Acoustic filters with shared acoustic tracks for series and shunt resonators
Acoustic filters devices and methods of making the same. A filter device includes a first plurality of acoustic resonators including at least one first series resonator and at least one first shunt resonator. The at least one first series resonator and the at least one first shunt resonator are acoustically coupled along a first shared acoustic track.
1. A filter device comprising:
a first plurality of acoustic resonators comprising:
at least one first series resonator;
at least one first shunt resonator;
a piezoelectric plate comprising a first diaphragm; and
a conductor pattern on the piezoelectric plate, the conductor pattern comprising a first plurality of interdigital transducers (IDTs) of respective IDTs of the at least one first series resonator and the at least one first shunt resonator, the first plurality of IDTs having interleaved fingers on the first diaphragm,
wherein the at least one first series resonator and the at least one first shunt resonator are acoustically coupled along a shared acoustic track; and
a second plurality of acoustic resonators comprising at least one second series resonator and at least one second shunt resonator,
wherein the piezoelectric plate comprises a second diaphragm, and
wherein the conductor pattern comprises a second plurality of IDTs of respective IDTs of the at least one second series resonator and the at least one second shunt resonators, with interleaved fingers of the second plurality of IDTs being on the second diaphragm.
2. The filter device of claim 1 , further comprising a third plurality of acoustic resonators comprising at least one third series resonator and at least one third shunt resonator, wherein the piezoelectric plate comprises a third diaphragm, and wherein the conductor pattern comprises a third plurality of IDTs of respective IDTs of the at least one third series resonator and the at least one third shunt resonators, interleaved fingers of the third plurality of IDTs on the third diaphragm.
3. The filter device of claim 2 , further comprising a fourth plurality of acoustic resonators comprising at least one fourth series resonator and at least one fourth shunt resonator, wherein the piezoelectric plate comprises a fourth diaphragm, and wherein the conductor pattern comprises a fourth plurality of IDTs of respective IDTs of the at least one fourth series resonator and the at least one fourth shunt resonators, interleaved fingers of the fourth plurality of IDTs on the fourth diaphragm.
4. The filter device of claim 3 , wherein the at least one first series resonator comprises one first series resonator and the at least one first shunt resonator comprises two first shunt resonators, wherein the at least one second series resonator comprises one second series resonator and the at least one second shunt resonator comprises two second shunt resonators, wherein the at least one third series resonator comprises one third series resonator and the at least one third shunt resonator comprises two third shunt resonators, and wherein the at least one fourth series resonator comprises one fourth series resonator and the at least one fourth shunt resonator comprises two fourth shunt resonators.
5. The filter device of claim 4 , wherein the one first series resonator is between the two first shunt resonators on the first diaphragm, wherein the one second series resonator is between the two second shunt resonators on the second diaphragm, wherein the one third series resonator is between the two third shunt resonators on the third diaphragm, and wherein the one fourth series resonator is between the two fourth shunt resonators on the fourth diaphragm.
6. The filter device of claim 1 , wherein the piezoelectric plate is lithium niobate.
7. A filter device comprising:
a first plurality of acoustic resonators comprising:
at least one first series resonator;
at least one first shunt resonator;
a piezoelectric plate comprising a first diaphragm; and
a conductor pattern on the piezoelectric plate, the conductor pattern comprising a first plurality of interdigital transducers (IDTs) of respective IDTs of the at least one first series resonator and the at least one first shunt resonator, the first plurality of IDTs having interleaved fingers on the first diaphragm,
wherein the at least one first series resonator and the at least one first shunt resonator are acoustically coupled along a shared acoustic track, and
wherein a primary shear acoustic mode is excited by respective IDTs of the first plurality of IDTs in the piezoelectric plate.
8. The filter device of claim 7 , wherein the shear primary acoustic mode is excited in response to a radio frequency signal applied to the respective IDTs.
9. A method of fabricating a filter device comprising:
forming a first plurality of acoustic resonators, wherein the forming the first plurality of acoustic resonators comprises:
forming at least one first series resonator;
forming at least one first shunt resonator; and
forming a conductor pattern on a piezoelectric plate that includes a first diaphragm,
wherein the conductor pattern comprises a first plurality of interdigital transducers (IDTs) of respective IDTs of the at least one first series resonator and the at least one first shunt resonator, the first plurality of IDTs having interleaved fingers on the first diaphragm, and
wherein the at least one first series resonator and the at least one first shunt resonator are acoustically coupled along a shared acoustic track
wherein the method further comprises forming a second plurality of acoustic resonators comprising at least one second series resonator and at least one second shunt resonator,
wherein the piezoelectric plate comprises a second diaphragm, and
wherein the conductor pattern comprises a second plurality of IDTs of respective IDTs of the at least one second series resonator and the at least one second shunt resonators, with interleaved fingers of the second plurality of IDTs being on the second diaphragm.
10. The method of claim 9 , further comprising forming a third plurality of acoustic resonators comprising at least one third series resonator and at least one third shunt resonator, wherein the piezoelectric plate comprises a third diaphragm, and wherein the conductor pattern comprises a third plurality of IDTs of respective IDTs of the at least one third series resonator and the at least one third shunt resonators, interleaved fingers of the third plurality of IDTs on the third diaphragm.
11. The method of claim 10 , further comprising forming a fourth plurality of acoustic resonators comprising at least one fourth series resonator and at least one fourth shunt resonator, wherein the piezoelectric plate comprises a fourth diaphragm, and wherein the conductor pattern comprises a fourth plurality of IDTs of respective IDTs of the at least one fourth series resonator and the at least one fourth shunt resonators, interleaved fingers of the fourth plurality of IDTs on the fourth diaphragm.
12. The method of claim 11 , wherein the at least one first series resonator comprises one first series resonator and the at least one first shunt resonator comprises two first shunt resonators, wherein the at least one second series resonator comprises one second series resonator and the at least one second shunt resonator comprises two second shunt resonators, wherein the at least one third series resonator comprises one third series resonator and the at least one third shunt resonator comprises two third shunt resonators, and wherein the at least one fourth series resonator comprises one fourth series resonator and the at least one fourth shunt resonator comprises two fourth shunt resonators.
13. The method of claim 12 , wherein the one first series resonator is between the two first shunt resonators on the first diaphragm, wherein the one second series resonator is between the two second shunt resonators on the second diaphragm, wherein the one third series resonator is between the two third shunt resonators on the third diaphragm, and wherein the one fourth series resonator is between the two fourth shunt resonators on the fourth diaphragm.
14. The method of claim 9 , wherein a primary shear acoustic mode is excited by respective IDTs of the first plurality of IDTs in the piezoelectric plate.
15. The method of claim 14 , wherein the shear primary acoustic mode is excited in response to a radio frequency signal applied to the respective IDTs.
16. The method of claim 9 , wherein the piezoelectric plate is lithium niobate.