IP Library › Granted Patent US 12,592,678
Granted Patent B2
US 12,592,678 · App. 18/642,391 · Granted Mar 31, 2026

Acoustic wave device with transverse spurious mode suppression

Inventors: Yuhao Liu (Los Angeles, CA); Jiansong Liu (Fremont, CA); Chun Sing Lam (San Jose, CA)
Assignee: Skyworks Solutions, Inc.
H03H9/54H03H9/02834H03H9/02992H03H9/64H03H9/725
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,592,678
App. No.
18/642,391
Granted
Mar 31, 2026
Kind
B2
Abstract

An acoustic wave device with a bent section is disclosed. The acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer. The bent section is arranged to create a curvature in a waveguide of the acoustic wave device to suppress a transverse spurious mode of the acoustic wave device.

Claims (23)

1 . An acoustic wave device having an acoustic aperture, the acoustic wave device comprising:

a piezoelectric layer; and

an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a bent section arranged to create a curvature in the acoustic aperture, the interdigital transducer electrode including a first bus bar and a second bus bar having substantially the same shape and orientation as each other in the bent section, and the first bus bar being curved in the bent section.

2 . The acoustic wave device of claim 1 wherein the interdigital transducer electrode includes inner fingers in the bent section positioned between two outer fingers in the bent section, and the bent section has a bend angle between intersecting lines extends from outer edges of the two outer fingers, and each of the inner fingers and two outer fingers extends from either the first bus bar or the second bus bar.

3 . The acoustic wave device of claim 2 wherein the bend angle is in a range from 1° to 20°.

4 . The acoustic wave device of claim 2 wherein the bend angle is in a range from 10° to 20°.

5 . The acoustic wave device of claim 1 wherein the first bus bar is spaced apart from the second bus bar by substantially the same distance throughout the bent section.

6 . The acoustic wave device of claim 1 wherein the interdigital transducer electrode consists essentially of the bent section.

7 . The acoustic wave device of claim 1 wherein the acoustic aperture has substantially the same width throughout the bent section.

8 . The acoustic wave device of claim 1 wherein the interdigital transducer electrode includes first fingers extending from the first bus bar and second fingers extending from the second bus bar, and all of the first fingers and the second fingers have substantially the same length throughout the bent section.

9 . The acoustic wave device of claim 1 wherein the interdigital transducer electrode includes a piston mode structure.

10 . The acoustic wave device of claim 1 further comprising a temperature compensation layer over the interdigital transducer electrode.

11 . The acoustic wave device of claim 1 further comprising a carrier substrate, the piezoelectric layer positioned over the carrier substrate.

12 . A radio frequency module comprising:

a filter configured to filter a radio frequency signal, the filter including an acoustic wave resonator having an acoustic aperture, the acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a bent section arranged to create a curvature in the acoustic aperture, the interdigital transducer electrode including a first bus bar and a second bus bar having substantially the same shape and orientation as each other in the bent section, and the first bus bar being curved in the bent section; and

a radio frequency switch coupled to the filter.

13 . The radio frequency module of claim 12 wherein the bent section has a bend angle between in a range from 1° to 20°.

14 . The radio frequency module of claim 13 wherein the bend angle is in a range from 10° to 20°.

15 . The radio frequency module of claim 12 further comprising a power amplifier configured to output the radio frequency signal.

16 . The radio frequency module of claim 12 wherein the interdigital transducer electrode includes inner fingers in the bent section positioned between two outer fingers in the bent section, and all of the inner fingers have substantially the same length throughout the bent section.

17 . The radio frequency module of claim 12 wherein the interdigital transducer electrode includes a piston mode structure.

18 . The radio frequency module of claim 12 further comprising a temperature compensation layer over the interdigital transducer electrode.

19 . The radio frequency module of claim 12 further comprising a carrier substrate, the piezoelectric layer positioned over the carrier substrate.

