Semiconductor device and method for forming the same
A plasma enhanced chemical vapor deposition (PECVD) method includes loading a wafer having a magnetic layer thereon into a processing chamber equipped with a radio frequency (RF) system, introducing an aromatic hydrocarbon precursor into the processing chamber, and turning on an RF source of the RF system to decompose the aromatic hydrocarbon precursor into active radicals at a frequency greater than about 1000 Hz to form a graphene layer over the magnetic layer.
1. A plasma enhanced chemical vapor deposition (PECVD) method, comprising:
loading a wafer having a magnetic layer thereon into a processing chamber equipped with a radio frequency (RF) system, the RF system connected to an inductive coil winding in a multiple-turn cylindrical configuration around a portion of the processing chamber, the inductive coil surpassing a length of the wafer in an axial extension direction of the inductive coil, wherein loading the wafer is performed such that the wafer is within the portion of the processing chamber wound by the inductive coil, and the inductive coil directly surrounds the wafer, the wafer has a substrate, a first dielectric layer over the substrate, a metal contact in the first dielectric layer, and a second dielectric layer over the metal contact and having a trench exposing the metal contact, and the magnetic layer is conformally formed over the second dielectric layer and the metal contact exposed from the trench of the second dielectric layer;
introducing an aromatic hydrocarbon precursor into the processing chamber; and
turning on an RF source of the RF system to decompose the aromatic hydrocarbon precursor into active radicals at a frequency greater than about 1000 Hz to form a graphene layer over the magnetic layer, wherein turning on the RF source of the RF system heats the magnetic layer.
2. The method of claim 1 , wherein the frequency of the RF source is greater than about 300 kHz.
3. The method of claim 1 , wherein the magnetic layer comprises at least one of cobalt, nickel, or iron.
4. The method of claim 1 , wherein the magnetic layer has a permeability coefficient greater than about 5×10 −5 (H/m).
5. The method of claim 1 , wherein the magnetic layer has a hysteresis coefficient greater than about 300 (A/m).
6. The method of claim 1 , wherein turning on the RF source of the RF system is performed at a time duration of less than about 60 seconds.
7. The method of claim 1 , further comprising:
performing an H 2 plasma treatment on the wafer to clean the magnetic layer after loading the wafer and prior to introducing the aromatic hydrocarbon precursor, wherein the turning on the RF source of the RF system is performed at a time duration shorter than a time duration of performing the H 2 plasma treatment.
8. The method of claim 1 , wherein turning on the RF source of the RF system is performed such that an ambient temperature inside the processing chamber is less than about 300° C.
9. A plasma enhanced chemical vapor deposition (PECVD) method, comprising:
loading a wafer having a magnetic layer thereon into a processing chamber equipped with a radio frequency (RF) system, the RF system connected to an inductive coil winding in a multiple-turn cylindrical configuration around a portion of the processing chamber, wherein loading the wafer allows a maximum dimension of the wafer for being in parallel with an axial extension direction of the inductive coil, and wherein the wafer has a transistor, a source/drain contact over a source/drain region of the transistor, and a dielectric layer over the source/drain contact and having a trench exposing the source/drain contact, and the magnetic layer is conformally formed over the dielectric layer and the source/drain contact exposed from the trench of the dielectric layer;
introducing a first aromatic hydrocarbon precursor into the processing chamber;
turning on an RF source of the RF system to decompose the first aromatic hydrocarbon precursor into first active radicals at a first frequency greater than about 1000 Hz to form a first graphene layer over the magnetic layer; and
forming a conductive material over the first graphene layer and in the trench of the dielectric layer.
10. The method of claim 9 , wherein the inductive coil surpasses the maximum dimension of the wafer.
11. The method of claim 9 , wherein loading the wafer is performed such that the wafer is within the portion of the processing chamber wound by the inductive coil, and the inductive coil directly surrounds the wafer.
12. The method of claim 9 , wherein the step of turning on the RF source of the RF system is performed such that an ambient temperature inside the processing chamber is less than about 300° C.
13. A plasma enhanced chemical vapor deposition (PECVD) method, comprising:
loading a wafer having a magnetic layer thereon into a processing chamber equipped with a radio frequency (RF) system, wherein the wafer has a substrate, a first dielectric layer over the substrate, a metal contact in the first dielectric layer, and a second dielectric layer over the metal contact and having a trench exposing the metal contact, and the magnetic layer is conformally formed over the second dielectric layer and the metal contact exposed from the trench of the second dielectric layer;
introducing an aromatic hydrocarbon precursor into the processing chamber;
turning on an RF source of the RF system to decompose the aromatic hydrocarbon precursor into active radicals at a frequency greater than about 1000 Hz to form a first graphene layer over the magnetic layer; and
after forming the first graphene layer, forming a metal layer over the first graphene layer, such that the first graphene layer is sandwiched between the magnetic layer and the metal layer.
14. The method of claim 13 , wherein the RF system is connected to an inductive coil winding in a multiple-turn cylindrical configuration around a portion of the processing chamber, and loading the wafer is performed such that the wafer is within the portion of the processing chamber wound by the inductive coil, and the inductive coil directly surrounds the wafer.
15. The method of claim 14 , wherein the inductive coil surpasses a length of the wafer in an axial extension direction of the inductive coil.
16. The method of claim 13 , wherein the magnetic layer has a greater hysteresis coefficient than the metal layer.
17. The method of claim 1 , further comprising:
depositing a copper layer over the graphene layer.
18. The method of claim 9 , further comprising:
performing a chemical mechanical polishing process on the conductive material until the dielectric layer is exposed to form a filling metal in the trench;
introducing a second aromatic hydrocarbon precursor into the processing chamber; and
turning on the RF source of the RF system to decompose the second aromatic hydrocarbon precursor into second active radicals at a second frequency greater than about 1000 Hz to form a second graphene layer over the filling metal.
19. The method of claim 13 , wherein the metal layer comprises copper, tungsten, ruthenium, or combinations thereof.
20. The method of claim 13 , wherein the frequency of the RF source is greater than about 300 kHz.