IP Library › Granted Patent US 12,716,130
Granted Patent B2
US 12,716,130 · App. 17/622,357 · Granted Aug 25, 2026

Precursor source arrangement and atomic layer deposition apparatus

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Quick Facts
Patent No.
US 12,716,130
App. No.
17/622,357
Filed
Dec 23, 2021
Granted
Aug 25, 2026
Kind
B2
Art Unit
1718
USPC
118/726
Assignments (4)
CHANGE OF NAME Recorded Jul 28, 2022
From: HERVANNAN SAUNA OY
To: BENEQ OY
Reel/Frame 060649/0613 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2022
From: BENEQ GROUP OY
To: HERVANNAN SAUNA OY
Reel/Frame 060617/0577 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2022
From: BENEQ OY
To: BENEQ GROUP OY
Reel/Frame 060575/0505 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 12, 2022
From: AMINOFF, HULDA; SOININEN, PEKKA; SOININEN, PEKKA J.; MIIKKULAINEN, VILLE
To: BENEQ OY
Reel/Frame 058627/0131 →
Priority Claims (1)
FI 20195592 · Jun 28, 2019 · national
Continuity (1)
Related Publication 20220243320A1 · Aug 4, 2022
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