IP Library Granted Patent US 12,292,626
Granted Patent B2
US 12,292,626 · App. 17/923,554 · Granted May 6, 2025

Devices and methods for low voltage optical modulation

Inventors: Yuping Huang (Norwood, NJ); Yong Meng Sua (Fort Lee, NJ); Mingwei Jin (Jersey City, NJ); Jiayang Chen (Jersey City, NJ)
Assignee: The Trustees of the Stevens Institute of Technology
G02F1/0316G02B27/286G02F1/0305G02F1/035G02F1/2257B82Y20/00G02B2207/101G02F1/31G02F2203/15
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Quick Facts
Patent No.
US 12,292,626
App. No.
17/923,554
Granted
May 6, 2025
Kind
B2
Abstract

An electro-optic modulation structure 110 , a method for fabrication of the electro-optic modulation structure, and a method of optical modulation derived from an electro-optic modulation structure with low voltage of operation are disclosed. The low voltage operation of the electro-optic modulator is realized by designed electro-optic modulation structures that include the light confining waveguide 114 , overclad layer 120 and modulating electrode structure 116 for applying modulation voltages that are directed towards a low voltage operation of the electro-optic modulation 110 device upon consideration of optimal optical loss.

Claims (27)

1. An electro-optical modulator, comprising:

a base substrate;

a waveguide having a first surface proximate said base substrate and a second surface opposite said first surface and remote from said base substrate, said waveguide including a ledge projecting from said second surface thereof;

a first electrode, including a first section in contact with said second surface of said waveguide to one side of said ledge thereof, a first joint at an end of said first section proximate said ledge of said waveguide, and a second section extending from said first joint and being offset relative to said first section such that said second section has a terminal end located a first spaced distance from said second surface of said waveguide and a second spaced distance from said ledge of said waveguide;

a second electrode, including a third section in contact with said second surface of said waveguide to an opposite side of said ledge thereof, a second joint at an end of said third section proximate said ledge of said waveguide, and a fourth section extending from said second joint and being offset relative to said third section such that said fourth section has a terminal end located a third spaced distance from said second surface of said waveguide and a fourth spaced distance from said ledge of said waveguide, said fourth section of said second electrode being spaced from said second section of said first electrode by a fifth spaced distance, and said second joint of said second electrode being spaced from said first joint of said first electrode by a sixth spaced distance, which is different than said fifth spaced distance;

a cladding layer having a first portion interposed between said first surface of said waveguide and said base substrate and a second portion interposed between said second surface of said waveguide and said second and fourth sections of said first and second electrodes, respectively;

a first capacitor established by said first and second joints of said first and second electrodes, respectively, upon application of an electrical potential to at least one of said first and second electrodes; and

a second capacitor established by said second and said fourth sections of said first and second electrodes, respectively, upon application of an electrical potential to at least one of said first and second electrodes.

2. The electro-optical modulator of claim 1 , wherein said plurality of capacitors comprise a base capacitor and a top capacitor that are connected to form a dual-capacitor structure and create enhanced electromagnetic fields in said waveguide.

3. The electro-optical modulator of claim 1 , further comprising:

a beamsplitter at a first end of said modulator; and

a beam combiner at a second end of said modulator, opposite said beamsplitter.

4. The electro-optical modulator of claim 3 , wherein said beamsplitter and said beam combiner are each formed from directional couplers.

5. The electro-optical modulator of claim 3 , wherein said base and top capacitors partially surround said cladding layer.

6. The electro-optical modulator of claim 3 , wherein said beamsplitter and said beam combiner are implemented as multi-mode interferometers.

7. The electro-optical modulator of claim 3 , wherein said beamsplitter and said beam combiner are implemented through Y-branches.

8. The electro-optical modulator of claim 3 , wherein said beamsplitter and said beam combiner are implemented through anti-symmetrical branches.

