Copper interconnect structure with manganese barrier layer
Low capacitance and high reliability interconnect structures and methods of manufacture are disclosed. The method includes forming a copper based interconnect structure in an opening of a dielectric material. The method further includes forming a capping layer on the copper based interconnect structure. The method further includes oxidizing the capping layer and any residual material formed on a surface of the dielectric material. The method further includes forming a barrier layer on the capping layer by outdiffusing a material from the copper based interconnect structure to a surface of the capping layer. The method further includes removing the residual material, while the barrier layer on the surface of the capping layer protects the capping layer.
1. An interconnect structure comprising:
a copper-based interconnect structure formed in a dielectric layer;
a metallic capping layer disposed on the copper-based interconnect structure; and
a first manganese- and oxygen-containing barrier layer disposed on the metallic capping layer.
2. The interconnect structure of claim 1 , wherein the metallic capping layer is not disposed on the dielectric layer.
3. The interconnect structure of claim 1 , wherein the metallic capping layer comprises cobalt.
4. The interconnect structure of claim 1 , wherein the copper-based interconnect structure comprises a tantalum-nitride barrier layer adjacent to the dielectric layer.
5. The interconnect structure of claim 4 , wherein the copper-based interconnect structure further comprises a copper layer disposed on the tantalum-nitride barrier layer.
6. The interconnect structure of claim 1 , wherein the copper-based interconnect structure comprises a cobalt layer.
7. The interconnect structure of claim 6 , wherein the copper-based interconnect structure further comprises a copper layer disposed on the cobalt layer.
8. The interconnect structure of claim 1 , further comprising a second manganese-containing barrier layer between the copper-based interconnect structure and the dielectric layer.
9. The interconnect structure of claim 1 , wherein the metallic capping layer comprises ruthenium.
10. The interconnect structure of claim 1 , wherein the metallic capping layer comprises nickel.
11. An interconnect structure comprising:
a dielectric layer having an upper surface;
a copper-based interconnect structure formed in the dielectric layer;
a capping layer in contact with an upper surface of the copper-based interconnect structure; and
a self-aligned barrier layer comprising manganese and oxygen covering surfaces of the capping layer that are disposed above a level of the upper surface of the dielectric layer.
12. The interconnect structure of claim 11 , wherein the capping layer is not disposed on the dielectric layer.
13. The interconnect structure of claim 11 , wherein the capping layer comprises cobalt.
14. The interconnect structure of claim 11 , wherein the copper-based interconnect structure comprises a tantalum-nitride barrier layer.
15. The interconnect structure of claim 14 , wherein the copper-based interconnect structure further comprises a copper layer disposed on the tantalum-nitride barrier layer.
16. The interconnect structure of claim 11 , wherein the copper-based interconnect structure comprises a cobalt layer.
17. The interconnect structure of claim 16 , wherein the copper-based interconnect structure further comprises a copper layer disposed on the cobalt layer.
18. The interconnect structure of claim 11 , further comprising a second manganese-containing barrier layer between the copper-based interconnect structure and the dielectric layer.
19. The interconnect structure of claim 11 , wherein the capping layer comprises ruthenium.
20. The interconnect structure of claim 11 , wherein the self-aligned barrier layer further comprises silicon.