Granted Patent B2

US 12,677,535 · App. 18/279,942 · Granted Jul 7, 2026

Inventors: Shingo Eguchi (Atsugi, JP); Hideki Uochi (Atsugi, JP)

Assignee: Semiconductor Energy Laboratory Co., Ltd.

H10K59/1201H10K71/166H10K71/60

Abstract

Claims (31)

1 . A method for fabricating a display device comprising a first light-emitting element, a second light-emitting element, and a third light-emitting element, the method comprising:

a first step of forming the first light-emitting element;

a second step of forming the second light-emitting element; and

a third step of forming the third light-emitting element,

wherein the first step comprises:

sequentially forming an anode, a first electroluminescent (EL) layer, a first cathode, and a first layer in order;

forming a first resist mask over the first layer;

selectively removing parts of the anode, the first EL layer, the first cathode, and the first layer;

removing part of the first resist mask;

selectively removing other parts of the first EL layer, the first cathode, and the first layer; and

removing other remaining parts of the first resist mask,

wherein the second step comprises:

sequentially forming a second EL layer, a second cathode, and a second layer in order over the anode;

forming a second resist mask over the second layer;

selectively removing parts of the anode, the second EL layer, the second cathode, and the second layer;

removing part of the second resist mask;

selectively removing other parts of the second EL layer, the second cathode, and the second layer; and

removing other remaining parts of the second resist mask, and

wherein the third step comprises:

sequentially forming a third EL layer, a third cathode, and a third layer in order over the anode;

forming a third resist mask over the third layer;

selectively removing parts of the anode, the third EL layer, the third cathode, and the third layer;

removing part of the third resist mask;

selectively removing other parts of the third EL layer, the third cathode, and the third layer; and

removing other remaining parts of the third resist mask.

2 . The method for fabricating the display device, according to claim 1 , wherein each of the first, second, and third resist masks is formed using a multi-tone mask.

3 . The method for fabricating the display device, according to claim 1 , wherein the second EL layer, the second cathode, and the second layer are formed to cover the first light-emitting element in the second step.

4 . The method for fabricating the display device, according to claim 1 , wherein the third EL layer, the third cathode, and the third layer are formed to cover the first light-emitting element and the second light-emitting element in the third step.

5 . The method for fabricating the display device, according to claim 1 , wherein the first, second, and third EL layers each comprise an organic EL material.

6 . The method for fabricating the display device, according to claim 1 , further comprising a step of forming a fourth layer covering the first light-emitting element, the second light-emitting element, and the third light-emitting element after the first to first, second, and third steps are finished.

7 . The method for fabricating the display device, according to claim 1 , further comprising a step of forming a first conductive layer electrically connected to each of the first cathode, the second cathode, and the third cathode.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (66)