9. The electro-optical modulator of claim 1 , wherein said waveguide comprises lithium niobate.

10. The electro-optical modulator of claim 1 , wherein said first and second electrodes comprise gold in thin films.

11. The electro-optical modulator of claim 1 , wherein said cladding layer completely surrounds said waveguide.

12. The electro-optical modulator of claim 1 , wherein said cladding layer comprises silicon dioxide.

13. The electro-optical modulator of claim 1 , wherein said modulator is configured to operate as a phase shifter.

14. The electro-optical modulator of claim 1 , wherein said modulator is configured to modulate the intensity of optical signals.

15. The electro-optical modulator of claim 1 , wherein said cladding further comprises a buried layer interposed between said substrate and said waveguide.

16. The electro-optical modulator of claim 1 , wherein said waveguide comprises a plurality of arms, and wherein opposite electric fields are applied to two arms of said plurality of arms.

17. The electro-optical modulator of claim 1 , wherein said first electrode and said second electrode are coplanar.

18. The electro-optical modulator of claim 1 , wherein said modulator forms an optical switch.

Assignments (1)
CONFIRMATORY LICENSE Recorded Aug 2, 2023
From: STEVENS INSTITUTE OF TECHNOLOGY
To: U.S. GOVERNMENT AS REPRESENTED BY THE SECRETARY OF THE ARMY
Reel/Frame 064464/0749 →
Continuity (2)
Provisional Application 63021012 · May 6, 2020
Related Publication 20230185119A1 · Jun 15, 2023
References Cited (124)
US 5850285A · Hill et al. · 1998 [cited by applicant]
US 6335215B1 · Yuang · 2002 [cited by examiner]
US 6480265B2 · Maimon et al. · 2002 [cited by applicant]
US 6483592B2 · Pedigo · 2002 [cited by applicant]
US 6583510B2 · Hanamaki · 2003 [cited by examiner]
US 6618411B1 · Takiguchi · 2003 [cited by examiner]
US 6711192B1 · Chikuma · 2004 [cited by examiner]
US 7072374B2 · Matsumura · 2006 [cited by examiner]
US 7095926B2 · Sugiyama · 2006 [cited by examiner]
US 7525123B2 · Kotani · 2009 [cited by examiner]
US 7567596B2 · Dantus et al. · 2009 [cited by applicant]
US 7751456B2 · Kawasaki · 2010 [cited by examiner]
US 7852892B2 · Hosoi · 2010 [cited by examiner]
US 8072609B1 · Trivedi et al. · 2011 [cited by applicant]
US 8232125B2 · Hatori · 2012 [cited by examiner]
US 8309929B2 · Bond et al. · 2012 [cited by applicant]
US 8339581B2 · Guha et al. · 2012 [cited by applicant]
US 8526478B2 · Ishimura · 2013 [cited by examiner]
US 8621931B2 · Phua et al. · 2014 [cited by applicant]
US 8665923B2 · Sprangle et al. · 2014 [cited by applicant]
US 8724933B2 · Takagi · 2014 [cited by examiner]
US 8761606B2 · Habif · 2014 [cited by applicant]
US 8774565B2 · Kissa · 2014 [cited by examiner]
US 9110315B2 · Nakanishi · 2015 [cited by examiner]
US 9244296B2 · Iwatsuka · 2016 [cited by examiner]
US 9281656B2 · Mueller · 2016 [cited by examiner]
US 9596421B1 · Itzler · 2017 [cited by applicant]
US 9696133B2 · Yuan et al. · 2017 [cited by applicant]
US 9746743B1 · Rabiei · 2017 [cited by examiner]
US 9945948B2 · Yang et al. · 2018 [cited by applicant]
US 10860746B2 · Foster et al. · 2020 [cited by applicant]
