IP Library Granted Patent US 11,318,550
Granted Patent B2
US 11,318,550 · App. 16/855,841 · Granted May 3, 2022

System and method for cleaning wire bonding machines using functionalized surface microfeatures

Inventors: Alan E. Humphrey (Reno, NV); Jerry J. Broz (Longmont, CO); Bret A. Humphrey (Reno, NV); Alex S. Poles (Reno, NV); Wayne C. Smith (Reno, NV); Janakraj Shivlal (Singapore, SG)
Assignee: International Test Solutions, LLC
B23K3/08B23K3/063B08B1/001
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Quick Facts
Patent No.
US 11,318,550
App. No.
16/855,841
Granted
May 3, 2022
Kind
B2
Abstract

A cleaning material, device, and method for predictably cleaning the capillary tube for a wire bonding machine in which the cleaning pad has a predetermined configuration appropriate for the particular wire bonding machine and a substrate having a defined functionalized surface topology and geometry which can be introduced into the wire bonding machine during the normal wire bonding operations. The cleaning material has a predetermined topography with a plurality of functional 3-dimensional (3D) microstructures that provide performance characteristics which are not possible with a non-functionalized and flat surface.

Claims (9)

1. A method for cleaning a capillary tube of a wire bonding machine, the method comprising:

performing a wire bonding operation using the capillary tube of the wire bonding machine;

performing a cleaning operation using a cleaning device that has a cleaning media having a cleaning media base reference plane and a plurality of functionalized microfeatures arranged in an array having a plurality of rows and a plurality of columns of functionalized microfeatures and each functionalized microfeature has a body with a width, a height, a spacing between each body and dimensional properties that optimize the cleaning media so that one or more surfaces of the capillary tube are cleaned without modification or damage, each microfeature extending down from the cleaning media base reference plane and the cleaning media having a plurality of abrasive particles having a Mohs Hardness of 7 or greater uniformly distributed within the body of each functionalized microfeature, a cleaning layer applied across a top surface of the cleaning media having predetermined characteristics that clean contaminants from the one or more surfaces of the capillary tube, the cleaning layer applied on top of all of the functionalized microfeatures from the cleaning media base reference plane down into each negative functionalized microfeature to a bottom of each negative functionalized microfeature and one or more intermediate rigid or compliant underlayers underneath the cleaning media, wherein each underlayer has a modulus of elasticity range between more than 40-MPa to 600-MPa, each layer has a thickness between 25-um and 300-um and each layer has a hardness between 30 Shore A and 90 Shore A; and

wherein performing the cleaning operation further comprises cleaning, using the functionalized microfeatures, an inner surface of the capillary tube.

2. The method of claim 1 , wherein performing a cleaning operation using the cleaning device further comprises using a polymer layer that is 10 to 100 um thick that has a predetermined specific gravity, elasticity, tackiness, planarity, thickness and porosity.

3. The method of claim 1 , wherein performing a cleaning operation using the cleaning device further comprises using a plurality of negative microfeature that extends downwards away from the top surface of the cleaning media.

4. The method of claim 1 , wherein performing the cleaning operation further comprising performing the cleaning operation of the capillary tube after a predetermined period of time.

5. The method of claim 1 , wherein performing the cleaning operation further comprising performing the cleaning operation of the capillary tube without removing the capillary tube from the wire bonding device.

6. The method of claim 5 further comprising resuming the wire bonding operation once the cleaning operation is completed.

Assignments (7)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 5, 2023
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: ENTEGRIS, INC.
Reel/Frame 065764/0493 →
SECURITY INTEREST Recorded Jul 8, 2022
From: CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060615/0001 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
RELEASE OF SECURITY INTEREST Recorded Jul 6, 2022
From: JPMORGAN CHASE BANK, N.A.
To: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.; KMG-BERNUTH, INC.; MPOWER SPECIALTY CHEMICALS LLC; SEALWELD (USA), INC.; INTERNATIONAL TEST SOLUTIONS, LLC; CMC MATERIALS, INC.
Reel/Frame 060592/0260 →
CHANGE OF NAME Recorded May 3, 2021
From: INTERNATIONAL TEST SOLUTIONS, INC.
To: INTERNATIONAL TEST SOLUTIONS, LLC
Reel/Frame 056121/0757 →
SECURITY AGREEMENT Recorded Apr 30, 2021
From: INTERNATIONAL TEST SOLUTIONS, LLC
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 056104/0979 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 22, 2020
From: HUMPHREY, ALAN E.; BROZ, JERRY J.; HUMPHREY, BRET A.; POLES, ALEX S.; SMITH, WAYNE C.; SHIVLAL, JANAKRAJ
To: INTERNATIONAL TEST SOLUTIONS, INC.
Reel/Frame 053280/0101 →