IP Library Granted Patent US 11,367,619
Granted Patent B2
US 11,367,619 · App. 16/861,910 · Granted Jun 21, 2022

Semiconductor package electrical contacts and related methods

Inventors: Yusheng Lin (Phoenix, AZ); Michael J. Seddon (Gilbert, AZ); Francis J. Carney (Mesa, AZ); Takashi Noma (Ota, JP); Eiji Kurose (Oizumi-machi, JP)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L21/302H01L21/48H01L21/561H01L21/565H01L21/78H01L23/12H01L23/3185H01L24/04H01L24/26H01L2224/94
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Quick Facts
Patent No.
US 11,367,619
App. No.
16/861,910
Granted
Jun 21, 2022
Kind
B2
Abstract

Implementations of a semiconductor package may include a semiconductor die including a first side and a second side, the first side of the semiconductor die including one or more electrical contacts; and an organic material covering at least the first side of the semiconductor die. Implementations may include where the one or more electrical contacts extend through one or more openings in the organic material; a metal-containing layer coupled to the one or more electrical contacts; and one or more slugs coupled to one of a first side of the semiconductor die, a second side of the semiconductor die, or both the first side of the semiconductor die and the second side of the semiconductor die.

Claims (22)

1. A method of forming a semiconductor package, comprising:

providing a semiconductor substrate comprising a plurality of semiconductor die, the semiconductor substrate comprising a first side and a second side;

forming one or more electrical contacts on the first side of the semiconductor die, the one or more electrical contacts coupled with the plurality of semiconductor die;

applying an organic material to the first side of the semiconductor die, wherein the one or more electrical contacts extend into one or more openings in the organic material;

leveling the organic material with a surface of the one or more electrical contacts; and

directly coupling one or more slugs to one or more of the one or more electrical contacts;

wherein the one or more slugs are coupled directly to a metal-containing layer comprised in the one or more electrical contacts, wherein the metal-containing layer comprises a solder resist material.

2. The method of claim 1 , wherein the one or more electrical contacts are coupled to a pad comprised in the plurality of semiconductor die.

3. The method of claim 1 , further comprising grooving a surface of the semiconductor substrate at a plurality of die streets between the plurality of semiconductor die.

4. The method of claim 1 , further comprising forming a backmetal on the second side of the semiconductor substrate.

5. The method of claim 4 , further comprising directly coupling the one or more slugs to the backmetal.

6. The method of claim 1 , further comprising thinning the semiconductor substrate to a thickness of 0.1 microns to 125 microns.

7. The method of claim 1 , wherein the plurality of electrical contacts are one of bumps or studs that extend above the organic material and wherein the one or more slugs are directly coupled with the second side of the semiconductor substrate.

8. A method of forming a semiconductor package, comprising:

providing a semiconductor substrate comprising a plurality of semiconductor die, the semiconductor substrate comprising a first side and a second side;

forming one or more electrical contacts on the first side of the semiconductor die by forming at least a portion of the one or more electrical contacts to a predetermined height, the one or more electrical contacts coupled with the plurality of semiconductor die;

applying an organic material to the first side of the semiconductor die, wherein the one or more electrical contacts extend into one or more openings in the organic material; and

leveling the organic material with a surface of the one or more electrical contacts;

wherein the predetermined height of the formed portion of the one or more electrical contacts reduces warpage of the semiconductor package to below 200 microns.

9. The method of claim 8 , wherein forming the one or more electrical contacts comprises electroplating.

10. The method of claim 8 , wherein forming the plurality of electrical contacts comprises evaporating, sputtering, soldering, screen printing, silver sintering and any combination thereof.

11. The method of claim 8 , wherein the organic material is a mold compound.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS PREVIOUSLY RECORDED AT REEL 053613, FRAME 0621 Recorded Aug 17, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064618/0942 →
SECURITY INTEREST Recorded Aug 27, 2020
From: FAIRCHILD SEMICONDUCTOR CORPORATION; SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 053613/0621 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 29, 2020
From: LIN, YUSHENG; SEDDON, MICHAEL J.; CARNEY, FRANCIS J.; NOMA, TAKASHI; KUROSE, EIJI
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 052527/0447 →
Continuity (4)
Continuation In Part 16702958 · Dec 4, 2019
Division 15679661 · Aug 17, 2017
Continuation In Part 15921898 · Mar 15, 2018
Related Publication 20200258752A1 · Aug 13, 2020