Semiconductor device and method of manufacturing the same, and electronic apparatus
A semiconductor device is provided as a back-illuminated solid-state imaging device. The device is manufactured by bonding a first semiconductor wafer with a pixel array in a half-finished product state and a second semiconductor wafer with a logic circuit in a half-finished product state together, making the first semiconductor wafer into a thin film, electrically connecting the pixel array and the logic circuit, making the pixel array and the logic circuit into a finished product state, and dividing the first semiconductor wafer and the second semiconductor being bonded together into microchips.
1. A light detecting device, comprising:
a first semiconductor section including a first wiring layer and a photodiode in a first semiconductor substrate, wherein the first wiring layer is on a side of the first semiconductor section opposite to a light incident side of the first semiconductor section, and wherein the first wiring layer includes a first plurality of wirings and a first insulating interlayer; and
a second semiconductor section including a second wiring layer and a circuit in a second semiconductor substrate, wherein the second wiring layer includes a second plurality of wirings and a second insulating interlayer,
wherein the first semiconductor section and the second semiconductor section are bonded together such that the first wiring layer and the second wiring layer face one another,
wherein a first wiring included in the first plurality of wirings and a second wiring included in the second plurality of wirings are connected to each other,
wherein a first part of the first insulating interlayer and a first part of the second insulating interlayer are connected to each other,
wherein the first wiring is electrically connected to the photodiode,
wherein the second wiring is electrically connected to the circuit, and
wherein a conductor penetrates the second semiconductor substrate and is electrically connected to the second wiring.
2. The light detecting device according to claim 1 , wherein the conductor is electrically connected to an electrode disposed on a side of the second wiring layer that is opposite a side of the second wiring layer facing the first wiring layer.
3. The light detecting device according to claim 1 , wherein the first plurality of wirings includes a third wiring, wherein the first wiring and the third wiring are disposed in different layers, and wherein a second part of the first insulating interlayer is disposed between the first wiring and the third wiring.
4. The light detecting device according to claim 3 , wherein the second plurality of wirings includes a fourth wiring, wherein the second wiring and the fourth wiring are disposed in different layers, and wherein a second part of the second insulating interlayer is disposed between the second wiring and the fourth wiring.
5. The light detecting device according to claim 4 , wherein the first wiring layer includes a connection conductor, and wherein the photodiode and the third wiring are electrically connected via the connection conductor.
6. The light detecting device according to claim 5 , wherein the second part of the first insulating interlayer is disposed between the third wiring and the first wiring in a direction perpendicular to the light incident side of the first semiconductor section.
7. The light detecting device according to claim 6 , wherein the first and second insulating interlayers are connected to each other along a common plane, and wherein the first and second wirings are connected to each other along the common plane.
8. The light detecting device according to claim 7 , wherein the third wiring is connected to a floating diffusion.
9. The light detecting device according to claim 7 , wherein the third wiring is connected to an amplification transistor.
10. The light detecting device according to claim 8 , wherein the first plurality of wirings includes a fifth wiring, and wherein the fifth wiring is connected to the floating diffusion and an amplification transistor.
11. The light detecting device according to claim 5 , wherein the photodiode generates a signal based on an amount of incident light, and wherein the signal is transferred from the photodiode to a part of the circuit via the third wiring and the connection conductor.
12. The light detecting device according to claim 5 , further comprising:
a floating diffusion and a transfer transistor disposed in the first semiconductor section.
13. The light detecting device according to claim 12 , further comprising:
at least one of a reset transistor, an amplification transistor, or a select transistor disposed in the first semiconductor section.
14. The light detecting device according to claim 1 , wherein the first wiring and the second wiring include copper (Cu).
15. The light detecting device according to claim 1 , wherein the photodiode generates a signal based on an amount of incident light, and wherein the signal is transferred from the photodiode to a part of the circuit via the first wiring and the second wiring.
16. The light detecting device according to claim 1 , wherein the first wiring and the second wiring are disposed in a pixel region including the photodiode.
17. The light detecting device according to claim 1 , wherein the first wiring and the second wiring are disposed in a peripheral region other than a pixel region including the photodiode.
18. The light detecting device according to claim 1 , wherein the first plurality of wirings and the second plurality of wirings include copper (Cu).
19. The light detecting device according to claim 1 , further comprising:
an insulating layer formed above the light incident side of the first semiconductor section.
20. The light detecting device according to claim 19 , further comprising:
at least one of an on-chip lens and a color filter formed above the insulating layer in a pixel region including the photodiode.
21. The light detecting device according to claim 1 , wherein the circuit includes at least one of a column signal processing circuit and a logic circuit.
22. The light detecting device according to claim 21 , wherein the circuit includes a column signal processing circuit, and wherein the column signal processing circuit performs at least one of noise removal, signal amplification and analogue-to-digital conversion.
23. The light detecting device according to claim 1 , wherein the first wiring and the first part of the first insulating interlayer partially form a bonding surface of the first semiconductor section, wherein the second wiring and the first part of the second insulating interlayer partially form a bonding surface of the second semiconductor section, and wherein the first semiconductor section and the second semiconductor section are bonded together such that the bonding surface of the first wiring layer and the bonding surface of the second wiring layer are bonded together.
24. The light detecting device according to claim 1 , wherein the first wiring is covered by a first barrier metal layer, and wherein the second wiring is covered by a second barrier metal layer.
25. The light detecting device according to claim 24 , wherein the first barrier metal layer and the second barrier metal layer include titanium (Ti).