Granted Patent B2

US 12,260,050 · App. 17/822,116 · Granted Mar 25, 2025

Inventors: Leonardo Baldasarre (Varese, IT); Alessandro Colombo (Milan, IT); Federica Confalonieri (Carimate, IT); Marco Travagliati (Pavia, IT)

Assignee: TDK CORPORATION

G06F3/0436A61B8/4483B06B1/0207G06V40/1306A61B8/00B06B1/064

Abstract

Claims (48)

1. An ultrasonic transducer device comprising:

a substrate;

an edge support structure connected to the substrate; and

a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:

a structural layer;

a piezoelectric layer having a first surface and a second surface;

a first electrode placed on the first surface of the piezoelectric layer, wherein the first electrode is located at a center of the membrane;

a second electrode placed on the first surface of the piezoelectric layer, wherein the second electrode is a patterned electrode comprising more than one electrode components located at an edge of the membrane; and

a third electrode placed on the second surface of the piezoelectric layer;

wherein the first electrode and the second electrode are operable during a transmit operation and a receive operation, and wherein, during the receive operation, the first electrode and the second electrode operate to provide differential receiving and the third electrode is coupled to ground.

2. The ultrasonic transducer device of claim 1 , wherein, during the transmit operation, the first electrode and the second electrode are driven with waveforms having inverse potentials.

3. The ultrasonic transducer device of claim 1 , wherein, during the transmit operation, the first electrode and the second electrode are driven with waveforms having inverse potentials and the third electrode is coupled to ground.

4. The ultrasonic transducer device of claim 1 , wherein the first surface is at an opposite side of the cavity and the second surface overlies the cavity.

5. The ultrasonic transducer device of claim 4 , wherein the membrane further comprises:

a fourth electrode between the edge support structure and the substrate, wherein the fourth electrode is electrically coupled to ground.

6. The ultrasonic transducer device of claim 1 , wherein the first electrode and the second electrode each comprise a surface area to provide for capacitance matching between capacitance associated with the first electrode and capacitance associated with the second electrode.

7. The ultrasonic transducer device of claim 6 , wherein positions relative to the center of the membrane of the first electrode and the second electrode are optimized to provide amplitude and phase matching over a frequency range of interest.

8. An ultrasonic transducer device comprising:

a substrate;

an edge support structure connected to the substrate; and

a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:

a first piezoelectric layer having a first surface and a second surface;

a second piezoelectric layer having a first surface and a second surface, wherein the second surface of the first piezoelectric layer faces the first surface of the second piezoelectric layer;

a buffer layer between the first piezoelectric layer and the second piezoelectric layer, wherein the buffer layer has a thickness that tunes a frequency of operation of the ultrasonic transducer device to a desired frequency;

a first electrode placed on the first surface of the first piezoelectric layer;

a second electrode placed on the first surface of the second piezoelectric layer, such that the second electrode is disposed between the second piezoelectric layer and the buffer layer, and such that the first electrode and second electrode are on opposite sides of a neutral axis of the ultrasonic transducer device; and

a third electrode placed on the second surface of the first piezoelectric layer, such that the third electrode is disposed between the first piezoelectric layer and the buffer layer;

wherein, during a receive operation, the first electrode and the second electrode operate to provide differential receiving and the third electrode is electrically coupled to ground.

9. The ultrasonic transducer device of claim 8 , wherein the membrane further comprises:

a fourth electrode placed on the second surface of the second piezoelectric layer and electrically coupled to ground.

10. The ultrasonic transducer device of claim 8 , wherein the first surface of the first piezoelectric layer overlies the cavity.

11. The ultrasonic transducer device of claim 8 , wherein, during a transmit operation, the first electrode and the second electrode are driven with waveforms having inverse potentials.

12. The ultrasonic transducer device of claim 8 , wherein, during a transmit operation, the first electrode and the second electrode are driven with waveforms having inverse potentials and the third electrode is electrically coupled to ground.

13. The ultrasonic transducer device of claim 8 , wherein the first electrode is a patterned electrode comprising more than one electrode components that are electrically coupled.

14. The ultrasonic transducer device of claim 8 , wherein the second electrode is a patterned electrode comprising more than one electrode components that are electrically coupled.

15. The ultrasonic transducer device of claim 8 , wherein the first electrode, the second electrode and the third electrode each comprise a surface area to provide for capacitance matching between capacitance associated with the first electrode and capacitance associated with the second electrode.

16. The ultrasonic transducer device of claim 15 , wherein a position relative to the center of the membrane of the first electrode is optimized to provide amplitude and phase matching over a frequency range of interest.

17. The ultrasonic transducer device of claim 15 , wherein a position relative to the center of the membrane of the second electrode is optimized to provide amplitude and phase matching over a frequency range of interest.

18. An ultrasonic transducer device comprising:

a substrate;

a support structure connected to the substrate; and

a membrane connected to the support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:

a first piezoelectric layer having a first surface and a second surface;

a second piezoelectric layer having a first surface and a second surface, wherein the second surface of the first piezoelectric layer faces the first surface of the second piezoelectric layer;

a buffer layer between the first piezoelectric layer and the second piezoelectric layer, wherein the buffer layer has a thickness that tunes a frequency of operation of the ultrasonic transducer device to a desired frequency;

a first electrode placed on the first surface of the first piezoelectric layer, wherein the first electrode is located at a region of maximum strain of the membrane;

a second electrode placed on the first surface of the second piezoelectric layer, wherein the second electrode is a patterned electrode comprising more than one electrode components located proximate to the support structure of the membrane, such that the second electrode is disposed between the second piezoelectric layer and the buffer layer; and

a third electrode placed on the second surface of the first piezoelectric layer, such that the third electrode is disposed between the first piezoelectric layer and the buffer layer.

Assignments (3)

Continuity (2)

References Cited (400)