US 10892597B2 · Hagino · 2021 [cited by examiner]
US 10989980B2 · Iwatsuka · 2021 [cited by examiner]
US 11003046B2 · Liscidini · 2021 [cited by applicant]
US 11011887B2 · Gerhard · 2021 [cited by examiner]
US 11226531B2 · Iwatsuka · 2022 [cited by examiner]
US 11264775B2 · Huang · 2022 [cited by applicant]
US 11442697B2 · Huang et al. · 2022 [cited by applicant]
US 11693180B2 · Bahadori · 2023 [cited by examiner]
US 11693290B2 · Makino · 2023 [cited by examiner]
US 11914233B2 · Sugiyama · 2024 [cited by examiner]
US 12078877B2 · Sugiyama · 2024 [cited by examiner]
US 20020097962A1 · Yoshimura et al. · 2002 [cited by applicant]
US 20020141679A1 · Dol · 2002 [cited by examiner]
US 20040136634A1 · Chowdhury et al. · 2004 [cited by applicant]
US 20050123242A1 · Walker et al. · 2005 [cited by applicant]
US 20050175271A1 · Sugiyama · 2005 [cited by examiner]
US 20060067634A1 · Bull · 2006 [cited by examiner]
US 20060083379A1 · Brookner · 2006 [cited by applicant]
US 20060187988A1 · Tanaka · 2006 [cited by examiner]
US 20060245680A1 · Rasmussen et al. · 2006 [cited by applicant]
US 20070041413A1 · Kwak · 2007 [cited by examiner]
US 20080138087A1 · Jiang et al. · 2008 [cited by applicant]
US 20080197377A1 · Sudo · 2008 [cited by examiner]
US 20090046296A1 · Kilpatrick et al. · 2009 [cited by applicant]
US 20100124787A1 · Nitkowski et al. · 2010 [cited by applicant]
US 20120058585A1 · Maegawa · 2012 [cited by examiner]
US 20130036145A1 · Pruneri · 2013 [cited by applicant]
US 20130308667A1 · Hagino · 2013 [cited by examiner]
US 20140098955A1 · Hughes · 2014 [cited by applicant]
US 20140192363A1 · Kippenberg et al. · 2014 [cited by applicant]
US 20150323450A1 · Lipson et al. · 2015 [cited by applicant]
US 20160234017A1 · Englund · 2016 [cited by applicant]
US 20170131388A1 · Campbell et al. · 2017 [cited by applicant]
US 20180241480A1 · Hughes · 2018 [cited by applicant]
US 20200257502A1 · Steinle · 2020 [cited by applicant]
US 20200274703A1 · Lukens · 2020 [cited by applicant]
US 20200285131A1 · Marandi et al. · 2020 [cited by applicant]
US 20210080805A1 · Srinivasan et al. · 2021 [cited by applicant]
US 20210156684A1 · Huang · 2021 [cited by applicant]
US 20210247662A1 · Dorche et al. · 2021 [cited by applicant]
US 20210278708A1 · Kumar · 2021 [cited by examiner]
US 20210286203A1 · Safian · 2021 [cited by examiner]
US 20220075238A1 · Huang et al. · 2022 [cited by applicant]
US 20230079367A1 · Huang et al. · 2023 [cited by applicant]
US 20230155823A1 · Huang et al. · 2023 [cited by applicant]
US 20230168563A1 · Huang et al. · 2023 [cited by applicant]
CN 107070651A1 · 2006 [cited by applicant]
CN 202048988U · 2011 [cited by applicant]
CN 107528686A · 2017 [cited by applicant]
CN 111897054A · 2020 [cited by applicant]
EP 3477362A1 · 2019 [cited by applicant]
EP 3286603B1 · 2020 [cited by applicant]
GB 2510916A · 2015 [cited by applicant]
JP 4091956B2 · 2008 [cited by applicant]
KR 101899026B1 · 2018 [cited by applicant]
WO 2013112351A2 · 2013 [cited by applicant]
WO 2018031916A1 · 2018 [cited by applicant]
WO 2019241582A1 · 2020 [cited by applicant]
WO WO2021231794A1 · 2021 [cited by applicant]
WO WO2023004148A1 · 2023 [cited by applicant]
