Nonvolatile memory device and method for fabricating the same
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
1 . A three-dimensional semiconductor memory device, comprising:
a substrate including a first region and a second region;
a stacked structure including a plurality of horizontal layers and a plurality of insulating layers alternately stacked on the substrate, the stacked structure having a stair step portion on the second region;
a plurality of channel hole structures extending through the stacked structure on the first region, each of the plurality of channel hole structures including an active pattern and a charge storage layer; and
a plurality of dummy hole structures extending through the stacked structure on the second region,
wherein each of the horizontal layers includes a first portion on the first region and a second portion on the second region, the second portion comprising a different material from the first portion, the first portion comprising a different material from the charge storage layer,
wherein each of the dummy hole structures extends through the second portion of a first one of the horizontal layers,
wherein the charge storage layer extends between the active pattern and ones of the plurality of horizontal layers, and
wherein the dummy hole structures comprise a dielectric material.
2 . The three-dimensional semiconductor memory device as claimed in claim 1 , wherein the first portion and the second portion each comprises a conductive material.
3 . The three-dimensional semiconductor memory device as claimed in claim 1 , wherein the channel hole structures comprise a semiconductor material.
4 . The three-dimensional semiconductor memory device as claimed in claim 1 , wherein at least one of the dummy hole structures extends through the stair step portion of the stacked structure.
5 . The three-dimensional semiconductor memory device as claimed in claim 1 , wherein at least one of the dummy hole structures is free of electrical connection with any bit line.
6 . The three-dimensional semiconductor memory device as claimed in claim 1 , wherein the dummy hole structures have respective dummy hole lengths that decrease with increasing distance from the channel hole structures.
7 . The three-dimensional semiconductor memory device as claimed in claim 1 , further comprising a plurality of bit lines crossing the stacked structure in the first region and electrically connected to the channel hole structures.
8 . A three-dimensional semiconductor memory device, comprising:
a substrate including a first region and a second region;
a stacked structure including a plurality of horizontal layers and a plurality of insulating layers alternately stacked on the substrate, the stacked structure including a first portion on the first region and a second portion on the second region, the second portion of the stacked structure having a stair step portion on the second region;
a plurality of channel hole structures extending through the first portion of the stacked structure on the first region;
at least one dummy hole structure extending through the second portion of the stacked structure on the second region; and
a bit line on the stacked structure,
wherein the at least one dummy hole structure has a top surface located at a different level from top surfaces of the channel hole structures, and
wherein a dielectric material is in the at least one dummy hole structure.
9 . The three-dimensional semiconductor memory device as claimed in claim 8 , wherein at least one of the horizontal layers comprises a first conductive material on the first region and a second conductive material different from the first conductive material on the second region.
10 . The three-dimensional semiconductor memory device as claimed in claim 8 , wherein the horizontal layers comprise a metallic material.
11 . The three-dimensional semiconductor memory device as claimed in claim 8 , wherein the at least one dummy hole structure extends through the stair step portion of the stacked structure.
12 . The three-dimensional semiconductor memory device as claimed in claim 8 , wherein the at least one dummy hole structure is free of electrical connection with any bit line.
13 . The three-dimensional semiconductor memory device as claimed in claim 8 , further comprising:
a plurality of contact plugs on the second region and electrically connected to respective ones of the plurality of horizontal layers; and
a plurality of conductive lines electrically connected to the plurality of contact plugs.
14 . A three-dimensional semiconductor memory device, comprising:
a substrate including a first region and a second region;
a stacked structure including a plurality of horizontal layers and a plurality of insulating layers alternately stacked on the substrate, the stacked structure having a stair step portion on the second region;
a plurality of channel hole structures penetrating the stacked structure on the first region, each of the plurality of channel hole structures including an active pattern and a charge storage layer; and
a plurality of dummy hole structures penetrating the stacked structure on the second region,
wherein each of the horizontal layers includes a first portion on the first region and a second portion on the second region, the second portion comprising a different material from the first portion,
wherein each of the dummy hole structures penetrates the second portion of a first one of the horizontal layers,
wherein at least one of the dummy hole structures penetrates two or more of the horizontal layers, and
wherein the charge storage layer extends between the active pattern and ones of the plurality of horizontal layers.
15 . The three-dimensional semiconductor memory device as claimed in claim 14 , wherein the dummy hole structures comprise a dielectric material, and
wherein the second portion of the first one of the horizontal layers comprises a conductive material.
16 . The three-dimensional semiconductor memory device as claimed in claim 14 , wherein the first portion comprises a conductive material.
17 . The three-dimensional semiconductor memory device as claimed in claim 14 , wherein the dummy hole structures are free of electrical connection with any bit line, and
wherein at least part of the first portion of the first one of the horizontal layers is spaced apart from the channel hole structures.