IP Library Granted Patent US 10,950,599
Granted Patent B1
US 10,950,599 · App. 17/064,504 · Granted Mar 16, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Brian Cronquist (Klamath Falls, OR)
Assignee: MONOLITHIC 3D INC.
H01L27/0688H01L24/08H01L2224/08145
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Quick Facts
Patent No.
US 10,950,599
App. No.
17/064,504
Filed
Oct 6, 2020
Granted
Mar 16, 2021
Kind
B1
Examiner
HO, TU TU V
Art Unit
2818
USPC
257/686
Abstract

A 3D semiconductor device, the device comprising: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions, wherein said second level comprises at least one memory array, wherein said third layer comprises crystalline silicon, and wherein said second level comprises at least one SerDes circuit.

Claims (94)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area,

wherein said first die area is clearly larger than said second die area, and

wherein said third layer comprises crystalline silicon.

2. The device according to claim 1 ,

wherein said second level comprises at least one PLL circuit.

3. The device according to claim 1 ,

wherein said second level comprises at least one SerDes circuit.

4. The device according to claim 1 , further comprising:

a heat removal path from said third layer to an external surface of said device.

5. The device according to claim 1 ,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

6. The device according to claim 1 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said at least one memory array.

7. The device according to claim 1 ,

wherein at least one of said second transistors is a FinFET type transistor.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections;

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array, and

wherein said third layer comprises crystalline silicon; and

a heat removal path from said third layer to an external surface of said device.

9. The device according to claim 8 ,

wherein said second level comprises at least one PLL circuit.

10. The device according to claim 8 ,

wherein said second level comprises at least one SerDes circuit.

11. The device according to claim 8 ,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area, and

wherein said first die area is clearly larger than said second die area.

12. The device according to claim 8 ,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

13. The device according to claim 8 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said memory array.

14. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

15. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said third layer comprises crystalline silicon, and

wherein said second level comprises at least one SerDes circuit.

16. The device according to claim 15 , further comprising:

a heat removal path from said third layer to an external surface of said device.

17. The device according to claim 15 ,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area,

wherein said first die area is clearly larger than said second die area.

18. The device according to claim 15 ,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

19. The device according to claim 15 ,

wherein said first level comprises at least one control circuit, and

wherein said control circuit controls read operations of said memory array.

20. The device according to claim 15 ,

wherein at least one of said second transistors is a FinFET type transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 17, 2020
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 054682/0217 →
Continuity (11)
Continuation In Part 16846298 · Apr 11, 2020
Continuation In Part 16252825 · Jan 21, 2019
Continuation In Part 15990626 · May 26, 2018
Continuation In Part 15482787 · Apr 9, 2017
Continuation In Part 15477106 · Apr 2, 2017
Continuation In Part 14642724 · Mar 9, 2015
Continuation In Part 14607077 · Jan 28, 2015
Provisional Application 62042229 · Aug 26, 2014
Provisional Application 62035565 · Aug 11, 2014
Provisional Application 62022498 · Jul 9, 2014
Provisional Application 61932617 · Jan 28, 2014
Cited By (1)
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