Contact structure and formation thereof
A semiconductor device and methods of formation are provided. A semiconductor device includes an annealed cobalt plug over a silicide in a first opening of the semiconductor device, wherein the annealed cobalt plug has a repaired lattice structure. The annealed cobalt plug is formed by annealing a cobalt plug at a first temperature for a first duration, while exposing the cobalt plug to a first gas. The repaired lattice structure of the annealed cobalt plug is more regular or homogenized as compared to a cobalt plug that is not so annealed, such that the annealed cobalt plug has a relatively increased conductivity or reduced resistivity.
1. A semiconductor device, comprising:
a silicide;
a dielectric layer;
a glue layer in contact with a first sidewall of the dielectric layer, a second sidewall of the dielectric layer, and a top surface of the silicide;
a metal layer laterally co-planar with the glue layer, wherein the glue layer is spaced apart from the metal layer; and
a cobalt plug over the silicide, wherein:
the glue layer is between the silicide and the cobalt plug, and
the cobalt plug has a different composition than the metal layer.
2. The semiconductor device of claim 1 , wherein the glue layer is a titanium nitride layer.
3. The semiconductor device of claim 1 , wherein the dielectric layer overlies the silicide.
4. The semiconductor device of claim 1 , wherein the cobalt plug is in contact with the glue layer.
5. The semiconductor device of claim 1 , wherein the dielectric layer is in contact with the top surface of the silicide.
6. The semiconductor device of claim 1 , wherein the dielectric layer is between the silicide and the glue layer.
7. The semiconductor device of claim 1 , wherein the silicide is disposed within a substrate and the dielectric layer overlies the substrate.
8. The semiconductor device of claim 1 , wherein the silicide comprises nickel.
9. The semiconductor device of claim 1 , wherein the dielectric layer is between the metal layer and the glue layer.
10. A semiconductor device, comprising:
a silicide;
a metal layer;
a first dielectric layer overlying the silicide;
a glue layer overlying the silicide and between a first portion of the first dielectric layer and a second portion of the first dielectric layer, wherein the first dielectric layer is between the metal layer and the glue layer; and
a cobalt plug over the silicide, wherein:
the glue layer is between the silicide and the cobalt plug, and
the cobalt plug has a different composition than the metal layer.
11. The semiconductor device of claim 10 , comprising:
a second dielectric layer, wherein the metal layer is between the first dielectric layer and the second dielectric layer.
12. The semiconductor device of claim 10 , wherein the metal layer contacts the silicide.
13. The semiconductor device of claim 10 , wherein the glue layer contacts the silicide.
14. The semiconductor device of claim 10 , wherein the silicide comprises nickel.
15. A semiconductor device, comprising:
a silicide;
a metal layer overlying the silicide;
a dielectric layer;
a glue layer overlying the silicide, wherein:
the glue layer is in contact with a sidewall of the dielectric layer, and
the glue layer is spaced apart from the metal layer; and
a cobalt plug overlying the silicide, wherein:
the glue layer is between the silicide and the cobalt plug, and
the glue layer is between the metal layer and the cobalt plug.
16. The semiconductor device of claim 15 , wherein the glue layer is in contact with a top surface of the silicide.
17. The semiconductor device of claim 15 , wherein the glue layer contacts a top surface of the dielectric layer.
18. The semiconductor device of claim 15 , wherein a width of the silicide is greater than a width of a portion of the glue layer between a first portion of the dielectric layer and a second portion of the dielectric layer.
19. The semiconductor device of claim 15 , wherein the metal layer is in contact with a surface of the silicide.
20. The semiconductor device of claim 15 , wherein:
the glue layer, the dielectric layer, and the metal layer are in contact with a top surface of the silicide.