Semiconductor memory device and method of fabricating the same
View Patent ↗The present disclosure provides a semiconductor memory device and a fabricating method thereof, which includes a substrate, a bit line structure and a resistor structure. The substrate has a plurality of active areas and an isolating region. The resistor structure includes a first semiconductor layer and a first capping layer from bottom to top. The bit line structure includes a second semiconductor layer, a first conductive layer, and a second capping layer from bottom to top, wherein the first semiconductor layer and the second semiconductor layer include coplanar top surface and a same semiconductor material. In this way, the resistor formed thereby is allowable to obtain structural reliability and stable surface resistance, under a simplified process flow.
1 . A semiconductor memory device, comprising:
a substrate having a plurality of active areas and a plurality of isolating regions;
a resistor structure disposed on one of the plurality of isolating regions, comprising:
a first semiconductor layer;
a first capping layer, disposed on the first semiconductor layer; and
a first spacer, directly in contact with sidewalls of the first semiconductor layer and the first capping layer; and
a bit line structure, disposed on the substrate to intersect the active areas and a portion of the plurality of isolating regions, and the bit line structure comprising:
a second semiconductor layer;
a first conductive layer, disposed on the second semiconductor layer;
a second capping layer, disposed on the first conductive layer; and
a second spacer, directly in contact with sidewalls of the second semiconductor layer, the first conductive layer, and the second capping layer.
2 . The semiconductor memory device according to claim 1 , further comprising:
a composited dielectric layer, disposed on the substrate and covering the active areas and the plurality of isolating regions, wherein the composited dielectric layer comprises a first silicon oxide layer, a silicon nitride layer and a second silicon oxide layer stacked from bottom to top.
3 . The semiconductor memory device according to claim 2 , wherein the first spacer of the resistor structure and the second spacer of the bit line structure are respectively disposed on the composited dielectric layer.
4 . The semiconductor memory device according to claim 1 , further comprising:
an interlayer dielectric layer, disposed on the resistor structure of the interlayer dielectric layer is flushed with a top surface of the second capping layer of the bit line structure.
5 . The semiconductor memory device according to claim 4 , wherein a top surface of the interlayer dielectric layer is higher than a top surface of first capping layer.
6 . The semiconductor memory device according to claim 1 , further comprising:
a plurality of plugs, disposed on the substrate, one of the plugs directly contacts the first semiconductor layer of the resistor structure, and another one of the plugs directly contact the conductive layer of the bit line structure.
7 . The semiconductor memory device according to claim 6 , further comprising:
a silicide layer, only disposed between the one of the plugs and the first semiconductor layer.
8 . The semiconductor memory device according to claim 4 , further comprising:
gate line structure, disposed on the active areas, the gate line structure comprising:
the second conductive layer;
the second capping layer, disposed on the second semiconductor layer; and
the third spacer.
9 . The semiconductor memory device according to claim 8 , wherein the interlayer dielectric layer completely covers the gate line structure, and a top surface of the interlayer dielectric layer is higher than a top surface of second capping layer of the gate line structure.
10 . The semiconductor memory device according to claim 8 , wherein a top surface of the third spacer is lower than a top surface of the second spacer.
11 . The semiconductor memory device according to claim 1 , wherein a top surface of the first spacer is lower than a top surface of the second spacer.
12 . The semiconductor memory device according to claim 1 , wherein the first capping layer and the second capping layer comprise different materials.
13 . A semiconductor memory device, comprising:
a substrate having a plurality of active areas and a plurality of isolating regions;
a resistor structure disposed on one of the plurality of isolating regions, from bottom to top of the resistor structure sequentially comprising:
a first semiconductor layer; and
a first capping layer; and
a bit line structure, disposed on the substrate to intersect the active areas and a portion of the plurality of isolating regions, from bottom to top of the bit line structure sequentially comprising:
a second semiconductor layer, wherein the first semiconductor layer and the second semiconductor layer comprise coplanar top surface and a same semiconductor material;
a first conductive layer; and
a second capping layer.
14 . The semiconductor memory device according to claim 13 , wherein bottom surfaces of the resistor structure and the bit line structure are coplanar with each other, and a top surface of the resistor structure is lower than a top surface of the bit line structure.
15 . A semiconductor memory device, comprising:
a substrate having a plurality of active areas and an isolating region;
a resistor structure, comprising:
a first semiconductor layer;
a first capping layer, disposed on the first semiconductor layer; and
a first spacer, directly in contact with sidewalls of the first semiconductor layer and the first capping layer; and
a bit line structure, disposed on the substrate to intersect the active areas and the isolating region, and the bit line structure comprising:
a second semiconductor layer;
a first conductive layer, disposed on the second semiconductor layer;
a second capping layer, disposed on the first conductive layer; and
a second spacer, directly in contact with sidewalls of the second semiconductor layer, the first conductive layer, and the second capping layer;
wherein bottom surfaces of the resistor structure and the bit line structure are coplanar with each other, and a top surface of the resistor structure is lower than a top surface of the bit line structure.
16 . The semiconductor memory device according to claim 15 , further comprising:
a composited dielectric layer, disposed on the substrate and covering the active areas and the isolating region, wherein the composited dielectric layer comprises a first silicon oxide layer, a silicon nitride layer and a second silicon oxide layer stacked from bottom to top.
17 . The semiconductor memory device according to claim 16 , wherein the first spacer of the resistor structure and the second spacer of the bit line structure are respectively disposed on the composited dielectric layer.
18 . The semiconductor memory device according to claim 15 , further comprising:
an interlayer dielectric layer, disposed on the resistor structure of the interlayer dielectric layer is flushed with a top surface of the second capping layer of the bit line structure.
19 . The semiconductor memory device according to claim 18 , wherein a top surface of the interlayer dielectric layer is higher than a top surface of first capping layer.
20 . The semiconductor memory device according to claim 15 , further comprising:
a plurality of plugs, disposed on the substrate, one of the plugs directly contacts the first semiconductor layer of the resistor structure, and another one of the plugs directly contact the conductive layer of the bit line structure; and
a silicide layer, only disposed between the one of the plugs and the first semiconductor layer.