Solid-state image sensor, imaging device, and electronic device
The present technology relates to a solid-state image sensor, an imaging device, and an electronic device capable of switching FD conversion efficiency in all pixels of a solid-state image sensor. A photodiode performs photoelectric conversion on incident light. A floating diffusion (FD) stores charge obtained by the photodiode. FD 2 , which is a second FD to which the capacity of an additional capacitor MIM is added, adds the capacity to the FD. The additional capacitor MIM is constituted by a first electrode formed by a wiring and a second electrode formed by a metallic light blocking film provided on a surface of a substrate on which the photodiode is formed. Switching between the FD and FD+FD 2 allows switching of the FD conversion efficiency. The present technology is applicable to a CMOS image sensor.
1. A light detecting device, comprising:
a photoelectric conversion region;
a transfer transistor;
a switch transistor; and
a wiring layer including:
a first electrode coupled to the switch transistor;
a second electrode opposed to the first electrode, the second electrode coupled to a predetermined potential; and
a region disposed between the first electrode and the second electrode,
wherein a capacitor includes the first electrode and the second electrode,
wherein the photoelectric conversion region is electrically connected to thea source follower circuit via the transfer transistor,
wherein the capacitor is electrically connected to the source follower circuit via the switch transistor,
wherein the switch transistor is electrically connected to the source follower circuit, and
wherein the source follower circuit is electrically connected to a selection transistor.
2. The light detecting device according to claim 1 , wherein the first and second electrodes are disposed in layers that are different from each other.
3. The light detecting device according to claim 1 , wherein the first electrode or the second electrode overlaps at least a part of the transistor of the source follower circuit in a vertical direction.
4. The light detecting device according to claim 1 , wherein the first electrode or the second electrode overlaps at least a part of the selection transistor in a vertical direction.
5. The light detecting device according to claim 1 , wherein the first electrode or the second electrode overlaps at least a part of the switch transistor in a vertical direction.
6. The light detecting device according to claim 1 , wherein the first electrode or the second electrode overlaps the photoelectric conversion region in a vertical direction.
7. The light detecting device according to claim 1 , wherein a gate of the transistor of the source follower circuit is electrically connected to a node of the switch transistor, and a node of the transistor of the source follower circuit is electrically connected to a node of the selection transistor.
8. The light detecting device according to claim 1 , wherein the first electrode includes a portion that has rectangular shape in a plan view.
9. The light detecting device according to claim 1 , wherein the second electrode includes a portion that has rectangular shape in a plan view.
10. The light detecting device according to claim 1 , further comprising a reset transistor.
11. The light detecting device according to claim 10 , wherein a gate of the transistor of the source follower circuit is electrically connected to a node of the reset transistor.
12. The light detecting device according to claim 1 , wherein the switch transistor and the transistor of the source follower circuit are disposed in a same active region.
13. The light detecting device according to claim 12 , wherein the selection transistor is disposed in the same active region.
14. The light detecting device according to claim 13 , wherein a reset transistor is disposed in the same active region.
15. The light detecting device according to claim 1 , wherein the switch transistor, and a reset transistor are arranged in this order.
16. The light detecting device according to claim 1 , wherein the transistor of the source follower circuit and the selection transistor are arranged in this order.
17. The light detecting device according to claim 1 , wherein the first electrode or the second electrode is coupled to a wiring in the wiring layer.