Coated underlayer for overcoated photoresist
A method of forming a pattern, the method comprising applying a layer of a coating composition over a substrate; curing the applied coating composition to form a coated underlayer; and forming a photoresist layer over the coated underlayer, wherein the coating composition comprises a first material comprising two or more hydroxy groups; a second material comprising two or more glycidyl groups; an additive comprising a protected amino group; and a solvent.
1. A method of forming a pattern, the method comprising:
applying a layer of a coating composition over a substrate, further comprising a layer disposed between the coating composition and the substrate;
curing the applied coating composition to form a coated underlayer; and
forming a photoresist layer over the coated underlayer,
wherein the coating composition comprises:
a first material, comprising two or more hydroxy groups;
25 to 75 wt % of a second material, comprising two or more glycidyl groups, based on total solids content of the coating composition;
an additive; and
a solvent,
wherein the additive comprises a compound represented by formula (4), a polymer comprising a repeating unit derived from a monomer of formula (5), or a combination thereof:
wherein, in formulae (4) and (5),
X is C or S, wherein when X is C, then p is 1, and when X is S, then p is 2;
Z 1 , Z 2 , L 1 , and L 2 are each independently a single bond or a divalent linking group;
R 1 , R 2 , and R 4 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl;
optionally, R 1 and R 2 together form a non-aromatic ring via a divalent linking group;
R 3 and R 5 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, substituted or unsubstituted C 2-30 alkylheteroaryl, —OR 4b , or —N(R 4c ) (R 4d ), wherein R 4b to R 4d are each independently hydrogen, substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 2-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, or substituted or unsubstituted C 2-30 heteroarylalkyl;
optionally, L 1 and R 4 together form a ring via a divalent linking group; and
P is a polymerizable group.
2. The method of claim 1 , further comprising forming a silicon-containing layer, an organic antireflective coating layer, or a combination thereof, over the coated underlayer prior to forming the photoresist layer.
3. The method of claim 1 , further comprising:
patterning the photoresist layer; and
transferring a pattern from the patterned photoresist layer to the coated underlayer and to a layer below the coated underlayer.
4. The method of claim 3 , further comprising:
transferring a pattern to a silicon-containing layer, an organic antireflective coating layer, or a combination thereof, disposed over the coated underlayer, after developing an exposed photoresist layer and before the step transferring the pattern to the coated underlayer.
5. The method of claim 1 , wherein the additive comprises a compound of formula (4a) or (4b):
wherein, in formulae (4a) and (4b),
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl;
optionally, any two or more of R 6 , R 7 , and R 8 together form a ring;
A is a single bond, or substituted or unsubstituted C 1-2 alkylene;
each R k is independently halogen, hydroxy, carboxylic acid, thiol, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl, wherein R k optionally further comprises as part of its structure one or more of —O—, —C(O)—, —NR k1 —, —S—, —S(O)—, or —S(O) 2 —, wherein R k1 is substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 1-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 4-30 heteroaryl, substituted or unsubstituted C 5-30 heteroarylalkyl, or substituted or unsubstituted C 5-30 alkylheteroaryl;
n is an integer of 0 to 11; and
R 9 and R 10 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl.
6. The method of claim 1 , wherein the additive comprises a polymer comprising a repeating unit derived from a monomer of formula (5a):
wherein, in formula (5a),
R a is hydrogen, fluorine, substituted or unsubstituted C 1-5 alkyl, or substituted or unsubstituted C 1-5 fluoroalkyl;
L 1 is a divalent linking group;
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; and
optionally, any two or more of R 6 , R 7 , and R 8 form a ring together via a divalent linking group.
7. The method of claim 1 , wherein the additive comprises a polymer comprising a repeating unit derived from a monomer of formula (5b),
wherein, in formula (5b),
R a is hydrogen, fluorine, substituted or unsubstituted C 1-5 alkyl, or substituted or unsubstituted C 1-5 fluoroalkyl;
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl;
optionally, any two of R 6 , R 7 , and R 8 form a ring together via a divalent linking group;
A is a single bond or substituted or unsubstituted C 1-2 alkylene;
each R k is independently halogen, hydroxy, carboxylic acid, thiol, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl, wherein R k optionally further comprises one or more of —O—, —C(O)—, —NR k2 —, —S—, —S(O)—, or —S(O) 2 —, wherein R k2 is substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 1-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 4-30 heteroaryl, substituted or unsubstituted C 5-30 heteroarylalkyl, or substituted or unsubstituted C 5-30 alkylheteroaryl; and
n is an integer of 0 to 3.
8. The method of claim 1 , wherein the coating composition does not comprise a photoacid generator.
9. The method of claim 1 , wherein the patterning of the photoresist underlayer comprises exposing the photoresist layer to activating radiation at an exposure wavelength of 193 nm or an EUV wavelength.
