Contact structures in semiconductor devices
The present disclosure describes a semiconductor device and a method for forming the semiconductor device. The method includes forming a fin structure on a substrate, forming a gate structure on the fin structure, and forming a source/drain (S/D) region on the fin structure not covered by the gate structure. The method further includes forming a contact structure on the S/D region. Forming the contact structure includes forming a transition metal chalcogenide (TMC) layer on the S/D region, and forming a contact plug on the TMC layer.
1. A method, comprising:
forming a fin structure on a substrate;
forming a gate structure on the fin structure;
forming a source/drain (S/D) region on the fin structure not covered by the gate structure; and
forming a contact structure on the S/D region, wherein forming the contact structure comprises:
forming a liner layer on the S/D region;
forming, after etching a portion of the liner layer from a top surface of the S/D region, a transition metal chalcogenide (TMC) layer comprising a bottom surface in contact with the top surface of the S/D region and a first sidewall in contact with a first portion of the liner layer; and
forming a contact plug comprising a bottom surface in contact with a top surface of the TMC layer and a second sidewall in contact with a second portion of the liner layer.
2. The method of claim 1 , wherein a ratio between a thickness of the TMC layer and a length of the TMC layer along the fin structure is between about 0.017:1 and about 0.3:1.
3. The method of claim 1 , wherein forming the TMC layer comprises:
depositing a layer of chalcogen material on the S/D region at a temperature between about 300° C. and about 800° C. with a plasma process or between about 500° C. and about 1100° C. without a plasma process; and
depositing a layer of transition metal on the layer of chalcogen material at a temperature between about 300° C. and about 800° C. with a plasma process or between about 500° C. and about 1100° C. without a plasma process.
4. The method of claim 1 , wherein forming the TMC layer comprises:
depositing a layer of chalcogen material on the S/D region; and
depositing a layer of transition metal on the layer of chalcogen material.
5. The method of claim 1 , wherein forming the TMC layer comprises:
forming a contact opening on the S/D region;
depositing a layer of chalcogen material on the S/D region without depositing on sidewalls of the contact opening; and
depositing a layer of transition metal on the layer of chalcogen material without depositing on sidewalls of the contact opening.
6. The method of claim 1 , wherein forming the TMC layer comprises selectively depositing a layer of sulfur, selenium, or tellurium on the S/D region.
7. The method of claim 1 , wherein forming the TMC layer comprises selectively forming a layer of sulfide, selenide, or telluride on the S/D region.
8. The method of claim 1 , wherein a ratio between a thickness of the TMC layer and a thickness of the liner layer is between about 1:1 and about 2:1.
9. The method of claim 1 , wherein forming the liner layer comprises forming a layer of transition metal chalcogenide material.
10. The method of claim 1 , wherein forming the liner layer comprises forming a layer of tungsten sulfide, tungsten selenide, molybdenum sulfide, molybdenum selenide, or combinations thereof.
11. A method, comprising:
forming a source/drain (S/D) region on a substrate;
forming a gate structure on the substrate;
depositing a dielectric layer on the S/D region;
forming a contact opening in the dielectric layer to expose a top surface of the S/D region;
forming a liner layer in the contact opening and on sidewalls of the dielectric layer;
depositing, after removing a portion of the liner layer from the top surface of the S/D region, a chalcogen material layer on the top surface of the S/D region;
depositing a metal layer on the chalcogen material layer; and
forming a contact plug in the contact opening and on the liner layer.
12. The method of claim 11 , wherein forming the liner layer comprises forming a layer of transition metal chalcogenide material.
13. The method of claim 11 , wherein depositing the metal layer comprises depositing a layer of transition metal at a temperature between about 300° C. and about 800° C. with a plasma process.
14. The method of claim 11 , wherein forming the liner layer comprises:
depositing a transition metal layer on the top surface of the S/D region and on the sidewalls of the dielectric layer in the contact opening prior to depositing the chalcogen material layer; and
exposing the transition metal layer to a chalcogen-based gas to form a transition metal chalcogenide layer on the top surface of the S/D region and on the sidewalls of the dielectric layer in the contact opening.
15. The method of claim 14 , further comprising etching a portion of the transition metal chalcogenide layer on the top surface of the S/D region.
16. A method, comprising:
forming first and second fin structures on a substrate;
forming a gate structure on the substrate;
forming a source/drain (S/D) region on the first and second fin structures;
depositing a dielectric layer on the S/D region;
forming an opening in the dielectric layer;
forming a first transition metal chalcogenide (TMC) layer on a sidewall of the dielectric layer in the opening and on a top surface of the S/D region in the opening;
removing a portion of the first TMC layer from the top surface of the S/D region;
forming a second TMC layer on the top surface of the S/D region and in contact with the first TMC layer; and
forming a contact plug on the first and second TMC layers.
17. The method of claim 16 , wherein forming the first TMC layer comprises depositing a transition metal layer on the sidewall of the dielectric layer.
18. The method of claim 16 , wherein forming the first TMC layer comprises forming a layer of sulfide, selenide, or telluride on the sidewall of the dielectric layer.
19. The method of claim 16 , wherein forming the second TMC layer comprises:
depositing a chalcogen material layer on the top surface of the S/D region; and
depositing a transition metal layer on the chalcogen material layer.
20. The method of claim 11 , further comprising performing a plasma treatment with a hydrogen gas on the metal layer.