Patent Assignment
Reel/Frame 060649/0613
Change of Name
Recorded: 2022-07-28
Pages: 6
Assignor
HERVANNAN SAUNA OY
Executed: 2021-09-14
Assignee
BENEQ OY
OLARINLUOMA 9, ESPOO, 02200, FINLAND
Covered Properties
(29)
Apparatus for Processing Substrate Surface
Nozzle Head and Apparatus
Apparatus and Method
Apparatus, Method and Reaction Chamber
Apparatus for Processing Surface of Substrate and Nozzle Head
Apparatus and Method for Processing Substrate
Apparatus for Processing Two or More Substrates in a Batch Process
Atomic Layer Deposition Method for Coating a Substrate Surface Using Successive Surface Reactions with Multiple Precursors
Nozzle Head and Apparatus for Coating Substrate Surface
Apparatus and Method for Providing a Coating to a Surface of a Substrate
A Coating Precursor Nozzle and a Nozzle Head
An Apparatus and Method for Processing Particulate Matter
Method of Coating a Substrate and an Apparatus
Method for Coating a Substrate
Nozzle Head
Application:
16/755,706 →
Publication:
US 2021/0214847
Nozzle and Nozzle Head
Apparatus, Method and Reaction Chamber
Nozzle Head and Apparatus
Nozzle Head and Apparatus
Apparatus and Method
Application:
17/047,744 →
Publication:
US 2021/0164100
Gas Distribution Unit in Connection with Ald Reactor
Apparatus and Method for Atomic Layer Deposition (Ald)
Precursor Supply Cabinet
Precursor Supply Chamber
An Atomic Layer Deposition Apparatus
Application:
17/622,274 →
Publication:
US 2022/0259733
An Atomic Layer Deposition Apparatus
Precursor Source Arrangement and Atomic Layer Deposition Apparatus
Atomic Layer Deposition Apparatus
Application:
17/622,340 →
Publication:
US 2022/0205098
Precursor Source Arrangement and Atomic Layer Deposition Apparatus
Application:
17/622,357 →
Publication:
US 2022/0243320
Related Assignments
(18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 20, 2013
From: SOININEN, PEKKA; PEKONEN, OLLI
To: BENEQ OY
Reel/Frame 029845/0313 →
Assignment of Assignor's Interest
Mar 14, 2013
From: SOININEN, PEKKA; SNECK, SAMI
To: BENEQ OY
Reel/Frame 030023/0387 →
Assignment of Assignor's Interest
Apr 1, 2013
From: ALASAARELA, TAPANI; SOININEN, PEKKA
To: BENEQ OY
Reel/Frame 030129/0219 →
Assignment of Assignor's Interest
Aug 16, 2013
From: SODERLUND, MIKKO; SOININEN, PEKKA; MAULA, JARMO
To: BENEQ OY
Reel/Frame 031201/0064 →
Assignment of Assignor's Interest
Dec 5, 2014
From: JAUHIAINEN, MIKA; SOININEN, PEKKA
To: BENEQ OY
Reel/Frame 034390/0213 →
Assignment of Assignor's Interest
Aug 24, 2015
From: ENHOLM, ROBIN; KETO, LEIF; SOININEN, PEKKA
To: BENEQ OY
Reel/Frame 036400/0707 →
Assignment of Assignor's Interest
Sep 16, 2015
From: KETO, LEIF
To: BENEQ OY
Reel/Frame 036578/0913 →
Assignment of Assignor's Interest
Jan 21, 2016
From: ALASAARELA, TAPANI; SOININEN, PEKKA
To: BENEQ OY
Reel/Frame 037569/0552 →
Assignment of Assignor's Interest
Jun 7, 2017
From: SOININEN, PEKKA; PEKONEN, OLLI
To: BENEQ OY
Reel/Frame 042637/0286 →
Assignment of Assignor's Interest
Feb 9, 2018
From: KETO, LEIF
To: BENEQ OY
Reel/Frame 044879/0905 →
Assignment of Assignor's Interest
May 31, 2018
From: SOININEN, PEKKA T.
To: BENEQ OY
Reel/Frame 045948/0552 →
Assignment of Assignor's Interest
Dec 19, 2018
From: BOSUND, MARKUS; PELTONEN, RISTO
To: BENEQ OY
Reel/Frame 047813/0102 →
Assignment of Assignor's Interest
Dec 19, 2018
From: KETO, LEIF
To: BENEQ OY
Reel/Frame 047814/0318 →
Assignment of Assignor's Interest
Dec 19, 2018
From: SODERLUND, MIKKO; SOININEN, PEKKA; TIMONEN, PAAVO
To: BENEQ OY
Reel/Frame 047813/0713 →
Assignment of Assignor's Interest
Aug 14, 2020
From: SOININEN, PEKKA; JAUHIAINEN, MIKA
To: BENEQ OY
Reel/Frame 053495/0189 →
Assignment of Assignor's Interest
Aug 14, 2020
From: SOININEN, PEKKA; JAUHIAINEN, MIKA
To: BENEQ OY
Reel/Frame 053495/0332 →
Assignment of Assignor's Interest
Jul 21, 2022
From: BENEQ OY
To: BENEQ GROUP OY
Reel/Frame 060575/0505 →
Assignment of Assignor's Interest
Jul 26, 2022
From: BENEQ GROUP OY
To: HERVANNAN SAUNA OY
Reel/Frame 060617/0577 →