IP Library Granted Patent US 11,114,464
Granted Patent B2
US 11,114,464 · App. 17/063,397 · Granted Sep 7, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Jin-Woo Han (San Jose, CA)
Assignee: MONOLITHIC 3D INC.
H01L27/11582H01L23/5283H01L27/0207H01L27/11565H01L27/11578H01L29/167H01L29/47H01L29/7827H01L29/792H01L27/11514H01L27/11519H01L27/11551
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Quick Facts
Patent No.
US 11,114,464
App. No.
17/063,397
Filed
Oct 5, 2020
Granted
Sep 7, 2021
Kind
B2
Art Unit
2824
USPC
257/324
Abstract

A 3D device, the device including: a first level including logic circuits; a second level including a plurality of dynamic memory cells; and a third level including a plurality of non-volatile memory cells, where the first level is bonded to the second level, and where the device includes refresh circuits to refresh the dynamic memory cells.

Claims (69)

1. A 3D device, the device comprising:

a first level comprising logic circuits;

a second level comprising a plurality of volatile memory cells; and

a third level comprising a plurality of non-volatile memory cells,

wherein said first level is bonded to said second level.

2. The 3D device of claim 1 ,

wherein said third level comprises a NAND type memory array.

3. The 3D device of claim 1 ,

wherein said second level comprises a Random Access Memory (“RAM”) array or a NOR type memory array.

4. The 3D device of claim 1 , further comprising:

a first memory cell; and

a second memory cell,

wherein said second memory cell is overlaying said first memory cell, and

wherein said first memory cell is self-aligned to said second memory cell, being processed following a same lithography step.

5. The 3D device of claim 1 , further comprising:

a fourth level,

wherein said fourth level comprises memory control circuits.

6. The 3D device of claim 1 ,

wherein said second level comprises an array of at least four by four units,

wherein each of said units comprises an array of memory cells, and

wherein each of said units is independently controlled.

7. The 3D device of claim 1 ,

wherein said third level comprises charge trap type memory cells.

8. A 3D device, the device comprising:

a first level comprising logic circuits;

a second level comprising a plurality of dynamic memory cells; and

a third level comprising a plurality of non-volatile memory cells,

wherein said first level is bonded to said second level, and

wherein said device comprises refresh circuits to refresh said dynamic memory cells.

9. The 3D device of claim 8 ,

wherein said third level comprises a NAND type memory array.

10. The 3D device of claim 8 ,

wherein said second level comprises a Random Access Memory (“RAM”) array or a NOR type memory array.

11. The 3D device of claim 8 , further comprising:

a first memory cell; and

a second memory cell,

wherein said second memory cell is overlaying said first memory cell, and

wherein said first memory cell is self-aligned to said second memory cell, being processed following a same lithography step.

12. The 3D device of claim 8 , further comprising:

a fourth level,

wherein said fourth level comprises memory control circuits.

13. The 3D device of claim 8 ,

wherein said second level comprises an array of at least four by four units,

wherein each of said units comprises an array of memory cells, and

wherein each of said units is independently controlled.

14. The 3D device of claim 8 ,

wherein said third level comprises charge trap type memory cells.

15. A 3D device, the device comprising:

a first level comprising logic circuits;

a second level comprising a plurality of high speed memory cells; and

a third level comprising a plurality of high density memory cells,

wherein said first level is bonded to said second level, and

wherein said device comprises control circuits to store more than one bit per cell in said high density memory cells.

16. The 3D device of claim 15 ,

wherein said third level comprises a NAND type memory array.

17. The 3D device of claim 15 ,

wherein said second level comprises a Random Access Memory (“RAM”) array or a NOR type memory array.

18. The 3D device of claim 15 , further comprising:

a first memory cell; and

a second memory cell,

wherein said second memory cell is overlaying said first memory cell, and

wherein said first memory cell is self-aligned to said second memory cell, being processed following a same lithography step.

19. The 3D device of claim 15 , further comprising:

a fourth level,

wherein said fourth level comprises memory control circuits.

20. The 3D device of claim 15 ,

wherein said second level comprises an array of at least four by four units,

wherein each of said units comprises an array of memory cells, and

wherein each of said units is independently controlled.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2020
From: OR-BACH, ZVI; HAN, JIN-WOO
To: MONOLITHIC 3D INC.
Reel/Frame 054022/0758 →
Continuity (10)
Continuation In Part 16526763 · Jul 30, 2019
Continuation In Part 15990611 · May 26, 2018
Continuation 15333138 · Oct 24, 2016
Provisional Application 62307568 · Mar 14, 2016
Provisional Application 62286362 · Jan 23, 2016
Provisional Application 62276953 · Jan 10, 2016
Provisional Application 62271251 · Dec 27, 2015
Provisional Application 62266610 · Dec 12, 2015
Provisional Application 62246054 · Oct 24, 2015
Related Publication 20210050369A1 · Feb 18, 2021