Continuity (5)
Continuation 17449148 · Sep 28, 2021
Continuation 16700947 · Dec 2, 2019
Provisional Application 62774734 · Dec 3, 2018
Provisional Application 62774762 · Dec 3, 2018
Related Publication 20240348231A1 · Oct 17, 2024
References Cited (38)
US 4477784A · Maerfeld et al. · 1984 [cited by applicant]
US 7482896B2 · Wada et al. · 2009 [cited by applicant]
US 7576471B1 · Solal · 2009 [cited by applicant]
US 9319023B2 · Tanaka · 2016 [cited by applicant]
US 9641152B2 · Nakamura et al. · 2017 [cited by applicant]
US 11165411B2 · Liu et al. · 2021 [cited by applicant]
US 11990892B2 · Liu et al. · 2024 [cited by applicant]
US 20020044497A1 · Kachi et al. · 2002 [cited by applicant]
US 20070046400A1 · Wada · 2007 [cited by examiner]
US 20120161577A1 · Abbott et al. · 2012 [cited by applicant]
US 20160056791A1 · Shimizu et al. · 2016 [cited by applicant]
US 20160149553A1 · Yoon et al. · 2016 [cited by applicant]
US 20160294361A1 · Yamane et al. · 2016 [cited by applicant]
US 20170093367A1 · Mimura · 2017 [cited by applicant]
US 20170279433A1 · Matsukura et al. · 2017 [cited by applicant]
US 20170366157A1 · Liu et al. · 2017 [cited by applicant]
US 20180097508A1 · Iwamoto et al. · 2018 [cited by applicant]
US 20180219528A1 · Liu et al. · 2018 [cited by applicant]
US 20200127638A1 · Daimon · 2020 [cited by applicant]
US 20200177159A1 · Liu et al. · 2020 [cited by applicant]
US 20220014177A1 · Liu et al. · 2022 [cited by applicant]
JP 2002084162 · 2002 [cited by applicant]
JP 2010098506 · 2010 [cited by applicant]
M. Solal et al., “Transverse modes suppression and loss reduction for buried electrodes SAW devices,” 2010 IEEE International Ultrasonics Symposium, San Diego, CA, 2010, pp. 624-628. [cited by applicant]
P. V. Wright, “A review of SAW resonator filter technology,” IEEE 1992 Ultrasonics Symposium Proceedings, Tucson, AZ, 1992, pp. 29-38 vol. 1. [cited by applicant]
S. A. Wilkus, et al., “Transverse Mode Compensation of Surface Acoustic Wave Filters,” IEEE 1985 Ultrasonics Symposium, San Francisco, Ca, USA, 1985, pp. 43-47. [cited by applicant]
R. Ruby, “Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology,” in IEEE International Ultrasonics Symposium Proceedings, New York, NY, 2007, pp. 1029-1040. [cited by applicant]
C. S. Lam, “A Review of the Timing and Filtering Technologies in Smartphones,” in IEEE International Frequency Control Symposium Proceedings, New Orleans, LA, 2016, pp. 1-6. [cited by applicant]
H. Iwamoto, T. Takai, Y. Takamine, T. Nakao, T. Fuyutsume and M Koshino, “Transverse Modes in I.H.P. SAW Resonator and Their Suppression Method,” in IEEE International Ultrasonics Symposium Proceedings, Kobe, 2018. [cited by applicant]
H. Nakamura, H. Nakanishi, R. Goto and K. Hashimoto, “Suppression of Transverse Mode Spurious Responses for SAW Resonators on SiO2/Al/LiNbO3 Structure by Selective Removal of SiO2,” in IEEE Transactions on Ultrasonics, … [cited by applicant]
H. Nakamura et al., “Suppression of Transverse Mode Spurious in SAW Resonators on an SiO2/Al/LiNbO3 Structure for Wideband CDMA Applications,” in IEEE International Ultrasonics Symposium Proceedings, Beijing, 2008, pp. … [cited by applicant]
M. Giovannini et al., “Apodization technique for spurious mode suppression in AlN contour-mode resonators,” in Sensors and Actuators A: Physical pp. 42-50, 2014. [cited by applicant]
Jie Zou, Jiansong Liu, G. Tang, C. Lin and C. S. Lam, “Transverse Mode Suppression in the AlN Lamb Wave Resonators by “Piston Mode”,” in IEEE International Ultrasonics Symposium Proceedings, Washington, DC, 2017, pp. 1-… [cited by applicant]
Jiansong Liu, T. Omori, Changjun Ahn and K. Hashimoto, “Impact of Surface Periodic grating on FBAR Structures to Spurious Transverse Resonances,” in IEEE International Ultrasonics Symposium Proceedings, Prague, 2013, pp… [cited by applicant]
Jiansong Liu, T. Omori, C. Ahn and K. Hashimoto, “Design and Simulation of Coupled-resonator Filters using Periodically Slotted Electrodes on FBARs [Correspondence],” in IEEE Transactions on Ultrasonics, Ferroelectrics,… [cited by applicant]
Ken-ya, Hashimoto, Surface Acoustic Wave Devices in Telecommunications: Modelling and Simulation, Springer, 2000. [cited by applicant]
A. W. Snyder, “Generalised Fresnel's Law for Loss due to Curvature,” in Electronics Letters, vol. 9, No. 26, pp. 609-610, Dec. 27, 1973. [cited by applicant]
B. Yu, Yuhao Liu, Y. Ye, J. Ren, X. Liu and Q. J. Gu, “High-Efficiency Micromachined Sub-THz Channels for Low-Cost Interconnect for Planar Integrated Circuits,” in IEEE Transactions on Microwave Theory and Techniques, v… [cited by applicant]