International Search Report for PCT/US2021/031177 entitled “Devices and Methods for Low Voltage Optical Modulation ” mailed on Jul. 22, 2021, 4 pages. [cited by applicant]
Written Opinion for PCT/US2021/031177 entitled “Devices and Methods for Low Voltage Optical Modulation” mailed on Jul. 22, 2021, 6 pages. [cited by applicant]
PCT International Preliminary Report on Patentability for PCT/US2021/031177 entitled “Devices and Methods for Low Voltage Optical Modulation” mailed on Nov. 8, 2022, 7 pages. [cited by applicant]
Jason Lin et al., “Quantum private comparison of equality protocol without a third party”, arxiv. org, vol. 13, No. 2, Oct. 1, 2013, pp. 239-247. [cited by applicant]
Goorden, Sebastianus & Horstmann, Marcel & Mosk, Allard & Skoric, Boris & Pinkse, Pepijn. (2013), “Quantum-Secure Authentication with a Classical Key”. [cited by applicant]
Arapinis et al., “Quantum Physical Unclonable Functions: Possibilities and Impossibilities.” Jun. 15, 2022, Quantum 5, 475 (2021). arXiv:1910.02126v4. [cited by applicant]
F. Xu, “Experimental fast quantum random No. generation using high-dimensional entanglement with entropy monitoring”, Optica 3, 1266-1269 (2016). [cited by applicant]
Hochrainer, Armin, “Low-Loss Optical Elements for a Loophole-Free Bell Test”, 2014 (Thesis). [cited by applicant]
Lee, H., Chen, T., Li, J. et al., “Ultra-low-loss optical delay line on a silicon chip”, Nat. Commun. 3, 867 (2012). https://doi.org/10.1038/ncomms1876. [cited by applicant]
Fiorentino, Marco & Munro, William & Santori, Charles & Spillane, Sean & Beausoleil, Ray. (2006), “II-Fiber-Optic Quantum Random No. Generator”, 1-2. 10.1109/CLEO.2006.4628717. [cited by applicant]
Nguyen L, Rehain P, Sua YM, Huang YP., “Programmable quantum random number generator without postprocessing”, Opt. Lett. Feb. 15, 2018;43(4):631-634. doi: 10.1364/OL.43.000631. PMID: 29444039. [cited by applicant]
Nguyen, Lac & Rehain, Patrick & Sua, Yong Meng & Huang, Yu-Ping. (2018), “Quantum Random Number Generator with Programmable Probability Distributions”, JTu3A.30. 10.1364/FIO.2018.JTu3A.30. [cited by applicant]
Kumar, S., Zhang, H. & Huang, YP., “Large-scale Ising emulation with four body interaction and all-to-all connections”, Commun. Phys. 3, 108 (2020). https://doi.org/10.1038/s42005-020-0376-5. [cited by applicant]
D. Pierangeli, G. Marcucci, and C. Conti, “Large-Scale Photonic Ising Machine by Spatial Light Modulation”, Phys. Rev. Lett. 122, 213902—Published May 31, 2019. [cited by applicant]
Roques-Carmes, C., Shen, Y., Zanoci, C. et al. “Heuristic recurrent algorithms for photonic Ising machines”, Nat. Commun. 11, 249 (2020). https://doi.org/10.1038/s41467-019-14096-z. [cited by applicant]
Shahverdi A, Sua YM, Dickson I, Garikapati M, Huang YP., “Mode selective up-conversion detection for LIDAR applications”, Opt Express. Jun. 11, 2018;26(12):15914-15923. doi: 10.1364/OE.26.015914. PMID: 30114845. [cited by applicant]
Geiser, P., Willer, U., Walter, D., and Schade, W., “A subnanosecond pulsed laser-source for mid-infrared LIDAR”, Applied Physics B: Lasers and Optics, vol. 83, No. 2, pp. 175-179, 2006. doi:10.1007/s00340-006-2158-5. [cited by applicant]
