Semiconductor device with biofet and biometric sensors
The structure of a semiconductor device with an array of bioFET sensors, a biometric fingerprint sensor, and a temperature sensor and a method of fabricating the semiconductor device are disclosed. A method for fabricating the semiconductor device includes forming a gate electrode on a first side of a semiconductor substrate, forming a channel region between source and drain regions within the semiconductor substrate, and forming a piezoelectric sensor region on a second side of the semiconductor substrate. The second side is substantially parallel and opposite to the first side. The method further includes forming a temperature sensing electrode on the second side during the forming of the piezoelectric sensor region, forming a sensing well on the channel region, and binding capture reagents on the sensing well.
1 . A semiconductor device, comprising:
a substrate comprising a first side and a second side opposite to the first side, wherein the substrate comprises a semiconductor layer;
a gate electrode disposed on the first side of the substrate;
source and drain regions disposed in the substrate;
a channel region disposed between the source region and the drain region; and
a piezoelectric sensor disposed on the second side of the substrate and adjacent to the gate electrode, wherein the piezoelectric sensor and the gate electrode are laterally separated from each other by a portion of the substrate.
2 . The semiconductor device of claim 1 , wherein the piezoelectric sensor comprises:
a bottom electrode disposed on the second side of the substrate;
first and second piezoelectric layers disposed on the bottom electrode; and
first and second top electrodes disposed on the first and second piezoelectric layers, respectively.
3 . The semiconductor device of claim 1 , wherein the piezoelectric sensor comprises:
a sensing layer comprising a high-k material; and
an array of sensing regions electrically isolated from each other by the sensing layer.
4 . The semiconductor device of claim 1 , wherein the piezoelectric sensor comprises:
a sensing layer comprising a high-k material; and
a coupling layer comprising a polymeric material disposed on the sensing layer.
5 . The semiconductor device of claim 1 , wherein the piezoelectric sensor comprises:
a sensing layer comprising a high-k material; and
a cover plate comprising a sapphire glass disposed on the sensing layer.
6 . The semiconductor device of claim 1 , further comprising an isolation layer disposed between the piezoelectric sensor and the substrate.
7 . The semiconductor device of claim 1 , wherein the piezoelectric sensor comprises:
an isolation layer disposed between the piezoelectric sensor and the substrate; and
an array of cavities in the substrate, wherein portions of the isolation layer are exposed in the array of cavities.
8 . The semiconductor device of claim 1 , further comprising first and second cavities in the substrate, wherein first and second sensing regions of the piezoelectric sensor are aligned with the first and second cavities, respectively.
9 . The semiconductor device of claim 1 , further comprising a sensing well with capture reagents disposed on the channel region.
10 . The semiconductor device of claim 1 , further comprising an array of resonators under the piezoelectric sensor.
11 . A semiconductor device, comprising:
a substrate;
a biological field effect transistor (bioFET), comprising:
a gate electrode disposed on a first side of the substrate,
source and drain regions disposed in the substrate, and
a channel region disposed between the source region and the drain region; and
a biometric sensor comprising first and second piezoelectric layers disposed on a second side of the substrate.
12 . The semiconductor device of claim 11 , wherein the biometric sensor further comprises an oxide layer surrounding the first and second piezoelectric layers.
13 . The semiconductor device of claim 11 , further comprising a temperature sensor disposed on the second side of the substrate, wherein a sensing electrode of the temperature sensor is coupled to an interface layer of the bioFET, and wherein the interface layer is configured to hold capture reagents.
14 . The semiconductor device of claim 11 , wherein the biometric sensor further comprises a metal electrode disposed on the second side of the substrate, and
wherein the first and second piezoelectric layers are disposed on the metal electrode.
15 . The semiconductor device of claim 11 , wherein the biometric sensor further comprises a polymeric layer disposed on the first and second piezoelectric layers.
16 . The semiconductor device of claim 11 , the biometric sensor further comprises a sapphire glass disposed on the first and second piezoelectric layers.
17 . A semiconductor device, comprising:
a substrate;
a gate electrode disposed on a first side of the substrate;
source and drain regions disposed in the substrate;
first and second piezoelectric regions disposed on a second side of the substrate;
a high-k dielectric layer disposed on and between the first and second piezoelectric regions, wherein materials of the high-k dielectric layer and the first and second piezoelectric regions are different from each other; and
a temperature sensing electrode disposed on the second side of the substrate.
18 . The semiconductor device of claim 17 , further comprising a metal layer disposed between the substrate and the first and second piezoelectric regions.
19 . The semiconductor device of claim 17 , further comprising first and second metal layers disposed on the first and second piezoelectric regions, respectively.
20 . The semiconductor device of claim 17 , further comprising a coupling layer comprising a polymeric material disposed on the high-k dielectric layer.