IP Library › Granted Patent US 12,470,196
Granted Patent B2
US 12,470,196 · App. 18/193,317 · Granted Nov 11, 2025

Acoustic wave device with wurtzite based piezoelectric layer

Inventors: Michael David Hill (Emmitsburg, MD); Alexandre Augusto Shirakawa (Cardiff by the Sea, CA); Benjamin Paul Abbott (Irvine, CA); Stefan Bader (Fort Collins, CO); David Albert Feld (Los Altos, CA); Kwang Jae Shin (Yongin, KR)
Assignee: Skyworks Global Pte. Ltd.
H03H9/02031C01B32/907H03H9/02015H03H9/02543H03H9/02834H03H9/173H03H9/176H03H9/25H03H9/568H03H9/6483C01P2002/52C01P2006/40
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Quick Facts
Patent No.
US 12,470,196
App. No.
18/193,317
Granted
Nov 11, 2025
Kind
B2
Abstract

Aspects of this disclosure relate to an acoustic wave device with a piezoelectric layer that includes a wurtzite structure. The wurtzite structure can include aluminum nitride and silicon carbide. Related piezoelectric layers, acoustic wave filters, radio frequency modules, wireless communication devices, and methods are disclosed.

Claims (24)

1 . An acoustic wave device comprising:

a piezoelectric layer including a wurtzite structure, the wurtzite structure including aluminum nitride and silicon carbide; and

an electrode over the piezoelectric layer, the acoustic wave device configured to generate an acoustic wave.

2 . The acoustic wave device of claim 1 wherein the piezoelectric layer has an acoustic velocity of at least 10,000 meters per second.

3 . The acoustic wave device of claim 2 wherein the acoustic velocity is less than 15,000 meters per second.

4 . The acoustic wave device of claim 1 wherein the piezoelectric layer further includes a dopant.

5 . The acoustic wave device of claim 1 wherein the acoustic wave device is a bulk acoustic wave device, and the acoustic wave is a bulk acoustic wave.

6 . The acoustic wave device of claim 5 wherein the bulk acoustic wave device has a resonant frequency of at least 6 gigahertz.

7 . The acoustic wave device of claim 5 wherein the bulk acoustic wave device has a resonant frequency in a range from 6 gigahertz to 15 gigahertz.

8 . The acoustic wave device of claim 1 wherein the acoustic wave device is a surface acoustic wave device, and the acoustic wave is a surface acoustic wave.

9 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC material system.

10 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC—C material system.

11 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC—BN material system.

12 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC—BN—C material system.

13 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC—ScN material system.

14 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC—ScN—C material system.

15 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC-½MgSiN 2 material system.

16 . The acoustic wave device of claim 1 wherein the piezoelectric layer consists of material in a AlN—SiC-½MgSiN 2 —C material system.

17 . A piezoelectric film comprising a wurtzite structure, the wurtzite structure including aluminum nitride and silicon carbide.

18 . A radio frequency module comprising:

an acoustic wave filter including an acoustic wave device, the acoustic wave device including a piezoelectric layer that includes a wurtzite structure, and the wurtzite structure including aluminum nitride and silicon carbide; and

radio frequency circuitry coupled to the acoustic wave filter, the acoustic wave filter and the radio frequency circuitry being enclosed within a common package.

19 . The radio frequency module of claim 18 wherein the radio frequency circuitry includes a radio frequency amplifier.

20 . The radio frequency module of claim 18 wherein the piezoelectric layer has an acoustic velocity of in a range from 10,000 meters per second to 15,000 meters per second.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 14, 2024
From: HILL, MICHAEL DAVID; SHIRAKAWA, ALEXANDRE AUGUSTO; ABBOTT, BENJAMIN PAUL; BADER, STEFAN; FELD, DAVID ALBERT; SHIN, KWANG JAE
To: SKYWORKS GLOBAL PTE. LTD.
Reel/Frame 066776/0104 →
Continuity (3)
Provisional Application 63362264 · Mar 31, 2022
Provisional Application 63362257 · Mar 31, 2022
Related Publication 20230353119A1 · Nov 2, 2023
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