Shahverdi, Amin & Sua, Yong Meng & Tumeh, Lubna & Huang, Yu-Ping. (2017). “Quantum Parametric Mode Sorting: Beating the Time-Frequency Filtering”, Scientific Reports. 7. 10.1038/s41598-017-06564-7. [cited by applicant]
J. Lu, J. Surya, X. Liu, A. Bruch, Z. Gong, Y. Xu, and H. Tang, “Periodically poled thin-film lithium niobate microring resonators with a second-harmonic generation efficiency of 250,000%/W,” Optica 6, 1455-1460 (2019). [cited by applicant]
Fu. Y., Guo, M., & Phua, P. B. (2010), “Spatially encoded multibeam laser Doppler vibrometry using a single photodetector”, Optics Letters, 35(9), 1356-1358. [cited by applicant]
Yanlu Li, Jinghao Zhu, Matthieu Duperron, Peter O'Brien, Ralf Schüler, Soren Aasmul, Mirko de Melis, Mathias Kersemans, and Roel Baets, “Six-beam homodyne laser Doppler vibrometry based on silicon photonics technology,”… [cited by applicant]
Patrick Rehain, Jeevanandha Ramanathan, Yong Meng Sua, Shenyu Zhu, Daniel Tafone, and Yu-Ping Huang, “Single-photon vibrometry,” Opt. Lett. 46, 4346-4349 (2021). [cited by applicant]
Jiuyi Zhang, Yong Meng Sua, Jia-Yang Chen, Jeevanandha Ramanathan, Chao Tang, Zhan Li, Yongxiang Hu, Yu-Ping Huang; “Carbon-dioxide absorption spectroscopy with solar photon counting and integrated lithium niobate micro… [cited by applicant]
Tri Cao Doan, “Resonant Matter Wave Amplification in Mean Field Theory”, arXiv: 1112.3325v1 Quantum Gases, Dec. 14, 2011. [cited by applicant]
Hu, Yi & Siviloglou, Georgios & Zhang, Peng & Efremidis, Nikolaos & Christodoulides, Demetrios & Chen, Zhigang. (2012), “Self-accelerating Airy Beams: Generation, Control, and Applications”, 10.1007/978-1-4614-3538-9_1. [cited by applicant]
Yu-Ping Huang and Prem Kumar, “Mode-resolved photon counting via cascaded quantum frequency conversion,” Opt. Lett. 38, 468-470 (2013). [cited by applicant]
Abijith S. Kowligy, Paritosh Manurkar, Neil V. Corzo, Vesselin G. Velev, Michael Silver, Ryan P. Scott, S. J. B. Yoo, Prem Kumar, Gregory S. Kanter, and Yu-Ping Huang, “Quantum optical arbitrary waveform manipulation an… [cited by applicant]
Jingle Liu, Jianming Dai, See Leang Chin, and X.-C. Zhang, “Broadband terahertz wave remote sensing using coherent manipulation of fluorescence from asymmetrically ionized gases,” Nature Photonics, vol. 4, (Sep. 2010). [cited by applicant]
R. Sferopoulos, “A Review of Chemical Warfare Agent (CWA) Detector Technologies and Commercial-Off-The-Shelf Items,” DSTO Defence Science and Technology Organisation, Fishermans Bend, Victoria, Australia (2009). [cited by applicant]
Scully, et al., “Quantum Optics,” Published by Cambridge University Press, 1997. [cited by applicant]
Huang, et al., “Heralding single photons without spectral factorability”, Phys. Rev. A 82, 043826 (2010). [cited by applicant]
Seth Lloyd, “Enhanced Sensitivity of Photodetection via Quantum Illumination”, Science321, 1463-1465(2008), DOI: 10.1126/science.1160627. [cited by applicant]
U.S. Appl. No. 17/899,493, filed Aug. 30, 2022, titled Approaches, Apparatuses, and Methods for Non-Interferometric Quantum Photonics Vibrometry. Yuping Huang et al. [cited by applicant]
Cited By (1)
US 12,724,298