Solar cells formed via aluminum electroplating
View Patent ↗Electroplating of aluminum may be utilized to form electrodes for solar cells. In contrast to expensive silver electrodes, aluminum allows for reduced cell cost and addresses the problem of material scarcity. In contrast to copper electrodes which typically require barrier layers, aluminum allows for simplified cell structures and fabrication steps. In the solar cells, point contacts may be utilized in the backside electrodes for increased efficiency. Solar cells formed in accordance with the present disclosure enable large-scale and cost-effective deployment of solar photovoltaic systems.
1 . A method for electroplating aluminum onto a N-type silicon wafer, the method comprising:
preparing an ionic liquid;
cleaning the N-type silicon wafer with at least one of hydrogen fluoride, hydrogen chloride, hydrogen peroxide, or ammonium hydroxide;
diffusing at least one of phosphorus or arsenic onto a front side of the N-type silicon wafer, forming a first layer with a depth, and the first layer is an N+ surface field;
firing an aluminum electrode on the back side of the N-type silicon wafer at a temperature of between 700° C. and 800° C. to form a P+ back emitter;
washing the N-type silicon wafer with alcohol and deionized water; and
annealing the aluminum electrode of the back side at an annealing temperature of between 200° C. and 450° C. to prevent aluminum doping into the N-type silicon wafer.
2 . The method of claim 1 , wherein the depth of the first layer is between 0.7 and 1.3 micrometers.
3 . The method of claim 1 , wherein the P+ back emitter has a surface doping concentration of at least 1×10 19 cm −3 .
4 . The method of claim 1 , wherein the P+ back emitter has a thickness of between 7 and 13 micrometers.
5 . The method of claim 1 , wherein phosphorus is diffused into the front side with a concentration greater than 1×10 19 cm −3 .
6 . The method of claim 1 , wherein arsenic is diffused into the front side with a concentration of greater than 1×10 19 cm −3 .
7 . The method of claim 1 , wherein the P+ back emitter has a doping concentration of at least 1×10 19 cm −3 .
8 . The method of claim 1 , wherein a layer of silicon nitride is deposited on the back side using plasma-enhanced chemical vapor deposition and a layer of Al 2 O 3 is deposited on the front side using atomic layer deposition with a thickness of 5 nm to 50 nm.
9 . The method of claim 1 , wherein a layer of silicon nitride is deposited on the front side using plasma-enhanced chemical vapor deposition and a layer of Al 2 O 3 is deposited on the back side using atomic layer deposition with a thickness of 5 nm to 50 nm, wherein the layer of silicon nitride is deposited using plasma-enhanced chemical vapor deposition.
10 . The method of claim 1 , further comprising removing phosphosilicate glass formed on the N-type silicon wafer during diffusion.
11 . The method of claim 1 , wherein the ionic liquid comprises aluminum chloride and an organic halide, and wherein the ionic liquid has a molar ratio of aluminum chloride: organic halide greater than 1.
12 . The method of claim 11 , further comprising depositing aluminum on the back side of the N-type silicon wafer to form the aluminum electrode, wherein the depositing is performed via a galvanostatic process incorporating the ionic liquid, and wherein the depositing is performed with the ionic liquid at a temperature of between 111° C. and 150° C.
13 . The method of claim 11 , wherein the organic halide comprises 1-ethyl-3-methylimidazolium.
14 . The method of claim 11 , further comprising:
depositing at least one of nickel or titanium onto the back side of the N-type silicon wafer to form a layer of nickel or titanium, wherein the layer of nickel or titanium has a thickness of between about 50 nanometers and about 99 nanometers; and
depositing aluminum onto the layer of nickel or titanium to form the aluminum electrode.
15 . The method of claim 14 , wherein:
the at least one of nickel or titanium is deposited onto the back side of the N-type silicon wafer via a galvanostatic electroplating process to form the layer of nickel or titanium; and
the depositing the aluminum onto the layer of nickel or titanium is performed via a galvanostatic process incorporating the ionic liquid, and the depositing is performed with the ionic liquid at a temperature of between 111° C. and 150° C.