, the fingers having substantially the same length throughout the arcuate section, and the acoustic wave device having a curved acoustic aperture configured to suppress a transverse spurious mode of the acoustic wave device.
2. The acoustic wave device of claim 1 further comprising a temperature compensation layer over the interdigital transducer electrode.
3. The acoustic wave device of claim 2 further comprising a dispersion adjustment layer over the temperature compensation layer.
4. The acoustic wave device of claim 1 wherein the arcuate section has a bend angle in a range from 1° to 20°.
5. The acoustic wave device of claim 1 wherein the arcuate section has a bend angle in a range from 10° to 20°.
6. The acoustic wave device of claim 1 wherein the bus bar consists essentially of the arcuate section.
7. The acoustic wave device of claim 1 wherein the bus bar includes a straight section.
8. The acoustic wave device of claim 1 further comprising a piston mode structure arranged to create a slow velocity boundary region of the acoustic wave device, the slow velocity region having a slower velocity than a central portion of an active region of the acoustic wave device.
9. The acoustic wave device of claim 1 further comprising a carrier substrate, the piezoelectric layer being over the carrier substrate.
10. The acoustic wave device of claim 1 further comprising a carrier substrate and a dispersion adjustment layer, the dispersion adjustment layer positioned between the carrier substrate and the piezoelectric layer.
11. The acoustic wave device of claim 1 wherein the acoustic wave device is a surface acoustic wave resonator configure to generate a surface acoustic wave.
12. An acoustic wave device comprising:
a piezoelectric layer; and
an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a bent section arranged to create a curvature in an acoustic aperture of the acoustic wave device to suppress a transverse spurious mode of the acoustic wave device, the interdigital transducer electrode including a bus bar and fingers in the bent section extending from the bus bar, the fingers having substantially the same length throughout the bent section.
13. The acoustic wave device of claim 12 wherein the bent section has a bend angle in a range from 1° to 20°.
14. The acoustic wave device of claim 13 further comprising a piston mode structure arranged to create a slow velocity boundary region of the acoustic wave device, the slow velocity region having a slower velocity than a central portion of an active region of the acoustic wave resonator.
15. The acoustic wave device of claim 12 wherein the bent section has a bend angle in a range from 10° to 20°.
16. The acoustic wave device of claim 12 wherein the acoustic wave device is a temperature compensated surface acoustic wave resonator configure to generate a surface acoustic wave.
17. The acoustic wave device of claim 12 wherein the bus bar consists essentially of an arcuate section.
18. The acoustic wave device of claim 12 wherein the bus bar includes an arcuate section and a straight section.
19. An acoustic wave filter comprising:
an acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a bus bar with an arcuate section and fingers extending from at least the arcuate section of the bus bar, the fingers having substantially the same length throughout the arcuate section, and the acoustic wave resonator having a curved acoustic aperture configured to suppress a transverse spurious mode; and
a plurality of additional acoustic wave resonators, the acoustic wave resonator and the additional acoustic wave resonators are together configured to filter a radio frequency signal.
20. The acoustic wave filter of claim 19 wherein the acoustic wave resonator is a shunt acoustic wave resonator.