Semiconductor device
A semiconductor device includes a substrate, a channel layer, an insulating layer, source/drain contacts, a gate dielectric layer, and a gate electrode. The channel layer over the substrate and includes two dimensional (2D) material. The insulating layer is on the channel layer. The source/drain contacts are over the channel layer. The gate dielectric layer is over the insulating layer and the channel layer. The gate electrode is over the gate dielectric layer and between the source/drain contacts.
1 . A semiconductor device comprising:
a first device comprising:
a first semiconductor device wherein the first semiconductor device comprises:
a channel layer;
source/drain contacts electrically connected to source/drain regions in the channel layer;
a gate dielectric layer over the channel layer;
a gate electrode over the gate dielectric layer and between the source/drain contacts; and
a 2D insulating layer between the source/drain contacts and the channel layer; and
a first interconnect structure electrically connected to the first semiconductor device, wherein the first interconnect structure comprises a first top conductive line;
a second device over the first device and comprising:
a second semiconductor device; and
a second interconnect structure electrically connected to the second semiconductor device, wherein the second interconnect structure comprises a second top conductive line aligned with the first top conductive line; and
a bonding layer between the first device and the second device, wherein the bonding layer is a 2D material layer and in contact with the first top conductive line and the second top conductive line, such that the first top conductive line is electrically connected to the second top conductive line through the 2D material layer, and wherein the source/drain contacts are electrically connected to the bonding layer through the first top conductive line of the first interconnect structure.
2 . The semiconductor device of claim 1 , wherein the bonding layer is hexagonal boron nitride.
3 . The semiconductor device of claim 1 , wherein the bonding layer is monolayer.
4 . The semiconductor device of claim 1 , wherein the first interconnect structure further comprises a third top conductive line in contact with the bonding layer.
5 . The semiconductor device of claim 4 , wherein the second interconnect structure further comprises a fourth top conductive line in contact with the bonding layer and aligned with the third top conductive line.
6 . The semiconductor device of claim 1 , wherein the 2D insulating layer electrically connects the source/drain contacts to the source/drain regions of the channel layer.
7 . A semiconductor device, comprising:
a substrate;
a channel layer over the substrate;
a gate dielectric layer over the channel layer;
a gate structure over the gate dielectric layer;
source/drain contacts on opposite sides of the gate structure and electrically coupled to the channel layer;
a first multilevel interconnect structure over the source/drain contacts;
a bonding layer over the first multilevel interconnect structure;
a second multilevel interconnect structure over the bonding layer, wherein the bonding layer has a higher electrical conductivity in a vertical direction between the first and second multilevel interconnect structures than in a lateral direction parallel with a major surface of the bonding layer; and
a two dimensional (2D) insulating layer between the source/drain contacts and the channel layer.
8 . The semiconductor device of claim 7 ,
wherein the 2D insulating layer is between the channel layer and the gate dielectric layer.
9 . The semiconductor device of claim 7 , wherein the bonding layer is hexagonal boron nitride.
10 . The semiconductor device of claim 7 , wherein the bonding layer has a thickness of about 3.0 angstroms to about 50 angstroms.
11 . The semiconductor device of claim 7 , wherein the channel layer is formed of 2D material different from a 2D material of the bonding layer.
12 . The semiconductor device of claim 7 , wherein the channel layer is transition metal dichalcogenide.
13 . The semiconductor device of claim 7 , wherein the bonding layer is monolayer.
14 . A semiconductor device comprising:
a plurality of first transistors, wherein one of the first transistor comprises:
a channel layer;
source/drain contacts electrically connected to source/drain regions in the channel layer;
a gate dielectric layer over the channel layer;
a gate electrode over the gate dielectric layer and between the source/drain contacts; and
a 2D insulating layer between the source/drain contacts and the channel layer;
a first interconnect structure over the plurality of first transistors;
a 2D material layer covering the first interconnect structure; and
a second interconnect structure over the 2D material layer, wherein the 2D material layer allows for electrical connection in a vertical direction between a conductive line of the first interconnect structure and a conductive line of the second interconnect structure, and allows for electrical insulation in a lateral direction between conductive lines within the first interconnect structure, wherein the source/drain contacts are electrically connected to the 2D material layer through the conductive line of the first interconnect structure.
15 . The semiconductor device of claim 14 , further comprising:
a plurality of second transistors over the plurality of first transistors.
16 . The semiconductor device of claim 15 , wherein the channel layer of one or more of the plurality of first transistors and channel layers of the plurality of second transistors are 2D-material channels.
17 . The semiconductor device of claim 16 , wherein the 2D-material channels have an electrical conductivity in the lateral direction higher than that of the 2D material layer.
18 . The semiconductor device of claim 14 , wherein the 2D material layer is a hexagonal boron nitride layer with a thickness less than about 50 angstroms.
19 . The semiconductor device of claim 15 , wherein the 2D material layer is between the first transistors and the second transistors.
20 . The semiconductor device of claim 14 , wherein a bottom surface of one of the source/drain contacts is in direct contact with the 2D insulating layer.