10. A layered article, comprising:
a substrate;
a coated underlayer disposed over the substrate;
a layer disposed between the coated underlayer and the substrate; and
a photoresist layer disposed over the coated underlayer,
wherein the coated underlayer is derived from a coating composition comprising:
a first material comprising two or more hydroxy groups;
25 to 75 wt % of a second material comprising two or more glycidyl groups, based on total solids content of the coating composition;
an additive; and
a solvent,
wherein the additive comprises a compound represented by formula (4), a polymer comprising a repeating unit derived from a monomer of formula (5), or a combination thereof:
wherein, in formulae (4) and (5),
X is C or S, wherein when X is C, then p is 1, and when X is S, then p is 2;
Z 1 , Z 2 , L 1 , and L 2 are each independently a single bond or a divalent linking group;
R 1 , R 2 , and R 4 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl;
optionally, R 1 and R 2 together form a non-aromatic ring via a divalent linking group;
R 3 and R 5 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, substituted or unsubstituted C 2-30 alkylheteroaryl, —OR 4b or —N(R 4c ) (R 4d ), wherein R 4b to R 4d are each independently hydrogen, substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 2-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, or substituted or unsubstituted C 2-30 heteroarylalkyl;
optionally, L 1 and R 4 together form a ring via a divalent linking group; and
P is a polymerizable group.
11. The layered article of claim 10 , wherein the additive comprises a compound of formula (4a) or (4b):
wherein, in formulae (4a) and (4b),
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl;
optionally, any two or more of R 6 , R 7 , and R 8 together form a ring;
A is a single bond, or substituted or unsubstituted C 1-2 alkylene;
each R k is independently halogen, hydroxy, carboxylic acid, thiol, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl, wherein R k optionally further comprises as part of its structure one or more of —O—, —C(O)—, —NR k1 —, —S—, —S(O)—, or —S(O) 2 —, wherein R k1 is substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 1-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 4-30 heteroaryl, substituted or unsubstituted C 5-30 heteroarylalkyl, or substituted or unsubstituted C 5-30 alkylheteroaryl;
n is an integer of 0 to 11; and
R 9 and R 10 are each independently hydrogen, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl.
12. The layered article of claim 10 , wherein the additive comprises a polymer comprising a repeating unit derived from a monomer of formula (5a):
wherein, in formula (5a),
R a is hydrogen, fluorine, substituted or unsubstituted C 1-5 alkyl, or substituted or unsubstituted C 1-5 fluoroalkyl;
L 1 is a divalent linking group;
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; and
optionally, any two or more of R 6 , R 7 , and R 8 form a ring together via a divalent linking group.
13. The layered article of claim 10 , wherein the additive comprises a polymer comprising a repeating unit derived from a monomer of formula (5b),
wherein, in formula (5b),
R a is hydrogen, fluorine, substituted or unsubstituted C 1-5 alkyl, or substituted or unsubstituted C 1-5 fluoroalkyl;
R 6 , R 7 , and R 8 are each independently substituted or unsubstituted C 1-20 alkyl, substituted or unsubstituted C 3-20 cycloalkyl, substituted or unsubstituted C 3-20 heterocycloalkyl, substituted or unsubstituted C 2-20 alkenyl, substituted or unsubstituted C 3-20 cycloalkenyl, substituted or unsubstituted C 3-20 heterocycloalkenyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl;
optionally, any two of R 6 , R 7 , and R 8 form a ring together via a divalent linking group;
A is a single bond or substituted or unsubstituted C 1-2 alkylene;
each R k is independently halogen, hydroxy, carboxylic acid, thiol, substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 1-30 heteroalkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 2-30 heterocycloalkyl, substituted or unsubstituted C 2-30 alkenyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 1-30 heteroaryl, substituted or unsubstituted C 2-30 heteroarylalkyl, or substituted or unsubstituted C 2-30 alkylheteroaryl, wherein R k optionally further comprises one or more of —O—, —C(O)—, —NR k2 —, —S—, —S(O)—, or —S(O) 2 —, wherein R k2 is substituted or unsubstituted C 1-30 alkyl, substituted or unsubstituted C 3-30 cycloalkyl, substituted or unsubstituted C 1-20 heterocycloalkyl, substituted or unsubstituted C 6-30 aryl, substituted or unsubstituted C 7-30 arylalkyl, substituted or unsubstituted C 7-30 alkylaryl, substituted or unsubstituted C 4-30 heteroaryl, substituted or unsubstituted C 5-30 heteroarylalkyl, or substituted or unsubstituted C 5-30 alkylheteroaryl; and
n is an integer of 0 to 3.
14. The layered article of claim 10 , wherein the coating composition does not comprise a photoacid generator.
15. The layered article of claim 10 , further comprising a silicon-containing layer, an organic antireflective coating layer, or a combination thereof,
wherein the silicon-containing layer, the organic antireflective coating layer, or the combination thereof is disposed between the coated underlayer and the photoresist layer.
16. An electronic device fabricated from the layered article of claim 10 .